Capillary guide device and wire bonding apparatus
A capillary guide device ( 40 ) includes: a guide body portion ( 41 ) capable of being in contact with a capillary ( 8 ) held in a hole ( 7 h ); and a drive portion ( 42 ) which arranges the guide body portion ( 41 ) at a position capable of being in contact with the capillary ( 8 ) by moving the guide body portion ( 41 ) along an X-axis direction. The drive portion ( 42 ) includes: a table ( 46 ) connected to the guide body portion ( 41 ); a drive shaft ( 47 b ) extending in the X-axis direction and exhibiting a frictional resistance force with the table ( 46 ); and an ultrasonic element ( 47 a ) fixed to an end of the drive shaft ( 47 b ) and supplying an ultrasonic wave to the drive shaft ( 47 b ).
1. A capillary guide device, adapted to guide a capillary into a holding hole of a bonding tool, comprising:
a guide body portion, capable of being in contact with the capillary held in the holding hole; and
a drive portion, arranging the guide body portion at a position capable of being in contact with the capillary by moving the guide body portion along a second direction, wherein the second direction is a direction intersecting a first direction along a central axis of the holding hole, wherein
the drive portion comprises:
a moving body, connected to the guide body portion;
a drive shaft, extending in the second direction and exerting a frictional resistance force with the moving body; and
an ultrasonic wave generation body, fixed to an end of the drive shaft and supplying an ultrasonic wave to the drive shaft.
2. The capillary guide device according to claim 1 , wherein the drive portion further comprises a vibration generation portion which is attached to the moving body and which supplies a vibration along a third direction intersecting each of the first direction and the second direction to the guide body portion via the moving body.
3. The capillary guide device according to claim 1 , wherein the guide body portion comprises: a guide surface capable of being in contact with a side surface of the capillary, and a tapered surface continuous with the guide surface,
a main surface of the guide body portion facing the bonding tool comprises an open end that constitutes the guide surface, and
a back surface of the guide body portion opposite to the main surface comprises an open end that constitutes the tapered surface.
4. The capillary guide device according to claim 1 , further comprising a contact detection portion which detects that the guide body portion comes into contact with the bonding tool, wherein
the contact detection portion further comprises:
a voltage supply portion which generates a potential difference between the bonding tool and the guide body portion; and
an information acquisition portion which acquires an information indicating that the guide body portion comes into contact with the bonding tool according to a state of an electric circuit formed by the bonding tool, the guide body portion, and the voltage supply portion.
5. A wire bonding apparatus, comprising:
a bonding tool, comprising a capillary detachably held in a holding hole; and
a mounting portion, guiding the capillary to the holding hole by a guide portion and attaching the capillary to the holding hole, wherein
the guide portion comprises:
a guide body portion, capable of being in contact with the capillary held in the holding hole; and
a drive portion, arranging the guide body portion at a position capable of being in contact with the capillary by moving the guide body portion along a second direction, wherein the second direction is a direction intersecting a first direction along a central axis of the holding hole, wherein
the drive portion comprises:
a moving body, connected to the guide body portion;
a drive shaft, extending in the second direction and exerting a frictional resistance force with the moving body; and
an ultrasonic wave generation body, fixed to an end of the drive shaft and supplying an ultrasonic wave to the drive shaft.