Polishing composition and method of polishing a substrate having enhanced defect inhibition
View Patent ↗An aqueous alkaline chemical mechanical polishing composition includes a quaternary phosphonium compound having aromatic groups which enables enhanced reduction of defects on silicon oxide substrates and enables good silicon oxide removal rates during chemical mechanical polishing. The chemical mechanical polishing composition is stable.
1. A chemical mechanical polishing composition consisting of water; an abrasive;
optionally a pH adjusting agent; optionally a biocide; a pH greater than 7; and a quaternary phosphonium compound having formula (I):
wherein R is selected from the group consisting of phenyl, benzyl, and linear or branched C 1 -C 4 alkyl; and X is an anion selected from the group consisting of Br − , I − , F − and OH − .
2. The chemical mechanical polishing composition of claim 1 , wherein the chemical mechanical polishing composition consists of the water; 0.1 to 40 wt % of the abrasive; optionally the pH adjusting agent; optionally the biocide; the pH greater than 7; 0.001 to 1 wt % of the quaternary phosphonium compound having the formula (I):
wherein R is selected from the group consisting of phenyl, benzyl, and linear or branched C 1 -C 4 alkyl; and X is an anion selected from the group consisting of Br − , I − , F − and OH − .
3. The chemical mechanical polishing composition of claim 1 , wherein the chemical mechanical polishing composition consists of the water; 5 to 25 wt % of the abrasive, wherein the abrasive is a colloidal silica abrasive; the pH adjusting agent; the biocide; a pH of 8-13; 0.01 to 1 wt % of the quaternary phosphonium compound having the formula (I):
wherein R is selected from the group consisting of phenyl, benzyl, and linear or branched C 1 -C 4 alkyl; and X is an anion selected from the group consisting of Br − , Cl − , I − , F − and OH − .
4. The chemical mechanical polishing composition of claim 3 , wherein the pH adjusting agent is selected from the group consisting of potassium hydroxide, sodium hydroxide, ammonium salts and mixtures thereof.
5. The chemical mechanical polishing composition of claim 1 , wherein the quaternary phosphonium compound is selected from the group consisting of tetraphenyl phosphonium bromide, tetraphenyl phosphonium chloride, benzyltriphenyl phosphonium bromide, benzyltriphenyl phosphonium chloride, ethyltriphenyl phosphonium bromide, ethyltriphenyl phosphonium chloride, methyltriphenyl phosphonium bromide, methyltriphenyl phosphonium chloride and mixtures thereof.
6. A method for chemical mechanical polishing of a substrate, comprising: providing a substrate, wherein the substrate comprises silicon oxide; providing a chemical mechanical polishing composition consisting of water; an abrasive; optionally a pH adjusting agent; optionally a biocide; a pH greater than 7; a quaternary phosphonium compound having (I):
wherein R is selected from the group consisting of phenyl, benzyl, and linear or branched C 1 -C 4 alkyl; and X is an anion selected from the group consisting of Br − , Cl − , I − , F − and OH − ; providing a chemical mechanical polishing pad with a polishing surface; creating dynamic contact at an interface between the polishing surface of the chemical mechanical polishing pad and the substrate with a down force of 3 to 35 kPa; and dispensing the chemical mechanical polishing composition onto the chemical mechanical polishing pad at or near the interface between the chemical mechanical polishing pad and the substrate; and wherein some of the silicon oxide is removed from the substrate.
7. The method of chemical mechanical polishing a substrate of claim 6 , wherein the quaternary phosphonium compound is selected from the group consisting of tetraphenyl phosphonium bromide, tetraphenyl phosphonium chloride, benzyltriphenyl phosphonium bromide, benzyltriphenyl phosphonium chloride, ethyltriphenyl phosphonium bromide, ethyltriphenyl phosphonium chloride, methyltriphenyl phosphonium bromide, methyltriphenyl phosphonium chloride and mixtures thereof.