Forming semiconductor structures with two-dimensional materials
A process is provided to fabricate a finFET device having a semiconductor layer of a two-dimensional “2D” semiconductor material. The semiconductor layer of the 2D semiconductor material is a thin film layer formed over a dielectric fin-shaped structure. The 2D semiconductor layer extends over at least three surfaces of the dielectric fin structure, e.g., the upper surface and two sidewall surfaces. A vertical protrusion metal structure, referred to as “metal fin structure”, is formed about an edge of the dielectric fin structure and is used as a seed to grow the 2D semiconductor material.
1. A structure, comprising:
a substrate;
a first fin structure of a first material over the substrate;
a first metal protrusion structure laterally in contact with an edge surface of the first fin structure along a first direction; and
a semiconductor layer of a two-dimensional material on the first fin structure, the semiconductor layer being grown using the first metal protrusion structure as a seed.
2. The structure of claim 1 , comprising a dielectric layer between the first metal protrusion structure and the substrate.
3. The structure of claim 1 , wherein the first metal protrusion structure has a smaller dimension than the first fin structure in the first direction.
4. The structure of claim 1 , wherein the semiconductor layer at least partially covers the first metal protrusion structure.
5. The structure of claim 1 , wherein the first metal protrusion structure extends beyond the first fin structure in a second direction that is substantially orthogonal to the first direction.
6. The structure of claim 1 , wherein the first metal protrusion structure is one or more of tungsten, molybdenum, or platinum.
7. The structure of claim 1 , further comprising a second metal protrusion structure adjacent to a second edge surface of the first fin structure.
8. The structure of claim 1 , wherein the semiconductor layer fully covers the first fin structure except for the edge surface of the first fin structure in contact with the first metal protrusion structure.
9. The structure of claim 1 , wherein the semiconductor layer is two-dimensional tungsten disulfide.
10. The structure of claim 1 , wherein the first fin structure is a dielectric material.
11. A method, comprising:
forming a first fin structure and a first metal protrusion structure over a substrate, the first metal protrusion in contact with an edge portion of the first fin structure in a first direction; and
forming a semiconductor layer of a two-dimensional material on the first fin structure using the first metal protrusion structure as a seed.
12. The method of claim 11 , wherein the forming the first fin structure and the first metal protrusion structure includes:
forming a dielectric layer of a dielectric material over the substrate;
forming a metal layer of a metal material over the substrate and besides the dielectric layer; and
patterning the dielectric layer and the metal layer together, thereby forming a second fin structure including a first portion of the metal material and a second portion of the dielectric material.
13. The method of claim 11 , wherein the forming the first fin structure and the first metal protrusion structure includes selectively patterning the second portion of the dielectric material, thereby forming the first fin structure that has a smaller dimension than the first portion of the metal material of the second fin structure in a second direction that is traverse to the first direction.
14. The method of claim 11 , wherein the two-dimensional material is WS 2 and the forming the semiconductor layer of the two-dimensional material WS 2 includes using WO 3 powders and sulfur vapor precursor.
15. The method of claim 14 , wherein the forming the first metal protrusion structure includes forming the first metal protrusion structure of one or more of tungsten, molybdenum, or platinum.
16. A method, comprising:
forming a vertical metal structure over a substrate;
forming a dielectric fin structure over the substrate and laterally extending from the vertical metal structure along a first direction;
forming a semiconductor layer of a two-dimensional material over the dielectric fin structure using the metal fin structure as a seed, the semiconductor layer covering at least two sidewalls of the dielectric fin structure along the first direction; and
forming a gate structure over a first portion of the semiconductor layer.
17. The method of claim 16 , wherein the vertical metal structure is configured as a source or drain structure.
18. The method of claim 16 , wherein the vertical metal structure is configured as a body contact structure.
19. The method of claim 16 , wherein the gate structure is formed wrapping over three surfaces of the dielectric fin structure including the two sidewalls of the dielectric fin structure.
20. The method of claim 16 , comprising forming a dielectric layer between the vertical metal structure and the substrate.