IP Library Granted Patent US 11,313,878
Granted Patent B2
US 11,313,878 · App. 17/232,774 · Granted Apr 26, 2022

Pan-sharpening for microscopy

Inventors: Olga S. Ovchinnikova (Oak Ridge, TN); Nikolay Borodinov (Oak Ridge, TN); Anton V. Ievlev (Oak Ridge, TN); Sergei V. Kalinin (Oak Ridge, TN); Rama K. Vasudevan (Oak Ridge, TN)
Assignee: UT-BATTELLE, LLC
G01Q30/04G01N23/2258G01Q60/24
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Quick Facts
Patent No.
US 11,313,878
App. No.
17/232,774
Granted
Apr 26, 2022
Kind
B2
Abstract

Techniques for generating full-spatial resolution, full spectral resolution image(s) from a 3D spectral-data cube for any spectral value within a given spectral range are provided without requiring the acquisition of all full-spatial resolution, full spectral resolution data by an instrument. The 3D spectral-data cube is generated from a limited number of full-spatial resolution, sparse spectral resolution data and a sparse-spatial resolution, full-spectral resolution data of the same area of the sample. The use of the 3D spectral-data cube reduces the data acquisition time.

Claims (83)

1. A system comprising:

an instrument configured to:

acquire a set of two or more first-spatial resolution monochromatic images corresponding to slices of a 3D spectral-data cube, the 3D spectral-data cube has two spatial dimensions and one spectral dimension, the two spatial dimensions having the first-spatial resolution, each point in the two spatial dimensions has an associated spectrum extending over a given spectral range, the 3D spectral-data cube is indicative of one or more constitutive materials of a sample and their abundance on the sample's surface,

for each first-spatial resolution monochromatic image, each first-spatial resolution point has an associated spectral value at a respective color within the given spectral range, where a number of images in the set is less than a number of slices of the 3D spectral-data cube; and

acquire second-spatial resolution spectral maps of the sample, the second-spatial resolution being less than the first-spatial resolution, each second-spatial resolution point of the second-spatial resolution spectral maps has an associated spectrum extending over the given spectral range, and

a processor configured to:

receive the set of two or more first-spatial resolution monochromatic images and the second-spatial resolution spectral maps of the sample;

produce the 3D spectral-data cube by combining the two or more first-spatial resolution monochromatic images and the second-spatial resolution spectral maps using a particular restoration procedure;

generate a first-spatial resolution monochromatic image for a target spectral value within the given spectral range using the 3D spectral-data cube in response to receipt of a request for the target spectral value, the target spectral value being any spectral value within the given spectral range; and

cause a presentation of information about the first-spatial resolution monochromatic image for the target spectral value on a display.

2. The system of claim 1 , wherein the processor is further configured to analyze the second-spatial resolution spectral maps of the sample to determine spectra of the one or more constitutive materials of the sample and a number of the one or more materials and configured to control the instrument to acquire the set of two or more first-spatial resolution monochromatic images based on the determinations.

3. The system of claim 2 , wherein a number of first-spatial resolution monochromatic images in the set is greater than or equal to the determined number of the one or more materials.

4. The system of claim 2 , wherein the respective color of each first-spatial resolution monochromatic image acquired is within the spectra of different peaks in the determined spectra.

5. The system of claim 1 , wherein the instrument is configured for atomic force microscope (AFM) in IR mode (AFM-IR) and wherein the instrument comprises a tunable-pulsed light source, a cantilever, a deflection light source configured to emit light onto the cantilever and a light detector configured to detect light which corresponds to light absorbed by the sample, where the spectral dimension of the 3D spectral-data cube is wavenumbers within a given IR spectral range.

6. The system of claim 5 , wherein the first-spatial resolution is the same spatial resolution as the AFM.

7. The system of claim 1 , wherein the instrument comprises the processor.

8. The system of claim 1 , wherein the spectral dimension of the 3D spectral-data cube is continuous within the given spectral range.

9. The system of claim 1 , wherein the particular restoration procedure is coupled non-negative matrix factorization (CNMF).

10. The system of claim 9 , wherein the CNMF comprises a first decomposition and a second composition,

in the first decomposition, the processor is configured to determine a number of endmembers in the second-spatial resolution spectral maps, spectra for each endmember and coefficients for each spatial point in the second-spatial resolution for each endmember, where the coefficients form first abundance maps, and the spectra of the endmembers form first spectral maps; and

in the second decomposition, the processor is configured to determine the spectra for the same endmember in the first-spatial resolution monochromatic images, and coefficients for each spatial point in the first-spatial resolution monochromatic images, where the spectra for the same endmembers form second spectral maps, and the coefficients for the same endmembers for each spatial point in the first-spatial resolution monochromatic images form second abundance maps; and

wherein the processor is further configured to produce the 3D spectral-data cube by multiplying the first spectral maps by the second abundance maps.

11. The system of claim 10 , wherein the spectra for the endmembers represents the spectra of the one or more constitutive materials in the sample, respectively.

