IP Library Granted Patent US 11,776,871
Granted Patent B2
US 11,776,871 · App. 17/247,525 · Granted Oct 3, 2023

Module with substrate recess for conductive-bonding component

Inventors: Leo Gu (Suzhou, CN); Sixin Ji (NanTong, CN); Jie Chang (Suzhou, CN); Keunhyuk Lee (Suzhou, CN); Yong Liu (Cumberland Foreside, ME)
Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
H01L23/3735H01L21/4871H01L24/32H01L24/83H01L2224/32237H01L2224/83815
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Quick Facts
Patent No.
US 11,776,871
App. No.
17/247,525
Granted
Oct 3, 2023
Kind
B2
Abstract

In one general aspect, an apparatus can include a semiconductor component, a substrate including a recess, and a conductive-bonding component. The conductive-bonding component is disposed between the semiconductor component and the substrate. The conductive-bonding component has a first thickness between a bottom of the recess and a bottom surface of the semiconductor component greater than a second thickness between the top of the substrate and the bottom surface of the semiconductor component.

Claims (34)

1. An apparatus, comprising:

a semiconductor component;

a substrate including a channel having an outer edge disposed outside of an outer perimeter of the semiconductor component; and

a conductive-bonding component,

the conductive-bonding component disposed between the semiconductor component and the substrate, the conductive-bonding component having a first thickness between a bottom of the channel and a bottom surface of the semiconductor component greater than a second thickness between a top of the substrate and the bottom surface of the semiconductor component, and

the channel being in fluid communication with an overflow channel that extends from the channel and is a same width as the channel.

2. The apparatus of claim 1 , wherein the channel has an inner edge, the inner edge of the channel is disposed below the semiconductor component and the outer edge is not disposed below the semiconductor component.

3. The apparatus of claim 1 , wherein the channel has an inner edge, the inner edge of the channel recess is disposed below the semiconductor component, the inner edge of the channel has a sloped surface.

4. The apparatus of claim 1 , wherein the channel is a first channel portion having an inner edge, the inner edge of the first channel recess portion is disposed below the semiconductor component,

the substrate includes a second channel portion having an inner edge and an outer edge, the inner edge of the second channel portion is disposed below the semiconductor component, and

the semiconductor component has a width greater than a width between the inner edge of the first channel portion and the inner edge of the second channel portion.

5. The apparatus of claim 1 , wherein the semiconductor component has a width that is greater than a width of a mesa defined by the channel around the semiconductor component.

6. The apparatus of claim 1 , wherein the overflow channel is included in a pair of orthogonally-oriented overflow channels.

7. The apparatus of claim 1 , wherein the channel has a substantially flat bottom surface aligned with a plane aligned along the bottom surface of the semiconductor component.

8. The apparatus of claim 1 , wherein the channel is defined within the substrate around the outer perimeter of the semiconductor component.

9. The apparatus of claim 1 , wherein the semiconductor component includes at least one of a semiconductor die.

10. The apparatus of claim 1 , wherein the substrate is a direct bonded metal substrate including a dielectric disposed between a first metal layer and a second metal layer, the channel is defined within the first metal layer.

11. The apparatus of claim 1 , wherein the semiconductor component is an aluminum spacer.

12. An apparatus, comprising:

an aluminum spacer;

a substrate including a channel; and

a conductive-bonding component,

the aluminum spacer being coupled to the substrate via the conductive-bonding component, the channel having an inner edge and an outer edge, the inner edge defining a mesa disposed below the aluminum spacer, the outer edge of the channel is disposed outside of an outer perimeter of the aluminum spacer.

13. The apparatus of claim 12 , wherein the inner edge of the channel is disposed inside of the outer perimeter of the aluminum spacer.

14. The apparatus of claim 12 , wherein the conductive-bonding component has a first thickness inside of the channel greater than a second thickness on top of the mesa.

15. The apparatus of claim 12 , wherein the channel is a perimeter channel, the substrate defines an overflow channel in fluid communication with and extending from a portion of the perimeter channel, the overflow channel has a width that is the same as a width of the perimeter channel.

16. The apparatus of claim 12 , wherein the channel has at least one of a ladder-shaped recess, a u-shaped recess, a semicircular-shaped recess, or a v-shaped recess.

17. An apparatus, comprising:

a semiconductor component;

a substrate including a channel having an inner edge and an outer edge, the outer edge being disposed outside of an outer perimeter of the semiconductor component, the inner edge of the channel defining a mesa disposed below the semiconductor component, the channel is in fluid communication with a first overflow channel and a second overflow channel aligned orthogonal to the first overflow channel;

a conductive-bonding component; and

the conductive-bonding component disposed between the semiconductor component and the substrate.

18. The apparatus of claim 17 , wherein the inner edge of the channel is disposed below the semiconductor component and the outer edge is not disposed below the semiconductor component.

19. The apparatus of claim 17 , wherein the inner edge of the channel is disposed below the semiconductor component, the inner edge of the channel has a sloped surface.

Assignments (3)
RELEASE OF SECURITY INTEREST IN PATENTS PREVIOUSLY RECORDED AT REEL 055315, FRAME 0350 Recorded Aug 17, 2023
From: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC; FAIRCHILD SEMICONDUCTOR CORPORATION
Reel/Frame 064618/0881 →
SECURITY INTEREST Recorded Feb 17, 2021
From: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC; FAIRCHILD SEMICONDUCTOR CORPORATION
To: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
Reel/Frame 055315/0350 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 15, 2020
From: GU, LEO; JI, SIXIN; CHANG, JIE; LEE, KEUNHYUK; LIU, YONG
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Reel/Frame 054653/0908 →
Continuity (1)
Related Publication 20220189848A1 · Jun 16, 2022