IP Library › Granted Patent US 12,507,475
Granted Patent B2
US 12,507,475 · App. 17/358,329 · Granted Dec 23, 2025

Substrate-less lateral diode integrated circuit structures

Inventors: Nicholas Thomson (Hillsboro, OR); Kalyan Kolluru (Portland, OR); Ayan Kar (Portland, OR); Rui Ma (Portland, OR); Benjamin Orr (Portland, OR); Nathan Jack (Forest Grove, OR); Biswajeet Guha (Hillsboro, OR); Brian Greene (Portland, OR); Lin Hu (Portland, OR); Chung-Hsun Lin (Portland, OR)
Assignee: Intel Corporation
H10D86/00H10D89/611
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Quick Facts
Patent No.
US 12,507,475
App. No.
17/358,329
Granted
Dec 23, 2025
Kind
B2
Abstract

Substrate-less lateral diode integrated circuit structures, and methods of fabricating substrate-less lateral diode integrated circuit structures, are described. For example, a substrate-less integrated circuit structure includes a fin or a stack of nanowires. A plurality of P-type epitaxial structures is over the fin or stack of nanowires. A plurality of N-type epitaxial structures is over the fin or stack of nanowires. One or more spacings are in locations over the fin or stack of nanowires, a corresponding one of the one or more spacings extending between neighboring ones of the plurality of P-type epitaxial structures and the plurality of N-type epitaxial structures.

Claims (45)

1 . An integrated circuit structure, comprising:

a single fin;

a plurality of P-type epitaxial structures over and coupled to the single fin;

a plurality of N-type epitaxial structures over and coupled to the single fin; and

one or more spacings in locations over the single fin, a corresponding one of the one or more spacings extending between neighboring ones of the plurality of P-type epitaxial structures and the plurality of N-type epitaxial structures.

2 . The integrated circuit structure of claim 1 , wherein the plurality of P-type epitaxial structures are coupled to ground, and the plurality of N-type epitaxial structures are coupled to one or more signal lines.

3 . The integrated circuit structure of claim 1 , wherein individual ones of the one or more spacings extend across a corresponding portion of a top surface of the single fin, the corresponding portion of the top surface of the single fin abutting the corresponding neighboring ones of the plurality of P-type epitaxial structures and the plurality of N-type epitaxial structures.

4 . The integrated circuit structure of claim 1 , wherein the P-type epitaxial structures are boron-doped silicon or boron-doped silicon germanium structures, and wherein the N-type epitaxial structures are phosphorous-doped silicon structures.

5 . The integrated circuit structure of claim 1 , wherein the one or more spacings are one or more locations where a gate structure was removed or blocked from formation.

6 . A computing device, comprising:

a board; and

a component coupled to the board, the component including an integrated circuit structure, comprising:

a single fin;

a plurality of P-type epitaxial structures over and coupled to the single fin;

a plurality of N-type epitaxial structures over and coupled to the single fin; and

one or more spacings in locations over the single fin, a corresponding one of the one or more spacings extending between neighboring ones of the plurality of P-type epitaxial structures and the plurality of N-type epitaxial structures.

7 . The computing device of claim 6 , further comprising:

a memory coupled to the board.

8 . The computing device of claim 6 , further comprising:

a communication chip coupled to the board.

9 . The computing device of claim 6 , wherein the component is a packaged integrated circuit die.

10 . The computing device of claim 6 , wherein the component is selected from the group consisting of a processor, a communications chip, and a digital signal processor.

11 . An integrated circuit structure, comprising:

a stack of nanowires;

a plurality of P-type epitaxial structures over the stack of nanowires;

a plurality of N-type epitaxial structures over the stack of nanowires; and

one or more spacings in locations over the stack of nanowires, a corresponding one of the one or more spacings extending between neighboring ones of the plurality of P-type epitaxial structures and the plurality of N-type epitaxial structures.

12 . The integrated circuit structure of claim 11 , wherein the plurality of P-type epitaxial structures are coupled to ground, and the plurality of N-type epitaxial structures are coupled to one or more signal lines.

13 . The integrated circuit structure of claim 11 , wherein individual ones of the one or more spacings extend across a corresponding portion of a top surface of an uppermost one of the stack of nanowires, the corresponding portion of the top surface of the uppermost one of the stack of nanowires abutting the corresponding neighboring ones of the plurality of P-type epitaxial structures and the plurality of N-type epitaxial structures.

14 . The integrated circuit structure of claim 11 , wherein the P-type epitaxial structures are boron-doped silicon or boron-doped silicon germanium structures, and wherein the N-type epitaxial structures are phosphorous-doped silicon structures.

15 . The integrated circuit structure of claim 11 , wherein the one or more spacings are one or more locations where a gate structure was removed or blocked from formation.

16 . A computing device, comprising:

a board; and

a component coupled to the board, the component including an integrated circuit structure, comprising:

a stack of nanowires;

a plurality of P-type epitaxial structures over the stack of nanowires;

a plurality of N-type epitaxial structures over the stack of nanowires;

and

one or more spacings in locations over the stack of nanowires, a corresponding one of the one or more spacings extending between neighboring ones of the plurality of P-type epitaxial structures and the plurality of N-type epitaxial structures.

17 . The computing device of claim 16 , further comprising:

a memory coupled to the board.

18 . The computing device of claim 16 , further comprising:

a communication chip coupled to the board.

19 . The computing device of claim 16 , wherein the component is a packaged integrated circuit die.

20 . The computing device of claim 16 , wherein the component is selected from the group consisting of a processor, a communications chip, and a digital signal processor.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 21, 2021
From: THOMSON, NICHOLAS; KOLLURU, KALYAN; KAR, AYAN; MA, RUI; ORR, BENJAMIN; JACK, NATHAN; GUHA, BISWAJEET; GREENE, BRIAN; HU, LIN; LIN, CHUNG-HSUN
To: INTEL CORPORATION
Reel/Frame 057869/0963 →
Continuity (1)
Related Publication 20220415925A1 · Dec 29, 2022
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