Photoelectric conversion apparatus and equipment
The distance between an upper end of a light-shielding portion and a photoelectric conversion layer is longer than the distance between the lower surface of a light-shielding film and the photoelectric conversion layer. The distance between a lower end of the light-shielding portion and the photoelectric conversion layer is shorter than the distance between the lower surface of the light-shielding film and the photoelectric conversion layer. In a plane including the light-shielding film and the light-shielding portion, an opening defined by the light-shielding portion and a gap between the light-shielding portion and the light-shielding film are provided, and the width of the gap is smaller than the width of the opening.
1. An apparatus including a light-receiving pixel region and a light-shielded region, the apparatus comprising:
a photoelectric conversion layer including a plurality of photoelectric conversion portions;
a light-shielding portion over the photoelectric conversion layer in the light-receiving pixel region, the light-shielding portion surrounding each light-transmitting portion as an optical path for light incident on each of the plurality of photoelectric conversion portions in the light-receiving pixel region; and
a light-shielding film along a principal surface of the photoelectric conversion layer, the light-shielding film being over the photoelectric conversion layer in the light-shielded region,
wherein the light-shielding portion includes a lower end and an upper end, and the lower end is an end nearer the photoelectric conversion layer than the upper end in a first direction perpendicular to the principal surface of the photoelectric conversion layer, and the upper end is an end opposite to the lower end of the light-shielding portion in the first direction, and the light-shielding portion extends from the lower end to the upper end,
wherein the light-shielding film includes a lower surface and an upper surface, and the lower surface is a surface nearer the photoelectric conversion layer than the upper surface in the first direction, and the upper surface is a surface opposite to the lower surface of the light-shielding film in the first direction,
wherein a distance in the first direction between the upper end of the light-shielding portion and the principal surface of the photoelectric conversion layer is larger than a distance in the first direction between the lower surface of the light-shielding film and the principal surface of the photoelectric conversion layer,
wherein a distance in the first direction between the lower end of the light-shielding portion and the principal surface of the photoelectric conversion layer is smaller than the distance in the first direction between the lower surface of the light-shielding film and the principal surface of the photoelectric conversion layer,
wherein in a plane including the light-shielding film and the light-shielding portion, a plurality of openings each defined by the light-shielding portion and a gap between the light-shielding portion and the light-shielding film are provided,
wherein a width of the gap in a second direction in which one of the plurality of openings and the gap are arranged side by side is smaller than a width of one of the plurality of openings in the second direction,
wherein a width of the light-shielding portion between the plurality of openings which are adjacent to each other in the second direction is smaller than a width of the light-shielding film in the second direction.
2. The apparatus according to claim 1 , wherein the following inequality is satisfied:
B/D >( W+L )/ L
where W is the width of the gap,
L is a width of the light-shielding portion in the first direction,
B is a distance in the first direction between the upper surface of the light-shielding film and the principal surface of the photoelectric conversion layer, and
D is the distance in the first direction between the lower end of the light-shielding portion and the principal surface of the photoelectric conversion layer.
3. The apparatus according to claim 2 , wherein D<W is satisfied.
4. The apparatus according to claim 2 , wherein D<W/2 is satisfied.
5. The apparatus according to claim 2 , wherein W<B is satisfied.
6. The apparatus according to claim 3 , wherein W<B is satisfied.
7. The apparatus according to claim 4 , wherein W<B is satisfied.
8. The apparatus according to claim 2 , wherein L<B is satisfied.
9. The apparatus according to claim 2 , wherein W<L and/or B−D<W is satisfied.
10. The apparatus according to claim 8 , wherein W<L and/or B−D<W is satisfied.
11. The apparatus according to claim 1 , wherein the width of the gap is less than 500 nm.
12. The apparatus according to claim 1 , wherein the distance in the first direction between the lower end of the light-shielding portion and the principal surface of the photoelectric conversion layer is less than 200 nm.
13. The apparatus according to claim 1 , wherein the light-shielding portion includes a metal layer composed mainly of tungsten, and the light-shielding film includes a metal layer composed mainly of aluminum.
14. The apparatus according to claim 1 , wherein the light-shielding film is disposed between a dielectric layer in contact with the light-shielding film and a dielectric film in contact with the light-shielding film.
15. The apparatus according to claim 14 , wherein a combination of elements constituting the dielectric layer and a combination of elements constituting the dielectric film is different.
16. The apparatus according to claim 15 , wherein the dielectric layer includes oxide silicon, and the dielectric film includes silicon nitride.
17. The apparatus according to claim 1 , wherein the distance in the first direction between the upper end of the light-shielding portion and the principal surface of the photoelectric conversion layer is larger than a distance in the first direction between the upper surface of the light-shielding film and the principal surface of the photoelectric conversion layer.
18. The apparatus according to claim 1 , wherein a groove is provided between a first photoelectric conversion portion and a second photoelectric conversion portion in the photoelectric conversion layer in the light-receiving pixel region, the first photoelectric conversion portion and the second photoelectric conversion portion being included in the plurality of photoelectric conversion portions.