12. The system of claim 10 , wherein the number of endmembers is based on a number of distinctly dissimilar spectral signatures within the second-spatial resolution spectral maps.

13. The system of claim 10 , wherein the determination of the coefficients for the same endmembers for each spatial point in the first-spatial resolution monochromatic images is an iterative process and initial values are determined by interpolation of the coefficients in the first abundance maps.

14. The system of claim 13 , wherein the interpolation is bilinear interpolation.

15. The system of claim 10 , wherein the determination of the spectra for the same endmembers in the first-spatial resolution monochromatic images is an iterative process and initial values are based on spectral values in the first spectral maps corresponding to the respective color of each first-spatial resolution monochromatic image.

16. The system of claim 1 , wherein the information about the first-spatial resolution monochromatic image is the first-spatial resolution monochromatic image.

17. An apparatus comprising:

a communication interface;

a user interface configured to receive requests for a target spectral value within a given spectral range;

a memory configured to store one or more computer readable modules;

a processor, when executing the one or more computer readable modules is configured to:

receive a set of two or more first-spatial resolution monochromatic images corresponding to slices of a 3D spectral-data cube from an instrument via the communication interface, the 3D spectral-data cube has two spatial dimensions and one spectral dimension, the two spatial dimensions having the first-spatial resolution, each point in the two spatial dimensions has an associated spectrum extending over the given spectral range, the 3D spectral-data cube is indicative of one or more constitutive materials of a sample and their abundance on the sample's surface,

for each first-spatial resolution monochromatic image, each first-spatial resolution point has an associated spectral value at a respective color within the given spectral range, where a number of images in the set is less than a number of slices of the 3D spectral-data cube;

receive second-spatial resolution spectral maps of the sample from an instrument via the communication interface, the second-spatial resolution being less than the first-spatial resolution, each second-spatial resolution point of the second-spatial resolution spectral maps has an associated spectrum extending over the given spectral range;

produce the 3D spectral-data cube by combining the two or more first-spatial resolution monochromatic images and the second-spatial resolution spectral maps using a particular restoration procedure and store the 3d-spectral data cube in the memory;

generate a first-spatial resolution monochromatic image for a target spectral value within the given spectral range using the stored 3D spectral-data cube in response to receipt of a request for the target spectral value via the user interface, the target spectral value being any spectral value within the given spectral range; and

cause a presentation of information about the first-spatial resolution monochromatic image for the target spectral value on a display.

18. A method comprising:

receiving a set of two or more first-spatial resolution monochromatic images corresponding to slices of a 3D spectral-data cube from an instrument, the 3D spectral-data cube has two spatial dimensions and one spectral dimension, the two spatial dimensions having the first-spatial resolution, each point in the two spatial dimensions has an associated spectrum extending over the given spectral range, the 3D spectral-data cube is indicative of one or more constitutive materials of a sample and their abundance on the sample's surface,

for each first-spatial resolution monochromatic image, each first-spatial resolution point has an associated spectral value at a respective color within the given spectral range, where a number of images in the set is less than a number of slices of the 3D spectral-data cube;

receive second-spatial resolution spectral maps of the sample from an instrument via the communication interface, the second-spatial resolution being less than the first-spatial resolution, each second-spatial resolution point of the second-spatial resolution spectral maps has an associated spectrum extending over the given spectral range;

producing the 3D spectral-data cube by combining the two or more first-spatial resolution monochromatic images and the second-spatial resolution spectral maps using a particular restoration procedure and storing the 3D spectral-data cube;

generating a first-spatial resolution monochromatic image for a target spectral value within the given spectral range using the stored 3D spectral-data cube in response to receipt of a request for the target spectral value, the target spectral value being any spectral value within the given spectral range; and

causing a presentation of information about the first-spatial resolution monochromatic image for the target spectral value.

19. The method of claim 18 , wherein combining the second-spatial resolution spectral maps with the first-spatial resolution monochromatic images comprises:

decomposing the second-spatial resolution spectral maps to obtain a first matrix representing spectra of the one or more constitutive materials of the sample; and

decomposing the set of first-spatial resolution monochromatic images to obtain a second matrix representing abundance maps of the one or more constitutive materials on the sample's surface; and wherein

the 3D spectral-data cube is produced by multiplying the first matrix and the second matrix.

20. The method of claim 18 , further comprising:

analyzing the second-spatial resolution spectral maps of the sample to determine spectra of the one or more constitutive materials of the sample and determine a number of the one or more constitutive materials therein; and

controlling the instrument to acquire the set of two or more first-spatial resolution monochromatic images based on the determinations.

