Sensor apparatus
Provided is a sensor apparatus that can suppress movement of foreign matter from a Peltier element to a sensor element. The sensor apparatus includes a package substrate, a Peltier element, a circuit substrate, and a sensor element. The package substrate has a recess portion on a side of a first surface and plural terminals on a side of a second surface located on an opposite side of the first surface. The Peltier element is arranged in the recess portion. The circuit substrate is arranged on an opposite side of a bottom surface of the recess portion with the Peltier element sandwiched therebetween. The sensor element is attached to an opposite side of a surface, the surface being opposed to the Peltier element.
1. A sensor apparatus, comprising:
a package substrate that includes:
a first recess portion on a first side of a first surface of the package substrate;
a second recess portion on a bottom surface of the first recess portion; and
a plurality of terminals on a second side of a second surface of the package substrate, wherein the second side is opposite to the first side;
a Peltier element in the second recess portion;
a circuit substrate on an opposite side of a bottom surface of the second recess portion, wherein
the Peltier element is between a bottom surface of the circuit substrate and the bottom surface of the second recess portion,
the bottom surface of the circuit substrate is attached to the bottom surface of the first recess portion, and
the bottom surface of the circuit substrate faces the Peltier element; and
an image sensor on an upper surface of the circuit substrate, wherein
the circuit substrate is different from the image sensor, and
the upper surface of the circuit substrate is opposite to the bottom surface of the circuit substrate.
2. The sensor apparatus according to claim 1 , further comprising:
a lid attached to the package substrate; and
a sealed airtight space between the lid and the package substrate, wherein the lid is configured to cover the circuit substrate and the image sensor.
3. The sensor apparatus according to claim 2 , wherein the lid is seam welded to the package substrate.
4. The sensor apparatus according to claim 1 , wherein the circuit substrate and an inner side surface of the second recess portion separate a space around the Peltier element from a space around the image sensor.
5. The sensor apparatus according to claim 1 , further comprising a casing in the second recess portion, wherein
the casing accommodates the Peltier element, and
the casing separates a space around the Peltier element from a space around the image sensor.
6. The sensor apparatus according to claim 5 , wherein the casing includes a metal.
7. The sensor apparatus according to claim 1 , further comprising a wall member between the circuit substrate and the bottom surface of the second recess portion, wherein
the wall member laterally surrounds the Peltier element, and
the circuit substrate and the wall member separate a space around the Peltier element from a space around the image sensor.
8. The sensor apparatus according to claim 1 , wherein
the bottom surface of the circuit substrate includes a conductor layer, and
the conductor layer surrounds a region opposed to the Peltier element.
9. The sensor apparatus according to claim 1 , wherein the image sensor has a photoelectric conversion layer that includes silicon.
10. The sensor apparatus according to claim 1 , wherein the image sensor has a photoelectric conversion layer that includes a compound semiconductor.