IP Library › Granted Patent US 11,688,721
Granted Patent B2
US 11,688,721 · App. 17/408,849 · Granted Jun 27, 2023

Chip package structure and manufacturing method thereof

Inventors: XinRu Zeng (Wuhan, CN); Peng Chen (Wuhan, CN); Houde Zhou (Wuhan, CN)
Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
H01L25/0657H01L21/56H01L23/3121H01L23/3135H01L23/5384H01L24/05H01L25/50
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Quick Facts
Patent No.
US 11,688,721
App. No.
17/408,849
Granted
Jun 27, 2023
Kind
B2
Abstract

A chip package structure includes a chip stack and a redistribution layer. The chip stack includes multiple chips stacked together, a molding layer encapsulating the multiple chips, and a vertical conductive element extending from a surface of the molding layer reach and coupled to the bonding pad. Each of the multiple chips includes a bonding pad not covered by the multiple chips. The redistribution layer is above the molding layer and includes a conductive layer coupled to the vertical conductive element, and an insulating layer over and partially exposing the conductive layer.

Claims (35)

1. A chip package structure, comprising:

a chip stack comprising:

multiple chips stacked together, each of the multiple chips comprising a bonding pad not covered by the multiple chips;

a molding layer encapsulating the multiple chips, wherein a first subset of the multiple chips is separated from a second subset of the multiple chips by the molding layer;

a vertical conductive element extending from a surface of the molding layer reach and coupled to the bonding pad; and

a redistribution layer above the molding layer and having:

a conductive layer coupled to the vertical conductive element; and

an insulating layer over and partially exposing the conductive layer.

2. The chip package structure of claim 1 , further comprising a solder ball in contact with an exposed portion of the conductive layer through an opening of the insulation layer.

3. The chip package structure of claim 2 , wherein the solder ball comprises a portion under a top surface of the insulating layer.

4. The chip package structure of claim 2 , wherein the solder ball is electronically connected to the vertical conductive element.

5. The chip package structure of claim 1 , further comprising two or more solder balls, each solder ball in contact with a respective exposed portion of the conductive layer through a respective opening of the insulation layer.

6. The chip package structure of claim 5 , wherein the chip stack comprises two or more vertical conductive elements, and a distance between adjacent two vertical conductive elements is smaller than a distance between adjacent two solder balls.

7. The chip package structure of claim 1 , wherein the conductive layer spreads out over the molding layer as a single layer.

8. The chip package structure of claim 1 , wherein the conductive layer is electronically connected to the vertical conductive element.

9. The chip package structure of claim 1 , wherein the redistribution layer comprises multiple conductive layers and multiple insulating layers.

10. The chip package structure of claim 1 , further comprising:

a sub redistribution layer located between the first subset of the multiple chips and the second subset of the multiple chips, the sub redistribution layer comprising:

a sub insulating layer separating the first subset of the multiple chips and the second subset of the multiple chips; and

a sub conductive layer embedded in the sub insulating layer and interconnecting a lower portion of the vertical conductive element and an upper portion of the vertical conductive element.

11. A chip package structure, comprising:

a chip stack comprising:

multiple chips stacked together, wherein each of the multiple chips comprises multiple vertically-orientated strings of memory cells and a bonding pad;

a molding layer encapsulating the multiple chips, wherein a first subset of the multiple chips is separated from a second subset of the multiple chips by the molding layer; and

a vertical conductive element penetrating through the molding layer, wherein the vertical conductive element is disposed on and electrically connected to the bonding pad; and

a redistribution layer disposed on the chip stack and electrically connected to the vertical conductive element.

12. The chip package structure of claim 11 , wherein the bonding pad comprises two layers overlaid over one another.

13. The chip package structure of claim 11 , wherein each of the multiple chips further comprises a substrate on an opposite side of the bonding pad, and the multiple vertically-orientated strings of memory cells extend in a vertical direction with respect to the substrate.

14. The chip package structure of claim 11 , wherein an extending direction of the vertical conductive element is substantially parallel to a normal direction of the chip stack.

15. The chip package structure of claim 11 , wherein the multiple chips are stacked in a form of staircase to expose the bonding pads.

16. The chip package structure of claim 11 , further comprising a protecting layer disposed on a side of the chip stack opposite to the redistribution layer.

17. The chip package structure of claim 11 , wherein the chip stack further comprises a connecting wire electrically connected between two bonding pads respectively belonging to two of the multiple chips.

18. The chip package structure of claim 11 , wherein the vertical conductive element is electronically connected to at least two of the multiple chips.

19. The chip package structure of claim 11 , wherein at least one of the multiple chips is electronically connected to a component disposed over the redistribution layer.

20. The chip package structure of claim 11 , wherein the redistribution layer comprises a conductive layer and an insulating layer disposed over the conductive layer, and the insulating layer has multiple openings to expose multiple portions of the conductive layer.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 23, 2021
From: ZENG, XINRU; CHEN, PENG; ZHOU, HOUDE
To: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
Reel/Frame 057256/0006 →
Continuity (3)
Continuation 16736741 · Jan 7, 2020
Continuation PCTCN2019121821 · Nov 29, 2019
Related Publication 20210384166A1 · Dec 9, 2021
Cited By (1)
US 12,721,226