IP Library Granted Patent US 11,823,965
Granted Patent B2
US 11,823,965 · App. 17/305,620 · Granted Nov 21, 2023

Substrate processing carrier

Inventor: Michael J. Seddon (Gilbert, AZ)
Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
H01L22/34G01R31/2831H01L21/6836H01L21/78H01L22/12H01L22/32G01R31/2865H01L21/304H01L22/14H01L2221/6834H01L2221/68327H01L2221/68381
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Quick Facts
Patent No.
US 11,823,965
App. No.
17/305,620
Granted
Nov 21, 2023
Kind
B2
Abstract

Implementations of a substrate carrier may include: a top ring configured to enclose an edge of a first side of a substrate; and a bottom support configured to enclose an entire second side and an edge of the second side of the substrate.

Claims (28)

1. A substrate carrier comprising:

a top ring configured to encircle an edge of a substrate; and

a bottom support configured to enclose and directly contact a second side of the substrate and the edge of the substrate, the second side of the substrate opposite a first side of a substrate;

wherein a thickness of the substrate is less than 10 microns.

2. The substrate carrier of claim 1 , wherein the bottom support comprises two or more openings extending therethrough.

3. The substrate carrier of claim 1 , wherein the first side of the substrate is background.

4. The substrate carrier of claim 1 , wherein the second side of the substrate comprises a plurality of semiconductor die therein.

5. The substrate carrier of claim 1 , wherein a thickness of the substrate is less than 39 microns.

6. The substrate carrier of claim 1 , wherein the top ring is configured to couple to the bottom support with a one of a clamp, friction fit, snap, or hinge.

7. The substrate carrier of claim 1 , wherein the top ring is configured to directly couple to the first side of the substrate.

8. A substrate carrier comprising:

a top ring configured to enclose at least a portion of an edge of a substrate and a first side of the substrate; and

a bottom support configured to contact a second side of the substrate and enclose an edge of the substrate;

wherein the bottom support further comprises a cavity between the second side and the bottom support, the cavity configured to receive backgrinding tape applied to the second side of the substrate; and

wherein the second side of the substrate comprises a plurality of semiconductor die therein.

9. The substrate carrier of claim 8 , further comprising a locking mechanism configured to couple the top ring to the bottom support.

10. The substrate carrier of claim 8 , wherein the first side of the substrate is background.

11. The substrate carrier of claim 8 , wherein a thickness of the substrate is less than 39 microns.

12. The substrate carrier of claim 8 , wherein a thickness of the substrate is less than 10 microns.

13. The substrate carrier of claim 8 , wherein the top ring is configured to couple to the bottom support with one of a clamp, friction fit, snap, or hinge.

14. An apparatus for testing a semiconductor substrate, comprising:

a substrate carrier, the substrate carrier comprising:

a top ring configured to enclose an edge of a substrate, the edge of the substrate between a first side of the substrate and a second side of the substrate opposite the first side;

a bottom support configured to enclose and contact the second side of the substrate and the edge of the substrate, wherein the bottom support is configured to allow the substrate coupled with the substrate carrier to be electrically tested using a probe; and

a locking mechanism configured to couple the top ring to the bottom support.

15. The apparatus of claim 14 , further comprising one or more openings in the bottom support configured to allow the probe to directly contact the substrate during electrical testing.

16. The apparatus of claim 14 , wherein the substrate carrier is formed of one of a metal, a plastic coated in a metal, or a metal coated in a secondary metal.

17. The apparatus of claim 14 , wherein the substrate carrier is one of formed of an electrically conductive material or comprises an electrically conductive material coupled thereto.

Assignments (3)
RELEASE OF SECURITY INTEREST IN PATENTS PREVIOUSLY RECORDED AT REEL 058828, FRAME 0123 Recorded Aug 16, 2023
From: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Reel/Frame 064615/0449 →
SECURITY INTEREST Recorded Nov 5, 2021
From: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
To: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
Reel/Frame 058828/0123 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 12, 2021
From: SEDDON, MICHAEL J.
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Reel/Frame 056824/0988 →
Continuity (7)
Continuation 16656140 · Oct 17, 2019
Continuation In Part 15907931 · Feb 28, 2018
Continuation In Part 15704246 · Sep 14, 2017
Continuation 15230875 · Aug 8, 2016
Provisional Application 62827982 · Apr 2, 2019
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