IP Library › Granted Patent US 12,130,392
Granted Patent B2
US 12,130,392 · App. 17/288,162 · Granted Oct 29, 2024

High resolution light valve detector for detecting x-ray

Inventors: Xiaochao Xu (Pleasanton, CA); Christoph Graf Vom Hagen (Oakland, CA)
Assignee: Carl Zeiss X-ray Microscopy Inc.
G01T1/246G02B21/0092H01J37/244H01J2237/24415
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Quick Facts
Patent No.
US 12,130,392
App. No.
17/288,162
Granted
Oct 29, 2024
Kind
B2
Abstract

A detection system for an x-ray microscopy system utilizes high bandgap, direct conversion x-ray detection materials. The signal of the x-ray projection is recorded in a spatial light modulator such as a liquid crystal (LC) light valve. The light valve is then read-out by a polarized light optical microscope. This configuration will mitigate the loss of light in the optical system over the current scintillator-optical microscope-camera detection systems.

Claims (29)

1. A detection system for an imaging system, comprising:

a photoconductive detector comprising a spatial light modulator and photoconductive detector layer forming a sandwich structure;

an optical microscope for reading out the photoconductive detector; and

a camera for reading out the spatial light modulator via the optical microscope, wherein a charge relaxation time of the photoconductive detector is less than a time interval between consecutive image frames captured by the camera.

2. A detection system as claimed in claim 1 , wherein the imaging system is an x-ray microscopy system.

3. A detection system as claimed in claim 1 , wherein the photoconductive detector detects x-rays.

4. A detection system as claimed in claim 1 , wherein the photoconductive detector detects charged particles of a charged particle beam.

5. The detection system as claimed in claim 1 , wherein the spatial light modulator is a liquid crystal light valve.

6. The detection system as claimed in claim 5 , wherein the photoconductive detector layer comprises bismuth, lead, thallium, mercury, tellurium, antimony, or tin.

7. The detection system as claimed in claim 1 , wherein the optical microscope is a polarization light microscope.

8. The detection system as claimed in claim 1 , wherein the optical microscope reads-out the photoconductive detector in transmission.

9. The detection system as claimed in claim 1 , wherein the optical microscope reads-out the photoconductive detector in reflection.

10. The detection system as claimed in claim 1 , wherein the optical microscope includes objective lens followed by a tube lens.

11. The detection system as claimed in claim 1 , wherein the photoconductive detector comprises a mirror layer.

12. An analysis system, comprising

a source for generating a beam;

an object stage system for holding and rotating an object in the beam; and

a detection system including:

a photoconductive detector comprising a spatial light modulator and photoconductive detector layer forming a sandwich structure,

an optical microscope for reading out the photoconductive detector; and

a camera for reading out the spatial light modulator via the optical microscope, wherein a charge relaxation time of the photoconductive detector is less than a time interval between consecutive image frames captured by the camera.

13. The analysis system as claimed in claim 12 , wherein the source is an x-ray source.

14. The analysis system as claimed in claim 12 , wherein the source in is a particle beam source.

15. The analysis system as claimed in claim 12 , wherein the spatial light modulator is a liquid crystal light valve and photoconductive detector layer.

16. The analysis system as claimed in claim 15 , wherein the photoconductive detector layer comprises bismuth, lead, thallium, mercury, tellurium, antimony, or tin.

17. The analysis system as claimed in claim 12 , wherein the optical microscope is a polarization light microscope.

18. The analysis system as claimed in claim 12 , wherein the optical microscope reads-out the photoconductive x-ray detector in transmission.

19. The analysis system as claimed in claim 12 , wherein the optical microscope reads-out the photoconductive x-ray detector in reflection.

20. The analysis system as claimed in claim 12 , wherein the optical microscope includes objective lens followed by a tube lens.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 10, 2022
From: XU, XIAOCHAO; GRAF VOM HAGEN, CHRISTOPH
To: CARL ZEISS X-RAY MICROSCOPY, INC.
Reel/Frame 058973/0743 →
Continuity (2)
Provisional Application 62755807 · Nov 5, 2018
Related Publication 20210311211A1 · Oct 7, 2021
Cited By (1)
US 12,419,591