Method for preparing a surface for direct-bonding
View Patent ↗Improved bonding surfaces for microelectronics are provided. An example method of protecting a dielectric surface for direct bonding during a microelectronics fabrication process includes overfilling cavities and trenches in the dielectric surface with a temporary filler that has an approximately equal chemical and mechanical resistance to a chemical-mechanical planarization (CMP) process as the dielectric bonding surface. The CMP process is applied to the temporary filler to flatten the temporary filler down to the dielectric bonding surface. The temporary filler is then removed with an etchant that is selective to the temporary filler, but nonreactive toward the dielectric surface and toward inner surfaces of the cavities and trenches in the dielectric bonding surface. Edges of the cavities remain sharp, which minimizes oxide artifacts, strengthens the direct bond, and reduces the bonding seam.
1. A method for preparing a surface for direct-bonding during a microelectronics fabrication process, comprising:
overfilling cavities and trenches in a dielectric surface with a temporary filler, wherein the dielectric surface comprises a top layer, wherein the top layer and the temporary filler are indistinguishable to a CMP process such that the CMP process has a 1:1 selectivity to the temporary filler as to the top layer with respect to both a chemical component of the CMP process and a mechanical component of the CMP process;
applying the CMP process to the temporary filler to planarize the temporary filler down to the dielectric surface; and
applying an etchant to the temporary filler to remove the temporary filler from the cavities and trenches, the etchant selective to the temporary filler and nonreactive toward the dielectric surface and toward inner surfaces of the cavities and trenches.
2. The method of claim 1 , wherein the etchant comprises a phosphoric acid etchant to selectively remove the temporary filler while being nonreactive with the top layer.
3. The method of claim 1 , further comprising direct-bonding the dielectric surface to another dielectric surface.
4. The method of claim 1 , further comprising:
prior to the overfilling, preparing the dielectric surface for direct-bonding during a microelectronics fabrication process.
5. The method of claim 4 , further comprising direct-bonding the dielectric surface to another dielectric surface.
6. The method of claim 4 , wherein preparing the dielectric surface comprises planarizing the dielectric surface to a flatness comprising a depth of field of a photolithography system.
7. The method of claim 6 , further comprising direct-bonding the dielectric surface to another dielectric surface.
8. The method of claim 4 , wherein preparing the dielectric surface comprises planarizing the dielectric surface to a flatness comprising a slope equivalent to 5 nm in vertical rise variation over each 100 μm span of horizontal run.
9. The method of claim 8 , further comprising direct-bonding the dielectric surface to another dielectric surface.
10. The method of claim 1 , further comprising:
prior to the overfilling, etching the cavities and trenches in the dielectric surface with a first etchant; and
stripping resist material from the dielectric surface.
11. The method of claim 1 , wherein at least one of the cavities has a depth penetrating through the top layer into an underlying layer below the top layer.
12. The method of claim 1 , wherein the temporary filler comprises a dielectric material.
13. A method, comprising:
preparing a dielectric surface of a wafer or die for direct-bonding during a microelectronics fabrication process, wherein the dielectric surface comprises a top layer;
masking the dielectric surface with a resist material for etching a cavity in the dielectric surface;
etching the cavity in the dielectric surface with a first etchant;
stripping the resist material from the dielectric surface;
overflowing the cavity with a temporary filler to preserve edges of the cavity during a chemical-mechanical planarization (CMP) process, wherein the top layer and the temporary filler are indistinguishable to the CMP process such that the CMP process has a 1:1 selectivity to the temporary filler as to the top layer with respect to both a chemical component of the CMP process and a mechanical component of the CMP process;
applying the CMP process to planarize the temporary filler down to an interface between the temporary filler and the dielectric surface; and
removing the temporary filler from the cavity with a second etchant selective to the temporary filler and nonreactive to the dielectric surface and nonreactive to inner surfaces of the cavity.
14. The method of claim 13 , further comprising direct-bonding the dielectric surface to another dielectric surface.
15. The method of claim 13 , wherein the second etchant comprises a phosphoric acid to selectively etch the temporary filler while remaining nonreactive to the top layer.
16. The method of claim 13 , wherein the cavity has a depth penetrating through the top layer into an underlying layer below the top layer.
17. The method of claim 13 , wherein preparing the dielectric surface before masking further comprises planarizing the dielectric surface to flatness comprising a depth of field of a photolithography system.
18. The method of claim 17 , further comprising direct-bonding the dielectric surface to another dielectric surface.
19. The method of claim 13 , wherein preparing the dielectric surface comprises planarizing the dielectric surface to a flatness comprising a slope equivalent to 5 nm in vertical rise variation over each 100 μm span of horizontal run.
20. The method of claim 19 , further comprising direct-bonding the dielectric surface to another dielectric surface.