Silicon carbide semiconductor device including a resin covering a silicon carbide semiconductor chip
The silicon carbide semiconductor chip includes a silicon carbide substrate, a first insulating film on the silicon carbide substrate, and a second insulating film on the first insulating film. The silicon carbide substrate has a first main surface in contact with the first insulating film, a second main surface, and an outer peripheral surface. The resin covers both of the outer peripheral surface and the second insulating film. The second insulating film has a Young's modulus lower than that of the resin. The second insulating film has a thermal expansion coefficient higher than that of the silicon carbide substrate and higher than that of the resin. The second insulating film includes a first outer peripheral end portion. In a cross section perpendicular to the first main surface, the first outer peripheral end portion is provided along the outer peripheral surface.
1. A silicon carbide semiconductor device comprising:
a silicon carbide semiconductor chip; and
a resin covering the silicon carbide semiconductor chip, wherein
the silicon carbide semiconductor chip includes a silicon carbide substrate, a first insulating film on the silicon carbide substrate, and a second insulating film on the first insulating film,
the silicon carbide substrate has a first main surface in contact with the first insulating film, a second main surface opposite to the first main surface, and an outer peripheral surface continuous with each of the first main surface and the second main surface,
the resin covers both of the outer peripheral surface and the second insulating film,
the second insulating film has a Young's modulus lower than that of the resin,
the second insulating film has a thermal expansion coefficient higher than that of the silicon carbide substrate and higher than that of the resin,
the second insulating film includes a first outer peripheral end portion in a direction parallel to the first main surface, and
in a cross section perpendicular to the first main surface, the first outer peripheral end portion is provided along the outer peripheral surface,
wherein the first insulating film includes a first annular portion, and a second annular portion spaced from and surrounding the first annular portion.
2. The silicon carbide semiconductor device according to claim 1 , wherein
the second insulating film includes an angular shoulder continuous with the first outer peripheral end portion, and
the resin is in contact with the shoulder.
3. The silicon carbide semiconductor device according to claim 1 , wherein
the first insulating film includes a second outer peripheral end portion in the direction parallel to the first main surface, and
in the cross section perpendicular to the first main surface, the second outer peripheral end portion is provided along the outer peripheral surface.
4. The silicon carbide semiconductor device according to claim 1 , wherein
the second insulating film includes a filling portion provided between the first annular portion and the second annular portion, and
the filling portion is in contact with the silicon carbide substrate.
5. A silicon carbide semiconductor device comprising:
a silicon carbide semiconductor chip; and
a resin covering the silicon carbide semiconductor chip, wherein
the silicon carbide semiconductor chip includes a silicon carbide substrate, a first insulating film on the silicon carbide substrate, and a second insulating film on the first insulating film,
the silicon carbide substrate has a first main surface in contact with the first insulating film, a second main surface opposite to the first main surface, and an outer peripheral surface continuous with each of the first main surface and the second main surface,
the resin covers both of the outer peripheral surface and the second insulating film,
the second insulating film has a Young's modulus lower than that of the resin,
the second insulating film has a thermal expansion coefficient higher than that of the silicon carbide substrate and higher than that of the resin,
the second insulating film includes a first outer peripheral end portion in a direction parallel to the first main surface, and an angular shoulder continuous with the first outer peripheral end portion,
in a cross section perpendicular to the first main surface, the first outer peripheral end portion is provided along the outer peripheral surface,
the resin is in contact with the shoulder,
the first insulating film includes a second outer peripheral end portion in the direction parallel to the first main surface,
in the cross section perpendicular to the first main surface, the second outer peripheral end portion is provided along the outer peripheral surface,
the first insulating film includes a first annular portion, and a second annular portion spaced from and surrounding the first annular portion,
the second insulating film includes a filling portion provided between the first annular portion and the second annular portion, and
the filling portion is in contact with the silicon carbide substrate.