Laminate peeling method, laminate, and laminate production method
A laminate debonding method includes producing a laminate by joining a first substrate formed of a semiconductor-forming substrate to a second substrate formed of a support substrate which allows passage of infrared laser light, by the mediation of a first adhesive layer provided on the first substrate and a second adhesive layer provided on the second substrate, wherein the first adhesive layer is obtained by curing an adhesive (A) containing a component which is cured through hydrosilylation, and the second adhesive layer is obtained by use of an adhesive (B) formed of a polymer adhesive having an aromatic ring in at least one of a main chain and a side chain and which allows passage of infrared laser light; and irradiating the laminate with infrared laser light from a second substrate side for debonding the second substrate at the interface between the first and second adhesive layers.
1. A laminate debonding method, the method comprising:
producing a laminate by joining a first substrate formed of a semiconductor-forming substrate to a second substrate formed of a support substrate which allows passage of infrared laser light, by the mediation of a first adhesive layer provided on the first substrate and a second adhesive layer provided on the second substrate, wherein:
the first adhesive layer is an adhesive layer obtained by curing an adhesive (A) containing a component which is cured through hydrosilylation, and
the second adhesive layer is an adhesive layer which is obtained by use of an adhesive (B) formed of a polymer adhesive having an aromatic ring in at least one of a main chain and a side chain and which allows passage of infrared laser light; and
irradiating the laminate with infrared laser light from a second substrate side for debonding the second substrate at the interface between the first and second adhesive layers.
2. A laminate debonding method according to claim 1 ,
wherein the adhesive (A) comprises
a polysiloxane (A1), and
a platinum group metal catalyst (A2); and
wherein the polysiloxane (A1) comprises:
a polyorganosiloxane (a1) having one or more units selected from the group consisting of a siloxane unit represented by SiO 2 (unit Q′), a siloxane unit represented by R 1′ R 2′ R 3′ SiO 1/2 (unit M′), a siloxane unit represented by R 4′ R 5′ SiO 2/2 (unit D′), and a siloxane unit represented by R 6′ SiO 3/2 (unit T′), and at least one unit selected from the group consisting of unit M′, unit D′, and unit T′, wherein each of R 1′ to R 6′ is a group bonded to a silicon atom and represents an alkyl group or an alkenyl group, and at least one of R 1′ to R 6′ is an alkenyl group, and
a polyorganosiloxane (a2) having one or more units selected from the group consisting of a siloxane unit represented by SiO 2 (unit Q″), a siloxane unit represented by R 1″ R 2″ R 3″ SiO 1/2 (unit M″), a siloxane unit represented by R 4″ R 5″ SiO 2/2 (unit D″), and a siloxane unit represented by R 6″ SiO 3/2 (unit T″), and at least one unit selected from the group consisting of unit M″, unit D″, and unit T″, wherein each of R 1″ to R 6″ is a group or an atom bonded to a silicon atom and represents an alkyl group or a hydrogen atom, and at least one of R 1″ to R 6″ is a hydrogen atom.
3. A laminate debonding method according to claim 2 , wherein the infrared laser light has a wavelength of 1 to 20 micrometers.
4. A laminate debonding method according to claim 3 , wherein the wavelength is 9.2 to 10.8 micrometers.