Apparatus for and method of manufacturing semiconductor device
An apparatus for manufacturing a semiconductor device includes a chamber including a lower housing and an upper housing, heater chucks in the lower housing, shower heads on the heater chucks, the shower heads being between the lower housing and the upper housing, power supplies connected to the shower heads to provide radio-frequency powers to the shower heads, power straps in the upper housing to connect the shower heads to the power supplies, and shielding members in the upper housing, the shielding members enclosing the power straps and the shower heads, respectively, the shielding members to prevent electromagnetic interference of the radio-frequency powers between the power straps and between the shower heads.
1. An apparatus for manufacturing a semiconductor device, the apparatus comprising:
a chamber including a lower housing and an upper housing on the lower housing;
heater chucks in the lower housing;
shower heads on the heater chucks, the shower heads being between the lower housing and the upper housing;
power supplies connected to the shower heads, the power supplies to provide radio-frequency powers to the shower heads;
power straps in the upper housing, the power straps connecting the shower heads to the power supplies; and
shielding members in the upper housing, the shielding members enclosing the power straps and the shower heads, respectively, the shielding members to prevent electromagnetic interference of the radio-frequency powers between the power straps and between the shower heads,
wherein the shielding members are connected to each other by capacitors
wherein the capacitors comprise:
short range capacitors connected between the shielding members that are disposed in short range distance to remove or minimize a near field interference between the shielding members, and
long range capacitors connected between the shielding members that are disposed in long range distance longer than the short range distance to remove or minimize a far field interference between the shielding members.
2. The apparatus as claimed in claim 1 ,
wherein the shielding members include:
shower-head shielding members enclosing the shower heads, respectively; and
strap shielding members enclosing the power straps, respectively.
3. The apparatus as claimed in claim 2 ,
wherein the shower-head shielding members have a cap shape or a cover shape.
4. The apparatus as claimed in claim 2 ,
wherein the strap shielding members have a rectangular pipe shape.
5. The apparatus as claimed in claim 2 ,
wherein the shower-head shielding members have a circular ring-shaped cross-section, in a top view, and the strap shielding members have a rectangular cross-section, in the top view.
6. The apparatus as claimed in claim 2 ,
wherein the shower-head shielding members are connected to each other by the capacitors.
7. The apparatus as claimed in claim 1 ,
wherein the shielding members include copper or iron.
8. The apparatus as claimed in claim 1 ,
wherein each of the shielding members has a thickness of 1 mm or larger.
9. The apparatus as claimed in claim 8 ,
wherein the thickness of each of the shielding members is smaller than 5 cm.
10. The apparatus as claimed in claim 1 ,
wherein the shielding members are grounded.