Packaging structure for a sensor having a sealing layer
According to an aspect, a sensor packaging structure includes a sensor die having a first surface and a second surface opposite the first surface, where the sensor die defines a sensor edge disposed between the first surface and the second surface. The sensor packaging structure includes a bonding material having a first surface and a second surface opposite the second surface, where the bonding material defines a bonding material edge disposed between the first surface of the bonding material and the second surface of the bonding material. The sensor packaging structure includes a transparent material, where the bonding material couples the sensor die to the transparent material. The sealing material is disposed on an interface between the sensor die and the bonding material, and at least one of a portion of the sensor edge or a portion of the bonding material edge.
1. A method for fabricating a sensor packaging structure, the method comprising:
coupling a sensor die to a light transmitting substrate using a bonding material such that an empty space is defined between a portion of the sensor die and the light transmitting substrate;
forming a passivation layer on the sensor die and a portion of the bonding material, the passivation layer including a first portion abutting and covering a sensor edge, the passivation layer including a second portion abutting and covering at least a portion of an edge of the bonding material; and
coupling a metal layer to a portion of the passivation layer, the metal layer covering the first and second portions of the passivation layer, wherein the first and second portions of the passivation layer that are covered by the metal layer form a continuous layer, a top of the first portion of the passivation layer is at a height, from the light transmitting substrate, equal to or greater than a top of the metal layer.
2. The method of claim 1 , further comprising:
forming at least one conductive via on the sensor die.
3. The method of claim 2 , wherein the at least one conductive via is formed before the passivation layer is formed on the sensor die.
4. The method of claim 2 , wherein the at least one conductive via includes a tapered via, the tapered via extending entirely through the sensor die.
5. The method of claim 2 , wherein the passivation layer abuts and covers the at least one conductive via.
6. The method of claim 1 , further comprising:
removing an edge portion of the bonding material to define the portion of the edge of the bonding material.
7. The method of claim 1 , further comprising:
coupling a plurality of conductive components to the sensor die.
8. The method of claim 7 , wherein the plurality of conductive components include solder balls.
9. The method of claim 1 , further comprising:
removing, after the sensor die is coupled to the light transmitting substrate, a portion of the sensor die such that a thickness of the sensor die is reduced.
10. The method of claim 1 , wherein the edge of the bonding material includes a first linear portion and a second linear portion, the second linear portion being disposed at a non-zero angle with respect to the first linear portion, the second linear portion being aligned in a plane that is parallel to a top surface of the light transmitting substrate.
11. A method for fabricating a sensor packaging structure, the method comprising:
coupling a sensor die to a light transmitting substrate using a bonding material such that an empty space is defined between a portion of the sensor die and the light transmitting substrate, the sensor die having a first surface and a second surface, the sensor die defining a sensor edge that extends between and contacts the first surface and the second surface;
forming at least one conductive via on the sensor die, the at least one conductive via extending between the first surface and the second surface;
forming a passivation layer on the sensor die and the bonding material, the passivation layer including a first portion abutting and covering the sensor edge, the passivation layer including a second portion abutting and covering at least a portion of an edge of the bonding material; and
coupling a metal layer to a portion of the passivation layer, the metal layer covering the first and second portions of the passivation layer, wherein the first and second portions of the passivation layer that are covered by the metal layer form a continuous layer, a top of the first portion of the passivation layer is at a height, from the light transmitting substrate, equal to or greater than a top of the metal layer.
12. The method of claim 11 , wherein the passivation layer includes a third portion abutting and covering a portion of the sensor die defined by the at least one conductive via, the metal layer not contacting the third portion of the passivation layer.
13. The method of claim 11 , wherein the at least one conductive via includes a tapered via, the tapered via including a hole that extends entirely through the sensor die, the hole including conductive material.
14. The method of claim 11 , further comprising:
removing an edge portion of the bonding material to form a first linear portion and a second linear portion, the passivation layer being formed on the first linear portion and the second linear portion.
15. The method of claim 11 , further comprising:
coupling a plurality of conductive components to the passivation layer on the sensor die.
16. The method of claim 15 , wherein the plurality of conductive components include solder balls.
17. The method of claim 11 , wherein the sensor die includes an image sensor wafer, the method further comprising:
removing a portion of the image sensor wafer.
18. The method of claim 14 , wherein the second linear portion is disposed at a non-zero angle with respect to the first linear portion, the second linear portion being aligned in a plane that is parallel to a top surface of the light transmitting substrate.
19. A method for fabricating a sensor packaging structure, the method comprising:
coupling a sensor die to a light transmitting substrate using a bonding material such that an empty space is defined between a portion of the sensor die and the light transmitting substrate, the sensor die having a first surface and a second surface disposed opposite to the first surface, a portion of the second surface contacting the bonding material, the sensor die defining a sensor edge that extends between and contacts the first surface and the second surface;
forming at least one conductive via on the sensor die, the at least one conductive via extending between the first surface and the second surface;
forming a passivation layer on the sensor die and the bonding material, the passivation layer including a first portion abutting and covering the sensor edge, the passivation layer including a second portion abutting and covering at least a portion of an edge of the bonding material, the passivation layer including a third portion abutting and covering the first surface of the sensor die; and
coupling a metal layer to a portion of the passivation layer, the metal layer contacting the first and second portions of the passivation layer, the metal layer not contacting the third portion of the passivation layer, a top of the first portion of the passivation layer is at a height, from the light transmitting substrate, equal to or greater than a top of the metal layer.
20. The method of claim 19 , further comprising:
removing, after the sensor die is coupled to the light transmitting substrate, an edge portion of the bonding material such that the edge of the bonding material forms a first linear portion and a second linear portion, the second linear portion being disposed at a non-zero angle with respect to the first linear portion, wherein the passivation layer is formed on the first linear portion and the second linear portion.