IP Library Granted Patent US 11,276,687
Granted Patent B2
US 11,276,687 · App. 17/472,667 · Granted Mar 15, 2022

3D semiconductor device and structure

Inventors: Zvi Or-Bach (Haifa, IL); Brian Cronquist (Klamath Falls, OR)
Assignee: MONOLITHIC 3D Inc.
H01L27/0688H01L21/324H01L23/36H01L23/50H01L23/5225H01L23/5226H01L23/5283H01L23/5286H01L23/60H01L24/30H01L29/785H01L2224/30505H01L2224/30517H01L2224/30519
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Quick Facts
Patent No.
US 11,276,687
App. No.
17/472,667
Granted
Mar 15, 2022
Kind
B2
Abstract

A 3D semiconductor device, the device including: a first level, where the first level includes a first layer, the first layer including first transistors, and where the first level includes a second layer, the second layer including first interconnections; a second level overlaying the first level, where the second level includes a third layer, the third layer including second transistors, and where the second level includes a fourth layer, the fourth layer including second interconnections; a plurality of connection paths, where the plurality of connection paths provide first connections from a plurality of the first transistors to a plurality of the second transistors, where the second level is bonded to the first level, where the bonded includes oxide to oxide bond regions, where the bonded includes metal to metal bond regions, and where the third layer includes crystalline silicon; and at least one temperature sensor.

Claims (88)

1. A 3D semiconductor device, the device comprising:

a first level,

wherein said first level comprises a first layer, said first layer comprising first transistors, and

wherein said first level comprises a second layer, said second layer comprising first interconnections;

a second level overlaying said first level,

wherein said second level comprises a third layer, said third layer comprising second transistors, and

wherein said second level comprises a fourth layer, said fourth layer comprising second interconnections;

a plurality of connection paths,

wherein said plurality of connection paths provide first connections from a plurality of said first transistors to a plurality of said second transistors,

wherein said second level is bonded to said first level,

wherein said bonded comprises oxide to oxide bond regions,

wherein said bonded comprises metal to metal bond regions, and

wherein said third layer comprises crystalline silicon; and

at least one temperature sensor.

2. The device according to claim 1 ,

wherein said second level comprises at least one scan-chain to support circuit test.

3. The device according to claim 1 , further comprising:

a power control circuit connected to said at least one temperature sensor.

4. The device according to claim 1 ,

wherein said second level comprises at least one charge trap circuit.

5. The device according to claim 1 ,

wherein said second level comprises at least one power regulator circuit.

6. The device according to claim 1 ,

wherein said second level comprises at least one memory array,

wherein said first level comprises at least one control circuit, and

wherein said at least one control circuit controls read operations of said at least one memory array.

7. The device according to claim 1 ,

wherein said second level comprises at least one electrostatic-discharge (“ESD”) circuit.

8. A 3D semiconductor device, the device comprising:

a first level,

wherein said first level comprises a first layer, said first layer comprising first transistors, and

wherein said first level comprises a second layer, said second layer comprising first interconnections;

a second level overlaying said first level,

wherein said second level comprises a third layer, said third layer comprising second transistors, and

wherein said second level comprises a fourth layer, said fourth layer comprising second interconnections;

a plurality of connection paths,

wherein said plurality of connection paths provide first connections from a plurality of said first transistors to a plurality of said second transistors,

wherein said second level is bonded to said first level,

wherein said bonded comprises oxide to oxide bond regions,

wherein said bonded comprises metal to metal bond regions,

wherein said third layer comprises crystalline silicon,

wherein said second level comprises guard-rings, and

wherein at least one of said guard-rings surrounds said second transistors and said second interconnections.

9. The device according to claim 8 ,

wherein said second level comprises at least one array of memory cells,

wherein said memory cells are volatile type memory cells.

10. The device according to claim 8 ,

wherein said second level comprises at least one phase-lock-loop (“PLL”) circuit.

11. The device according to claim 8 ,

wherein said first level comprises a first computer bus,

wherein said second level comprises a second computer bus, and

wherein said at least one of said plurality of connection paths provides connection between said first bus and said second bus.

12. The device according to claim 8 ,

wherein said first level comprises a first clock-tree,

wherein said second level comprises a second clock-tree, and

wherein said metal to metal bond regions comprise second connections between said first clock-tree and said second clock-tree.

13. The device according to claim 8 ,

wherein said second level comprises at least one electrostatic-discharge (“ESD”) circuit.

14. The device according to claim 8 ,

wherein at least one of said second transistors is a FinFET type transistor.

15. A 3D semiconductor device, the device comprising:

a first level,

wherein said first level comprises a first layer, said first layer comprising first transistors, and

wherein said first level comprises a second layer, said second layer comprising first interconnections;

a second level overlaying said first level,

wherein said second level comprises a third layer, said third layer comprising second transistors, and

wherein said second level comprises a fourth layer, said fourth layer comprising second interconnections; and

a plurality of connection paths,

wherein said plurality of connection paths provide first connections from a plurality of said first transistors to a plurality of said second transistors,

wherein said second level is bonded to said first level,

wherein said bonded comprises oxide to oxide bond regions,

wherein said bonded comprises metal to metal bond regions,

wherein said second level comprises at least one memory array,

wherein said third layer comprises crystalline silicon,

wherein said first level comprises a first computer bus,

wherein said second level comprises a second computer bus, and

wherein said at least one of said plurality of connection paths provides connection between said first bus and said second bus.

16. The device according to claim 15 ,

wherein said second level comprises an oscillator circuit.

17. The device according to claim 15 ,

wherein said second level comprises at least one SerDes circuit.

18. The device according to claim 15 ,

wherein said second level comprises guard-rings, and

wherein at least one of said guard-rings surrounds said second transistors and said second interconnections.

19. The device according to claim 15 ,

wherein said second level comprises at least one electrostatic-discharge (“ESD”) circuit.

20. The device according to claim 15 ,

wherein at least one of said second transistors is a FinFET type transistor.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 12, 2021
From: OR-BACH, ZVI; CRONQUIST, BRIAN
To: MONOLITHIC 3D INC.
Reel/Frame 057456/0085 →
Continuity (11)
Continuation In Part 17367386 · Jul 4, 2021
Continuation In Part 17169432 · Feb 6, 2021
Continuation In Part 17065424 · Oct 7, 2020
Continuation In Part 15482787 · Apr 9, 2017
Continuation In Part 14607077 · Jan 28, 2015
Continuation In Part 13796930 · Mar 12, 2013
Provisional Application 62042229 · Aug 26, 2014
Provisional Application 62022498 · Jul 9, 2014
Provisional Application 61932617 · Jan 28, 2014
Provisional Application 62035565 · Aug 11, 2014
Related Publication 20210407991A1 · Dec 30, 2021