Lift pin assembly
Apparatuses for substrate transfer are provided. A lift pin assembly can include a lift pin, a purge cylinder, and a lift pin guide. The lift pin guide is disposed adjacent the purge cylinder. The lift pin guide and the purge cylinder have a passage formed therethrough in which the lift pin is disposed. The purge cylinder includes one or more nozzles that direct the flow of gas radially inward into a portion of the passage disposed in the purge cylinder. The one or more nozzles are disposed radially outward from the lift pin. The purge cylinder reduces particle deposition on the substrate by preventing contact between the lift pin and the support assembly as the lift pin is in motion.
1. A lift pin assembly comprising:
a lift pin guide;
a purge cylinder disposed adjacent the lift pin guide, the lift pin guide and the purge cylinder having a passage formed therethrough that is configured to receive a lift pin suitable for lifting a substrate, wherein the purge cylinder comprises:
a plurality of nozzles configured to direct a flow of gas radially inward into a portion of the passage disposed in the purge cylinder that receives the lift pin, each nozzle included in the plurality of nozzles having an outer diameter of about 20 mil to about 80 mil; and
a bushing, wherein the lift pin guide is disposed between the purge cylinder and the bushing.
2. The lift pin assembly of claim 1 , wherein the purge cylinder is a ceramic material.
3. The lift pin assembly of claim 1 , wherein the lift pin guide is disposed below the purge cylinder.
4. The lift pin assembly of claim 1 , further comprising the lift pin disposed in the passage.
5. The lift pin assembly of claim 4 , wherein the plurality of nozzles are disposed radially outward from the lift pin.
6. The lift pin assembly of claim 4 , wherein the lift pin is fabricated from sapphire.
7. The lift pin assembly of claim 4 , wherein the plurality of nozzles are disposed in a staggered pattern surrounding the lift pin.
8. The lift pin assembly of claim 4 , wherein the plurality of nozzles comprise at least two nozzles that are disposed at an angle of about 120 degrees to about 180 degrees circumferentially around the lift pin.
9. The lift pin assembly of claim 1 , further comprising a hoop assembly disposed below the purge cylinder.
10. The lift pin assembly of claim 9 , wherein the lift pin guide is disposed between the purge cylinder and the hoop assembly.
11. An assembly comprising:
a substrate support;
a facility plate disposed below the substrate support; and
a lift pin assembly disposed within the substrate support and the facility plate comprising:
a lift pin guide;
a purge cylinder disposed adjacent the lift pin guide, the lift pin guide and the purge cylinder having a passage formed therethrough, wherein the purge cylinder comprises:
a plurality of nozzles configured to direct a flow of gas radially inward into a portion of the passage disposed in the purge cylinder, each nozzle included in the plurality of nozzles having an outer diameter of about 20 mil to about 80 mil to reduce particle deposition on a substrate;
a lift pin disposed in the passage; and a bushing, wherein the lift pin guide is disposed between the purge cylinder and the bushing.
12. The lift pin assembly of claim 11 , wherein the lift pin is fabricated from sapphire.
13. The lift pin assembly of claim 11 , wherein the plurality of nozzles are disposed in a staggered pattern surrounding the lift pin.
14. The lift pin assembly of claim 11 , wherein the purge cylinder is a ceramic material.
15. The lift pin assembly of claim 11 , wherein the plurality of nozzles are disposed radially outward from the lift pin.
16. The lift pin assembly of claim 11 , wherein the lift pin guide is disposed below the purge cylinder.
17. The lift pin assembly of claim 11 , wherein the plurality of nozzles comprise at least two nozzles that are disposed at an angle of about 120 degrees to about 180 degrees circumferentially around the lift pin.
18. The lift pin assembly of claim 11 , further comprising a hoop assembly disposed below the purge cylinder.
19. The lift pin assembly of claim 18 , wherein the lift pin guide is disposed between the purge cylinder and the hoop assembly.
20. A lift pin assembly comprising:
a lift pin configured to lift a substrate;
a lift pin guide;
a purge cylinder disposed adjacent the lift pin guide, the lift pin guide and the purge cylinder having a passage formed therethrough, wherein the lift pin guide is disposed below the purge cylinder, and wherein the purge cylinder comprises:
a plurality of nozzles configured to direct a flow of gas radially inward into a portion of the passage disposed in the purge cylinder, each nozzle included in the plurality of nozzles having an outer diameter of about 20 mil to about 80 mil to reduce particle deposition on the substrate,
wherein the lift pin is disposed in the passage; and
a bushing, wherein the lift pin guide is disposed between the purge cylinder and the bushing.