IP Library › Granted Patent US 12,419,591
Granted Patent B2
US 12,419,591 · App. 17/919,646 · Granted Sep 23, 2025

Spectrally and spatially resolved x-ray and particle detection system

Inventors: Xiaochao Xu (Pleasanton, CA); Christoph Graf Vom Hagen (Schwaebisch Gmuend, DE)
Assignee: CARL ZEISS X-RAY MICROSCOPY, INC.
A61B6/032A61B6/4208A61B6/582
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Quick Facts
Patent No.
US 12,419,591
App. No.
17/919,646
Granted
Sep 23, 2025
Kind
B2
Abstract

A detection system for an x-ray or charged particle imaging system utilizes high bandgap, direct conversion x-ray detection materials. The signal of the x-ray/charged particle projection is recorded in a spatial light modulator such as a liquid crystal (LC) light valve. The light valve is then read-out by a polarized light optical microscope and a high speed camera. The camera is used to track the blooming spots in the light valve to resolve their intensity, and relate that intensity of the input x-ray photon or charged particle. This allows of spatially resolved, imaging, x-ray and/or charged particle spectrometer.

Claims (39)

1. A spectrally and spatially resolved x-ray and/or charged particle detection system, comprising:

a photoconductive detector;

an optical microscope for reading out the photoconductive detector;

a camera coupled to the photoconductive detector by the optical microscope; and

a computer system that obtains images generated by the camera and tracks the response of the photoconductive detector to x-ray photons and/or charged particles over time.

2. The detection system as claimed in claim 1 , wherein the computer system tracks blooming in the photoconductive detector induced by the x-ray photons or charged particles to resolve locations on the photoconductive detector and energy of the x-ray photons or charged particles.

3. The detection system as claimed in claim 1 , wherein the computer system determines the energy of the x-ray photons or charged particles by reference to an energy/intensity map that relates a maximum spot intensity to an energy of the received x-ray photons or charged particle.

4. The detection system as claimed in claim 1 , wherein an interval between successive frames captured by the camera is less than a relaxation time of the photoconductive detector.

5. The detection system as claimed in claim 4 , wherein an interval between successive frames captured by the camera is less than 1 millisecond.

6. The detection system as claimed in claim 1 , wherein the photoconductive detector detects x-ray photons.

7. The detection system as claimed in claim 1 , wherein the photoconductive x-ray/charged particle detector comprises a liquid crystal light valve and photoconductive detector layer.

8. The detection system as claimed in claim 7 , wherein the photoconductive detector layer comprises bismuth, lead, mercury, tellurium, selenium, or thallium.

9. The detection system as claimed in claim 1 , wherein the optical microscope is a polarization light microscope.

10. The detection system as claimed in claim 1 , wherein the optical microscope reads-out the photoconductive detector in transmission.

11. The detection system as claimed in claim 1 , wherein the optical microscope reads-out the photoconductive detector in reflection.

12. A particle detection method, comprising:

converting x-ray photons and/or charged particles into electron-hole pairs in a photoconductive detector;

reading out the photoconductive detector with a camera coupled to the photoconductive detector; and

processing images generated by the camera and tracking the response of the photoconductive detector to x-ray photons or charged particles over time to determine the position and the energy of the x-ray photons or charged particles.

13. The method of claim 12 employing a system comprising:

the photoconductive detector;

an optical microscope for reading out the photoconductive detector;

the camera coupled to the photoconductive detector by the optical microscope; and

a computer system that obtains images generated by the camera and tracks the response of the photoconductive detector to x-ray photons and/or charged particles over time.

14. An imaging system, comprising:

an object stage system for holding an object;

a photoconductive detector for detecting x-ray photons or charged particles from the object;

a camera coupled to the photoconductive detector by an optical microscope; and

a computer system that obtains the images generated by the camera and tracks the response of the photoconductive detector to x-ray photons or charged particles over time to image the object and determine an energy of the x-ray photons or charged particles.

15. A method for calibrating a x-ray photon or charged particle detection system, comprising:

generating x-ray photons or charged particles of known energy;

converting particles into electron-hole pairs in a photoconductive detector;

reading out the photoconductive detector with a camera; and

processing images generated by the camera and tracking spots generated by the x-ray photons or charged particles received by the photoconductive detector and determining a relationship between the spots and the energy of the x-ray photons or charged particles.

16. The method of claim 15 employing a system comprising:

the photoconductive detector;

an optical microscope for reading out the photoconductive detector;

the camera coupled to the photoconductive detector by the optical microscope; and

a computer system that obtains images generated by the camera and tracks the response of the photoconductive detector to x-ray photons and/or charged particles over time.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 24, 2022
From: XU, XIAOCHAO; GRAF VOM HAGEN, CHRISTOPH
To: CARL ZEISS X-RAY MICROSCOPY, INC.
Reel/Frame 061511/0550 →
Continuity (1)
Related Publication 20230165541A1 · Jun 1, 2023
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