Magnetic sensor and magnetic sensor manufacturing method
A magnetic sensor ( 1 ) includes: a nonmagnetic substrate ( 10 ); and a sensitive element ( 31 ) including a plurality of soft magnetic layers ( 105 ) (lower soft magnetic layer ( 105 a ) and upper soft magnetic layer ( 105 b )) laminated on or above the substrate ( 10 ) and a conductor layer ( 106 ) laminated between the plurality of soft magnetic layers ( 105 ) and having higher conductivity than the plurality of soft magnetic layers ( 105 ). The sensitive element ( 31 ) has a longitudinal direction and a transverse direction and has uniaxial magnetic anisotropy in a direction intersecting the longitudinal direction. The sensitive element ( 31 ) is configured to sense a magnetic field by a magnetic impedance effect.
1. A magnetic sensor comprising:
a nonmagnetic substrate;
a sensitive element including a plurality of soft magnetic layers laminated on or above the nonmagnetic substrate and a conductor layer laminated between the plurality of soft magnetic layers, the conductor layer having higher conductivity than the plurality of soft magnetic layers, the sensitive element having a longitudinal direction and a transverse direction and having uniaxial magnetic anisotropy in a direction intersecting the longitudinal direction, the sensitive element being configured to sense a magnetic field by a magnetic impedance effect; and
a pair of flat-shaped yokes formed on a same plane as the sensitive element such that the pair of yokes face respective ends in the longitudinal direction of the sensitive element,
wherein each of the pair of yokes includes the plurality of soft magnetic layers and the conductor layer laminated between the plurality of soft magnetic layers.
2. The magnetic sensor according to claim 1 ,
wherein each of the plurality of soft magnetic layers included in the sensitive element has an antiferromagnetically coupled structure that is provided by a demagnetizing field suppressing layer composed of Ru or an Ru alloy.
3. The magnetic sensor according to claim 1 , wherein the sensitive element includes a plurality of the conductor layers.
4. The magnetic sensor according to claim 1 , further comprising a thin-film magnet laminated between the nonmagnetic substrate and the plurality of soft magnetic layers of the sensitive element, the thin-film magnet being composed of a hard magnetic material and having magnetic anisotropy in an in-plane direction thereof, wherein
the longitudinal direction of the sensitive element is oriented in a direction of a magnetic field generated by the thin-film magnet.
5. A method for manufacturing a magnetic sensor, the method comprising:
forming a sensitive element by alternately laminating a plurality of soft magnetic layers and a conductor layer on or above a nonmagnetic substrate, the conductor layer having higher conductivity than the plurality of soft magnetic layers, the sensitive element having a longitudinal direction and a transverse direction and having uniaxial magnetic anisotropy in a direction intersecting the longitudinal direction, and
forming a pair of flat-shaped yokes formed on a same plane as the sensitive element such that the pair of yokes face respective ends in the longitudinal direction of the sensitive element,
wherein each of the pair of yokes includes the plurality of soft magnetic layers and the conductor layer laminated between the plurality of soft magnetic layers.