Diffusion layer for magnetic tunnel junctions
The present disclosure describes an exemplary method that can prevent or reduce out-diffusion of Cu from interconnect layers to magnetic tunnel junction (MTJ) structures. The method includes forming an interconnect layer over a substrate that includes an interlayer dielectric stack with openings therein; disposing a metal in the openings to form corresponding conductive structures; and selectively depositing a diffusion barrier layer on the metal. In the method, selectively depositing the diffusion barrier layer includes pre-treating the surface of the metal; disposing a precursor to selectively form a partially-decomposed precursor layer on the metal; and exposing the partially-decomposed precursor layer to a plasma to form the diffusion barrier layer. The method further includes forming an MTJ structure on the interconnect layer over the diffusion barrier layer, where the bottom electrode of the MTJ structure is aligned to the diffusion barrier layer.
1. A method, comprising:
forming an interconnect layer over a substrate, wherein forming the interconnect layer comprises:
forming an interlayer dielectric stack with an opening;
forming a barrier layer in the opening; and
depositing a conductive layer on the barrier layer;
forming a capping layer comprising a first portion in the conductive layer and surrounded by the barrier layer and a second portion protruding above top surfaces of the barrier layer and the interlayer dielectric stack; and
forming a magnetic tunnel junction (MTJ) structure on the top surfaces of the barrier layer and the interlayer dielectric stack and surrounding the second portion of the capping layer.
2. The method of claim 1 , wherein forming the capping layer comprises removing an oxide material from a surface of the conductive layer.
3. The method of claim 1 , wherein forming the capping layer comprises:
selectively forming a partially-decomposed precursor layer on the conductive layer; and
performing a plasma process on the partially-decomposed precursor layer.
4. The method of claim 1 , wherein forming the MTJ structure comprises forming a bottom electrode of the MTJ structure on the capping layer.
5. The method of claim 1 , wherein forming the capping layer comprises forming the capping layer between a bottom electrode of the MTJ structure and the conductive layer.
6. The method of claim 1 , wherein forming the capping layer comprises depositing a layer of cobalt or ruthenium with a thickness between about 10 Å and about 100 Å.
7. The method of claim 1 , wherein forming the capping layer comprises exposing the conductive layer to a plasma comprising argon (Ar), hydrogen (H 2 ), ammonia (NH 3 ), or any combination thereof.
8. The method of claim 1 , wherein forming the capping layer comprises depositing an organometallic precursor with cyclopentadienylcobalt dicarbonyl ((C 5 H 5 )Co(CO) 2 ) on the conductive layer.
9. The method of claim 1 , wherein forming the capping layer comprises selectively forming a precursor layer on the conductive layer at a temperature between about 100° C. and about 500° C.
10. The method of claim 1 , wherein forming the barrier layer comprises depositing a metal layer in the opening.
11. A method, comprising:
forming an interconnect layer over a substrate, wherein forming the interconnect layer comprises:
forming an interlayer dielectric (ILD) layer over the substrate; and
forming a via structure with a barrier layer and a metal fill layer within the ILD layer;
forming a capping layer comprising a first portion in the metal fill layer and surrounded by the barrier layer and a second portion protruding above top surfaces of the barrier layer and the ILD layer; and
forming a magnetic tunnel junction (MTJ) structure surrounding the second portion of the capping layer.
12. The method of claim 11 , wherein forming the via structure comprises:
forming an opening in the ILD layer;
depositing a metal layer in the opening; and
depositing a doped nitride layer on the metal layer.
13. The method of claim 11 , wherein forming the capping layer comprises forming the capping layer between a bottom electrode of the MTJ structure and the metal fill layer.
14. The method of claim 11 , wherein forming the capping layer comprises depositing a layer of cobalt or ruthenium.
15. The method of claim 11 , wherein forming the via structure comprises depositing a layer of copper or a copper alloy.
16. The method of claim 11 , wherein forming the capping layer comprises forming the capping layer with a thickness between about 10 Å and about 100 Å.
17. A method, comprising:
forming a first interconnect layer over a substrate, wherein forming the first interconnect layer comprises forming a first conductive structure with a first conductive material;
forming a second interconnect layer over the first interconnect layer, comprising:
a second conductive structure with a second conductive material that is different from the first conductive material and is in contact with the first conductive material, and
forming a barrier layer with a metal layer and a doped metal nitride layer; and
forming a magnetic tunnel junction (MTJ) structure on the second conductive structure.
18. The method of claim 17 , forming the second conductive structure comprises:
forming an opening in the second interconnect layer;
depositing the metal layer in the opening; and
depositing the doped metal nitride layer on the metal layer.
19. The method of claim 17 , wherein the first conductive material comprises copper and the second conductive material comprises a copper-free metal.
20. The method of claim 17 , wherein the first conductive material comprises copper or a copper-alloy and the second conductive material comprises tungsten.