IP Library Granted Patent US 11,696,443
Granted Patent B2
US 11,696,443 · App. 17/383,988 · Granted Jul 4, 2023

Integrated assemblies having thicker semiconductor material along one region of a conductive structure than along another region, and methods of forming integrated assemblies

Inventor: Kunal R. Parekh (Boise, ID)
Assignee: Micron Technology, Inc.
H10B43/27H01L21/0217H01L21/02164H01L21/76224H01L21/76877H01L29/0649H10B41/27
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Quick Facts
Patent No.
US 11,696,443
App. No.
17/383,988
Granted
Jul 4, 2023
Kind
B2
Abstract

Some embodiments include an integrated assembly having a conductive structure which includes a semiconductor material over a metal-containing material. A stack of alternating conductive levels and insulative levels is over the conductive structure. A partition extends through the stack. The partition has wall regions, and has corner regions where two or more wall regions meet. The conductive structure includes a first portion which extends directly under the corner regions, and includes a second portion which is directly under the wall regions and is not directly under the corner regions. The first portion has a first thickness of the semiconductor material and the second portion has a second thickness of the semiconductor material. The first thickness is greater than the second thickness. Some embodiments include methods of forming integrated assemblies.

Claims (14)

1. An integrated assembly, comprising:

a semiconductor material;

a stack of alternating levels over the semiconductor material;

a partition extending through the stack and comprising wall regions, and comprising corner regions where two or more wall regions meet; and

the semiconductor material comprising a first portion which extends directly under the corner regions, and comprising a second portion which is directly under the wall regions; the first portion comprising a first thickness of the semiconductor material and the second portion comprising a second thickness of the semiconductor material; the first thickness being greater than the second thickness.

2. The integrated assembly of claim 1 wherein the second portion is not directly under the corner regions.

3. The integrated assembly of claim 1 wherein the partition directly contacts a top of the semiconductor material.

4. The integrated assembly of claim 1 wherein the stack comprises alternating conductive levels and insulative levels.

5. The integrated assembly of claim 1 wherein the semiconductor material comprises conductively doped silicon.

6. The integrated assembly of claim 1 wherein the partition only comprises insulative material.

7. The integrated assembly of claim 1 further comprising cavities extending into the first portions, at least one of the cavities being deeper than the second thickness.

8. The integrated assembly of claim 1 further comprising metal-containing material under the semiconductor material.

9. The integrated assembly of claim 1 wherein the stack comprises wordline levels.

10. The integrated assembly of claim 1 wherein the partition comprises insulative panels on opposing sides of a conductive core.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 17, 2024
From: MICRON TECHNOLOGY, INC.
To: LODESTAR LICENSING GROUP LLC
Reel/Frame 067135/0353 →
Continuity (4)
Continuation 16937516 · Jul 23, 2020
Division 16439278 · Jun 12, 2019
Continuation 16029144 · Jul 6, 2018
Related Publication 20210351201A1 · Nov 11, 2021