19. The apparatus according to claim 1 ,
wherein the light-shielding portion includes a first light-shielding portion and a second light-shielding portion located between the first light-shielding portion and the photoelectric conversion layer,
wherein the second light-shielding portion includes the lower end,
wherein the first light-shielding portion includes the upper end, and
wherein a width of the first light-shielding portion in the second direction is smaller than a width of the second light-shielding portion in the second direction.
20. The apparatus according to claim 1 , wherein a light-shielding portion made of the same material as the light-shielding portion is provided over the light-shielding film.
21. The apparatus according to claim 1 , wherein at least two photoelectric conversion portions are provided under the light-transmitting portion.
22. The apparatus according to claim 1 , wherein a first lens and a second lens disposed between the first lens and the light-transmitting portion are provided over the light-transmitting portion.
23. The apparatus according to claim 16 , wherein the dielectric film is provided at a lens portion.
24. The apparatus according to claim 1 , further comprising a wiring structure portion provided, with regard to the photoelectric conversion layer, on a side opposite to a side on which the light-shielding film is provided.
25. An equipment comprising:
the apparatus according to claim 1 ; and
at least one of the following:
an optical device compatible with the apparatus;
a controller configured to control the apparatus;
a processing device configured to process a signal output from the apparatus;
a display configured to display information obtained from the apparatus;
a storage configured to store the information obtained from the photoelectric conversion apparatus; or
a mechanical device configured to operate based on the information obtained from the apparatus.
26. The apparatus according to claim 14 , wherein the dielectric layer is in contact with the dielectric film in the light-receiving pixel region.
27. The apparatus according to claim 14 , wherein the dielectric film and the dielectric layer each include a portion extending from the light-shielding film to the light-shielding portion, the light-shielding portion penetrates through the portion of the dielectric film, and the lower end of the light-shielding portion is in contact with the portion of the dielectric layer.
28. The apparatus according to claim 14 , wherein the dielectric film is in contact with a side surface of the light-shielding film.
29. An apparatus including a light-receiving pixel region and a light-shielded region, the apparatus comprising:
a photoelectric conversion layer including a plurality of photoelectric conversion portions;
a light-shielding portion over the photoelectric conversion layer in the light-receiving pixel region, the light-shielding portion surrounding each light-transmitting portion as an optical path for light incident on each of the plurality of photoelectric conversion portions in the light-receiving pixel region;
a light-shielding film along a principal surface of the photoelectric conversion layer, the light-shielding film being over the photoelectric conversion layer in the light-shielded region, and
a wiring structure portion provided, with regard to the photoelectric conversion layer, on a side opposite to a side on which the light-shielding film is provided,
wherein the light-shielding portion includes a lower end and an upper end, and the lower end is an end nearer the photoelectric conversion layer than the upper end in a first direction perpendicular to the principal surface of the photoelectric conversion layer, and the upper end is an end opposite to the lower end of the light-shielding portion in the first direction,
wherein the light-shielding film includes a lower surface and an upper surface, and the lower surface is a surface nearer the photoelectric conversion layer than the upper surface in the first direction, and the upper surface is a surface opposite to the lower surface of the light-shielding film in the first direction,
wherein a distance in the first direction between the upper end of the light-shielding portion and the principal surface of the photoelectric conversion layer is larger than a distance in the first direction between the lower surface of the light-shielding film and the principal surface of the photoelectric conversion layer,
wherein a distance in the first direction between the lower end of the light-shielding portion and the principal surface of the photoelectric conversion layer is smaller than the distance in the first direction between the lower surface of the light-shielding film and the principal surface of the photoelectric conversion layer,
wherein in a plane including the light-shielding film and the light-shielding portion, a plurality of openings each defined by the light-shielding portion and a gap between the light-shielding portion and the light-shielding film are provided,
wherein a width of the gap in a second direction in which one of the plurality of openings and the gap are arranged side by side is smaller than a width of one of the plurality of openings in the second direction,
wherein a width of the light-shielding portion between the plurality of openings which are adjacent to each other in the second direction is smaller than a width of the light-shielding film in the second direction.
30. An equipment comprising:
the apparatus according to claim 29 ; and
at least one of the following:
an optical device compatible with the apparatus;
a controller configured to control the apparatus;
a processing device configured to process a signal output from the apparatus;
a display configured to display information obtained from the apparatus;
a storage configured to store the information obtained from the photoelectric conversion apparatus; or
a mechanical device configured to operate based on the information obtained from the apparatus.
31. The apparatus according to claim 1 , wherein the distance in the first direction between the upper end of the light-shielding portion and the principal surface of the photoelectric conversion layer is larger than a distance in the first direction between the upper surface of the light-shielding film and the principal surface of the photoelectric conversion layer.
32. The apparatus according to claim 1 , further comprising a layer including an inner lens, wherein the light-shielding film is disposed between the layer and the photoelectric conversion layer.
33. The apparatus according to claim 29 , wherein the distance in the first direction between the upper end of the light-shielding portion and the principal surface of the photoelectric conversion layer is larger than a distance in the first direction between the upper surface of the light-shielding film and the principal surface of the photoelectric conversion layer.
34. The apparatus according to claim 29 , further comprising a layer including an inner lens, wherein the light-shielding film is disposed between the layer and the photoelectric conversion layer.