Butted body contact for SOI transistor, amplifier circuit and method of providing the same
Systems, methods, and apparatus for an improved body tie construction are described. The improved body tie construction is configured to have a lower resistance body tie exists when the transistor is “off” (Vg approximately 0 volts). When the transistor is “on” (Vg>Vt), the resistance to the body tie is much higher, reducing the loss of performance associated with presence of body tie. Space efficient Body tie constructions adapted for cascode configurations are also described.
1. A semiconductor structure, comprising:
a) a plurality of transistors configured as a cascode stack arranged from top to bottom, each transistor of the cascode stack comprising:
a drain region having a first conductivity type;
a source region having the first conductivity type;
a gate polysilicon structure defining a body region, the body region having a second conductivity type;
wherein for two consecutive transistors of the cascode stack, the source region of a top transistor and the drain region of a bottom transistor of the two consecutive transistors are formed in a common source/drain region, and
b) at least one body contact region of the second conductivity type contained within the source region of at least one transistor of the cascode stack, said body contact region separate from the body region of said transistor; and
c) at least one body tab of the second conductivity type in contact with the body region of the at least one transistor and the at least one body contact region, the at least one body tab configured to electrically connect the at least one body contact region to the body region,
wherein
the cascode stack comprises a first top transistor and a last bottom transistor, and
the semiconductor structure further comprises:
a last body contact region of the second conductivity type fully contained within a region that abuts the source region of the last bottom transistor; and
a last body tab of the second conductivity type in contact with the body region of the last bottom transistor and the last body contact region, the last body tab configured to electrically connect the last body contact region to the body region of the last bottom transistor.
2. The semiconductor structure according to claim 1 , further comprising:
additional one or more body contact regions of the second conductivity type contained within the source regions of respective one or more transistors of the cascode stack, the additional one or more body contact regions separate from the body regions of the respective one or more transistors; and
additional one or more body tabs of the second conductivity type in contact with the body regions of the respective one or more transistors and the additional one or more body contact regions,
wherein the additional one or more body tabs are configured to electrically connect the additional one or more body contact regions to the body regions of the respective one or more transistors.
3. The semiconductor structure according to claim 1 , further comprising:
additional one or more body tabs of the second conductivity type in contact with the body region of the at least one transistor and the at least one body contact region.
4. The semiconductor structure according to claim 3 , wherein:
the at least one body contact region comprises two or more body contact regions.
5. The semiconductor structure according to claim 1 , wherein:
the at least one body contact region is fully contained within the source region of the at least one transistor of the cascode stack.
6. The semiconductor structure according to claim 1 , further comprising:
a conductive contact atop a portion of the at least one body contact region.
7. The semiconductor structure according to claim 1 , further comprising:
an isolation region having the second conductivity type that isolates the at least one body contact region from the source region of the at least one transistor.
8. The semiconductor structure according to claim 7 , wherein:
the at least one body contact region is partially contained within the source region of the at least one transistor of the cascode stack.
9. The semiconductor structure according to claim 1 , wherein:
the at least one transistor is the top transistor of the two consecutive transistors, and
the semiconductor structure further comprises a non-conductive isolation region formed in the common source/drain region of the two consecutive transistors, the at least one non-conductive isolation region configured to:
i) form an interruption in a region of the body region of the bottom transistor to divide said body region into separate body regions, and
ii) extend the interruption into the source region of the bottom transistor of the two consecutive transistors, and
the at least one body contact region abuts the non-conductive isolation region.
10. The semiconductor structure according to claim 9 , wherein:
the interruption divides the source region of said bottom transistor into separate source regions.
11. The semiconductor structure according to claim 10 , wherein:
said source region of the bottom transistor is common with the drain region of a transistor adjacent the bottom transistor.
12. The semiconductor structure according to claim 1 , wherein:
each transistor of the cascode stack is a silicon-on-insulator (SOI) transistor, fabricated using a silicon-on-insulator (SOI) technology.
