METHOD OF FRAGMENTING OR METHOD OF GENERATING CRACKS IN SEMICONDUCTOR MATERIAL, AND METHOD OF MANUFACTURING SEMICONDUCTOR MATERIAL LUMPS
Provided are a method of fragmenting or a method of generating cracks in a semiconductor material, and a method of producing semiconductor material lumps, which can prevent contamination from an electrode material accompanied by application of a high-voltage pulse; in a method of fragmenting or generating cracks in the semiconductor material by applying high-voltage pulse to the semiconductor material disposed in liquid, new fluid is supplied towards at least one of a part on which the high-voltage pulse is applied and a vicinity of an electrode part, and the new fluid and a part of the liquid are drawn from the liquid and discharged.
1 . A method of fragmenting or a method of generating cracks in semiconductor material wherein in a method of fragmenting the semiconductor material or a method of generating cracks in the semiconductor material by applying a high-voltage pulse on the semiconductor material disposed in liquid, a new fluid is continuously supplied to at least one of a part to which the high-voltage pulse is applied in the semiconductor material and the electrode parts.
2 . The method of fragmenting or the method of generating cracks in semiconductor material according to claim 1 , wherein the new fluid is continuously supplied and the new fluid and a part of the liquid is drawn and discharged from the liquid.
3 . The method of fragmenting or the method of generating cracks in semiconductor material according to claim 1 , wherein the new fluid is also supplied to semiconductor material after the high-voltage pulse is applied.
4 . The method of fragmenting or the method of generating cracks in semiconductor material according to claim 1 , wherein at least a part of the new fluid is flowed in a direction different from a direction toward the semiconductor material in an imaginary line in which a distance between a tip end of the electrode parts and the semiconductor material is minimum.
5 . The method of fragmenting or the method of generating cracks in semiconductor material according to claim 1 , wherein after the new fluid is supplied to a part to which the high-voltage pulse is applied or the electrode parts or the semiconductor material after the high-voltage pulse is applied, at least a part of the new fluid is discharged along with liquid from a system.
6 . The method of fragmenting or the method of generating cracks in semiconductor material according to claim 1 , wherein the liquid and the fluid are water or pure water.
7 . The method of fragmenting or the method of generating cracks in semiconductor material according to claim 1 , wherein the liquid and the fluid include bubbles.
8 . The method of fragmenting or the method of generating cracks in semiconductor material according to claim 1 , wherein the semiconductor material is polycrystalline silicon to be raw material for producing monocrystalline silicon.
9 . A method of manufacturing semiconductor material lumps comprising:
a forming step of a rod-shape material forming semiconductor material into a rod; and
a fragmenting step fragmenting the semiconductor material by the fragmenting method of the semiconductor material according to claim 1 or fragmenting the semiconductor material by a mechanical method after cracks are generated, into semiconductor material lumps.