21. A computer-readable recording medium having one or more modules of computer-readable instructions, the computer-readable instructions, when executed by a processor cause the processor to:

receive a set of two or more first-spatial resolution monochromatic images corresponding to slices of a 3D spectral-data cube from an instrument, the 3D spectral-data cube has two spatial dimensions and one spectral dimension, the two spatial dimensions having the first-spatial resolution, each point in the two spatial dimensions has an associated spectrum extending over the given spectral range, the 3D spectral-data cube is indicative of one or more constitutive materials of a sample and their abundance on the sample's surface,

for each first-spatial resolution monochromatic image, each first-spatial resolution point has an associated spectral value at a respective color within the given spectral range, where a number of images in the set is less than a number of slices of the 3D spectral-data cube;

receive second-spatial resolution spectral maps of the sample from an instrument, the second-spatial resolution being less than the first-spatial resolution, each second-spatial resolution point of the second-spatial resolution spectral maps has an associated spectrum extending over the given spectral range;

produce the 3D spectral-data cube by combining the two or more first-spatial resolution monochromatic images and the second-spatial resolution spectral maps using a particular restoration procedure and store the 3D spectral-data cube;

generate a first-spatial resolution monochromatic image for a target spectral value within the given spectral range using the stored 3D spectral-data cube in response to receipt of a request for the target spectral value, the target spectral value being any spectral value within the given spectral range; and

cause a presentation of information about the first-spatial resolution monochromatic image for the target spectral value.

22. A method comprising:

receiving a set of two or more first-spatial resolution monochromatic images corresponding to slices of a 3D spectral-data cube from an instrument, the 3D spectral-data cube has two spatial dimensions and one spectral dimension, the two spatial dimensions having the first-spatial resolution, each point in the two spatial dimensions has an associated spectrum extending over the given spectral range, the 3D spectral-data cube is indicative of one or more constitutive materials of a sample and their abundance on the sample's surface,

for each first-spatial resolution monochromatic image, each first-spatial resolution point has an associated spectral value at a respective color within the given spectral range, where a number of images in the set is less than a number of slices of the 3D spectral-data cube;

receiving second-spatial resolution spectral maps of the sample from an instrument, the second-spatial resolution being less than the first-spatial resolution, each second-spatial resolution point of the second-spatial resolution spectral map has an associated spectrum extending over the given spectral range;

producing the 3D spectral-data cube by combining the two or more first-spatial resolution monochromatic images and the second-spatial resolution spectral maps using a particular restoration procedure and storing the 3D spectral-data cube; and

transmitting the 3D spectral-data cube to a server.

23. A system comprising:

an instrument configured to:

acquire first-spatial resolution first-spectral resolution maps corresponding to a subset of slices of a 3D spectral-data cube, the 3D spectral-data cube has two spatial dimensions and one spectral dimension, the two spatial dimensions having the first-spatial resolution, each point in the two spatial dimensions has an associated spectrum extending over a given spectral range, the 3D spectral-data cube is indicative of one or more constitutive materials of a sample and their abundance on the sample's surface,

each first-spatial resolution point has an associated spectrum extending over the given spectral range; and

acquire second-spatial resolution second spectral resolution maps of the sample, the second-spatial resolution being less than the first-spatial resolution, the second-spectral resolution being more than the first-spectral resolution, each second-spatial resolution point has an associated spectrum extending over the given spectral range, and

a processor configured to:

receive the first-spatial resolution first-spectral resolution maps and the second-spatial resolution second spectral resolution maps of the sample; and

produce the 3D spectral-data cube by combining the first-spatial resolution first-spectral resolution maps and the second-spatial resolution second spectral resolution maps using a particular restoration procedure.

24. The system of claim 23 , wherein the processor is further configured to:

generate a first-spatial resolution image for a target spectral value within the given spectral range using the 3D spectral-data cube in response to receipt of a request for the target spectral value, the target spectral value being any spectral value within the given spectral range; and

cause a presentation of information about the first-spatial resolution image for the target spectral value on a display.

25. The system of claim 23 , wherein the processor is further configured to transmit the 3D spectral-data cube to a server.

26. The system of claim 23 , wherein the instrument is configured for time-of-flight secondary ion mass spectrometry (ToF-SIMS), wherein the instrument comprises:

a first ion beam and a second ion beam, where the second ion beam is focused and has a spot size smaller than the first ion beam;

an electrode configured to extract ions from the sample; and

an a time-of flight analyzer configured to detect ions and a time each ions reach the detector, wherein the spectral dimension of the 3D spectral-data cube is a mass spectrum or a mass-to-charge ratio spectrum.

27. The system of claim 23 , wherein the instrument is configured for Electron Energy Loss Spectrometry, wherein the instrument comprises an electron beam and an electron energy loss spectrometer, wherein the spectral dimension of the 3D spectral-data cube is an energy loss spectrum.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 8, 2022
From: OVCHINNIKOVA, OLGA S.; BORODINOV, NIKOLAY; IEVLEV, ANTON; KALININ, SERGEI V.; VASUDEVAN, RAMA K.
To: UT-BATTELLE, LLC
Reel/Frame 059196/0013 →
CONFIRMATORY LICENSE Recorded Dec 13, 2021
From: UT-BATTELLE, LLC
To: U. S. DEPARTMENT OF ENERGY
Reel/Frame 058369/0166 →
Continuity (2)
Provisional Application 63010967 · Apr 16, 2020
Related Publication 20210325428A1 · Oct 21, 2021
Cited By (1)
US 12,601,698