IP Library Granted Patent US 12,010,835
Granted Patent B2
US 12,010,835 · App. 17/241,321 · Granted Jun 11, 2024

Three-dimensional memory device with a conductive drain-select-level spacer and methods for forming the same

Inventors: Zhixin Cui (Nagoya, JP); Satoshi Shimizu (Yokkaichi, JP)
Assignee: SANDISK TECHNOLOGIES LLC
H10B41/27G11C8/14H10B41/10H10B43/10H10B43/27
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Quick Facts
Patent No.
US 12,010,835
App. No.
17/241,321
Granted
Jun 11, 2024
Kind
B2
Abstract

A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers, memory opening fill structures vertically extending through the alternating stack in a memory array region, and an electrically conductive spacer extending vertically and electrically connecting a first drain-select-level electrically conductive layer to a second drain-select-level electrically conductive layer.

Claims (13)

1. A three-dimensional memory device, comprising:

an alternating stack of insulating layers and electrically conductive layers, wherein the electrically conductive layers comprise word-line-level electrically conductive layers and drain-select-level electrically conductive layers located above the word-line-level electrically conductive layers;

a first backside trench fill structure extending along a first horizontal direction and comprising a first dielectric surface that contacts first sidewalls of each layer within the alternating stack;

a second backside trench fill structure extending along the first horizontal direction, separated from the first backside trench fill structure along a second horizontal direction perpendicular to the first horizontal direction, and comprising a second dielectric surface that contacts second sidewalls of each layer within the alternating stack;

a contact-level dielectric layer overlying the alternating stack;

drain-select-level isolation structures extending through the contact-level dielectric layer and the drain-select-level electrically conductive layers but not through the word-line-level electrically conductive layers of the alternating stack, wherein the drain-select-level isolation structures extend in the first horizontal direction and are spaced apart along the second horizontal direction;

memory opening fill structures vertically extending through the alternating stack in a memory array region in which each layer within the alternating stack is present, wherein each of the memory opening fill structures comprises a vertical semiconductor channel and a memory film, wherein an entirety of the memory opening fill structures underlies a bottom surface of the contact-level dielectric layer;

an electrically conductive spacer extending vertically and electrically connecting a first drain-select-level electrically conductive layer of the drain-select-level electrically conductive layers to a second drain-select-level electrically conductive layer of the drain-select-level electrically conductive layers, wherein the electrically conductive spacer extends along the second horizontal direction and contacts ends of the first and the second drain-select-level electrically conductive layers along the second horizontal direction; and

an additional electrically conductive spacer extending vertically and electrically connecting a third drain-select-level electrically conductive layer of the drain-select-level electrically conductive layers to a fourth drain-select-level electrically conductive layer of the drain-select-level electrically conductive layers.

2. The three-dimensional memory device of claim 1 , wherein:

the additional electrically conductive spacer extends along the second horizontal direction and contacts ends of the third and the fourth drain-select-level electrically conductive layers along the second horizontal direction;

the additional electrically conductive spacer is vertically offset from the electrically conductive spacer; and

the additional electrically conductive spacer is laterally offset from the electrically conductive spacer along the first horizontal direction.

Assignments (4)
SECURITY AGREEMENT Recorded Apr 25, 2025
From: SANDISK TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 071050/0001 →
PARTIAL RELEASE OF SECURITY INTERESTS Recorded Apr 25, 2025
From: JPMORGAN CHASE BANK, N.A., AS AGENT
To: SANDISK TECHNOLOGIES, INC.
Reel/Frame 071382/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 31, 2024
From: SANDISK TECHNOLOGIES LLC
To: SANDISK TECHNOLOGIES, INC.
Reel/Frame 069796/0423 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 27, 2021
From: CUI, ZHIXIN; SHIMIZU, SATOSHI
To: SANDISK TECHNOLOGIES LLC
Reel/Frame 056051/0094 →
Continuity (1)
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