13. The semiconductor structure according to claim 12 , wherein:
a silicon layer of the SOI transistor device is a thin-film silicon layer.
14. The semiconductor structure according to claim 12 , further comprising:
an insulating layer; and
a silicon layer overlying the insulating layer,
wherein the drain region, the source region and the body region of each transistor of the cascode stack, the at least one body contact region, and the at least one body tab are formed in the silicon layer and extend through the silicon layer to reach the insulating layer.
15. The semiconductor structure according to claim 1 , further comprising:
at least one polysilicon tab configured to define the at least one body tab.
16. The semiconductor structure according to claim 15 , wherein:
the at least one polysilicon tab and the gate polysilicon structure form a single polysilicon structure.
17. An amplifier circuit comprising the semiconductor structure according to claim 1 .
18. A semiconductor structure, comprising:
a) a plurality of transistors configured as a cascode stack arranged from top to bottom, each transistor of the cascode stack comprising:
a drain region having a first conductivity type;
a source region having the first conductivity type;
a gate polysilicon structure defining a body region, the body region having a second conductivity type;
wherein for two consecutive transistors of the cascode stack, the source region of a top transistor and the drain region of a bottom transistor of the two consecutive transistors are formed in a common source/drain region, and
b) at least one body contact region of the second conductivity type contained within the source region of at least one transistor of the cascode stack, said body contact region separate from the body region of said transistor; and
c) at least one body tab of the second conductivity type in contact with the body region of the at least one transistor and the at least one body contact region, the at least one body tab configured to electrically connect the at least one body contact region to the body region,
wherein the semiconductor structure further comprises:
additional one or more body contact regions of the second conductivity type contained within the source regions of respective one or more transistors of the cascode stack, the additional one or more body contact regions separate from the body regions of the respective one or more transistors; and
additional one or more body tabs of the second conductivity type in contact with the body regions of the respective one or more transistors and the additional one or more body contact regions,
wherein the additional one or more body tabs are configured to electrically connect the additional one or more body contact regions to the body regions of the respective one or more transistors.
19. A semiconductor structure, comprising:
a) a plurality of transistors configured as a cascode stack arranged from top to bottom, each transistor of the cascode stack comprising:
a drain region having a first conductivity type;
a source region having the first conductivity type;
a gate polysilicon structure defining a body region, the body region having a second conductivity type;
wherein for two consecutive transistors of the cascode stack, the source region of a top transistor and the drain region of a bottom transistor of the two consecutive transistors are formed in a common source/drain region, and
b) at least one body contact region of the second conductivity type contained within the source region of at least one transistor of the cascode stack, said body contact region separate from the body region of said transistor; and
c) at least one body tab of the second conductivity type in contact with the body region of the at least one transistor and the at least one body contact region, the at least one body tab configured to electrically connect the at least one body contact region to the body region,
wherein the semiconductor structure further comprises additional one or more body tabs of the second conductivity type in contact with the body region of the at least one transistor and the at least one body contact region.
20. A semiconductor structure, comprising:
a) a plurality of transistors configured as a cascode stack arranged from top to bottom, each transistor of the cascode stack comprising:
a drain region having a first conductivity type;
a source region having the first conductivity type;
a gate polysilicon structure defining a body region, the body region having a second conductivity type;
wherein for two consecutive transistors of the cascode stack, the source region of a top transistor and the drain region of a bottom transistor of the two consecutive transistors are formed in a common source/drain region, and
b) at least one body contact region of the second conductivity type contained within the source region of at least one transistor of the cascode stack, said body contact region separate from the body region of said transistor; and
c) at least one body tab of the second conductivity type in contact with the body region of the at least one transistor and the at least one body contact region, the at least one body tab configured to electrically connect the at least one body contact region to the body region,
wherein the semiconductor structure further comprises an isolation region having the second conductivity type that isolates the at least one body contact region from the source region of the at least one transistor.