IP Library Granted Patent US 12,004,305
Granted Patent B2
US 12,004,305 · App. 17/415,041 · Granted Jun 4, 2024

Wiring board and production method for same

Inventors: Masaya Toba (Tokyo, JP); Kazuhiko Kurafuchi (Tokyo, JP); Takashi Masuko (Tokyo, JP); Kazuyuki Mitsukura (Tokyo, JP); Shinichiro Abe (Tokyo, JP)
Assignee: RESONAC CORPORATION
H05K3/181C23C18/1605C23C18/165C23C18/20C23C18/32C23C18/38H05K1/032H05K2201/068
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Quick Facts
Patent No.
US 12,004,305
App. No.
17/415,041
Granted
Jun 4, 2024
Kind
B2
Abstract

A wiring board according to the present disclosure includes a first insulating material layer having a surface with an arithmetic average roughness Ra of 100 nm or less, a metal wiring provided on the surface of the first insulating material layer, and a second insulating material layer provided to cover the metal wiring, in which the metal wiring is configured by a metal layer in contact with the surface of the first insulating material layer and a conductive part stacked on a surface of the metal layer, and a nickel content rate of the metal layer is 0.25 to 20% by mass.

Claims (29)

1. A method for manufacturing a wiring board, the method comprising, in a following order:

(a) a step of adsorbing an electroless plating catalyst to a first insulating material layer;

(b) a step of forming a metal layer on a surface of the first insulating material layer by electroless plating;

(c) a step of forming a resist having an opening for wiring pattern formation on a surface of the metal layer; and

(d) a step of forming a conductive part in a region, which is the surface of the metal layer and is exposed from the resist, by electrolytic plating, wherein

an arithmetic average roughness Ra of the surface of the first insulating material layer is 100 nm or less, and

a nickel content rate of the metal layer is 0.25 to 20% by mass.

2. The method for manufacturing a wiring board according to claim 1 , wherein in the step (b), the metal layer is formed using an electroless copper-nickel-phosphorus plating solution.

3. The method for manufacturing a wiring board according to claim 1 , wherein the surface of the first insulating material layer is not subjected to a roughening treatment with a desmear treatment solution, before performing the step (a).

4. The method for manufacturing a wiring board according to claim 1 , further comprising a step of performing at least one modification treatment selected from the group consisting of ultraviolet ray irradiation, electron beam irradiation, an ozone water treatment, a corona discharge treatment, and a plasma treatment with respect to the surface of the first insulating material layer, before performing the step (a).

5. The method for manufacturing a wiring board according to claim 1 , further comprising, in a following order:

(e) a step of removing the resist;

(f) a step of removing the metal layer exposed by a removal of the resist and the catalyst between the metal layer and the first insulating material layer; and

(g) a step of forming a second insulating material layer to cover a metal wiring configured by the metal layer remaining on the first insulating material layer and the conductive part.

6. A wiring board comprising:

a first insulating material layer having a surface with an arithmetic average roughness Ra of 100 nm or less;

a metal wiring provided on the surface of the first insulating material layer; and

a second insulating material layer provided to cover the metal wiring, wherein

the metal wiring is configured by a metal layer in contact with the surface of the first insulating material layer and a conductive part stacked on a surface of the metal layer, and

a nickel content rate of the metal layer is 0.25 to 20% by mass.

7. The wiring board according to claim 6 , wherein the nickel content rate of the metal layer is 3 to 20% by mass.

8. The wiring board according to claim 6 , wherein the nickel content rate of the metal layer is 0.25 to 3% by mass.

9. The wiring board according to claim 6 , wherein the first insulating material layer is composed of a cured product of a thermosetting resin composition.

10. The wiring board according to claim 6 , wherein the first insulating material layer is composed of a cured product of a photosensitive resin composition.

11. The wiring board according to claim 6 , further comprising a support substrate the first insulating layer being formed on,

wherein the support substrate is wafer-shaped and has a diameter of 200 mm, 300 mm or 450 mm.

12. The wiring board according to claim 6 , further comprising a support substrate the first insulating layer being formed on,

wherein the support substrate is rectangular panel-shaped and has a side of 300 to 700 mm.

13. The wiring board according to claim 6 , wherein the first insulating layer has a thermal expansion coefficient of 80×10 −6 /K or less.

Assignments (3)
CHANGE OF ADDRESS Recorded Feb 9, 2024
From: RESONAC CORPORATION
To: RESONAC CORPORATION
Reel/Frame 066547/0677 →
CHANGE OF NAME Recorded Mar 8, 2023
From: SHOWA DENKO MATERIALS CO., LTD.
To: RESONAC CORPORATION
Reel/Frame 062992/0805 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 27, 2021
From: TOBA, MASAYA; KURAFUCHI, KAZUHIKO; MASUKO, TAKASHI; MITSUKURA, KAZUYUKI; ABE, SHINICHIRO
To: SHOWA DENKO MATERIALS CO., LTD.
Reel/Frame 056984/0745 →