Semiconductor device with improved cell density and manufacturing method of the semiconductor device
A semiconductor device includes a gate structure including conductive layers and insulating layers alternately stacked with each other, channel structures passing through the gate structure and arranged in a first direction, a cutting structure extending in the first direction and passing through the channel structures, and a first slit structure passing through the gate structure and extending in a second direction crossing the first direction.
1. A semiconductor device, comprising:
a gate structure including conductive layers and insulating layers alternately stacked with each other;
channel structures passing through the gate structure in a vertical direction and arranged in a first direction, wherein the vertical direction is orthogonal to the first direction;
a cutting structure passing through the channel structures in the first direction and passing through the channel structures in the vertical direction; and
a first slit structure passing through the gate structure in the vertical direction and extending in a second direction, the second direction being orthogonal to the first direction and the vertical direction,
wherein the first slit structure and the channel structures are physically spaced apart from each other.
2. The semiconductor device of claim 1 , wherein each of the channel structures is separated into a first channel structure and a second channel structure by the cutting structure.
3. The semiconductor device of claim 2 , further comprising:
at least one first bit line extending in the first direction and coupled to first channel structures; and
at least one second bit line extending in the first direction and coupled to second channel structures.
4. The semiconductor device of claim 1 , further comprising a second slit structure penetrating into the gate structure at a shallower depth than both the first slit structure and the cutting structure, the second slit structure extending in the second direction.
5. The semiconductor device of claim 4 , wherein the cutting structure and the second slit structure contact each other.
6. The semiconductor device of claim 1 , wherein the cutting structure includes an insulating material.
7. A semiconductor device, comprising:
a gate structure including conductive layers and insulating layers alternately stacked with each other;
pillar structures passing through the gate structure in a vertical direction and arranged in a first direction, wherein the vertical direction is orthogonal to the first direction;
a cutting structure passing through the pillar structures in the first direction, passing through the pillar structures in the vertical direction, and separating each of the pillar structures into a first pillar structure and a second pillar structure;
a first slit structure passing through the gate structure in the vertical direction and extending in a second direction, wherein the second direction is orthogonal to the first direction and the vertical direction;
a first interconnection line extending in the first direction, the first interconnection line coupled to the first pillar structures; and
a second interconnection line extending in the first direction, the second interconnection line coupled to the second pillar structures,
wherein the first slit structure and the pillar structures are physically spaced apart from each other.
8. The semiconductor device of claim 7 , further comprising:
first contact plugs coupled to the first pillar structures, respectively, the first contact plugs coupling the first pillar structures to the first interconnection line; and
second contact plugs coupled to the second pillar structures, respectively, the second contact plugs coupling the second pillar structures to the second interconnection line.
9. A method of manufacturing a semiconductor device, the method comprising:
forming a stacked structure;
forming channel structures passing through the stacked structure in a vertical direction and arranged in a first direction, wherein the vertical direction is orthogonal to the first direction;
forming a cutting structure passing through the channel structures in the first direction and passing through the channel structures in the vertical direction; and
forming a first slit structure passing through the stacked structure in the vertical direction and extending in a second direction, the second direction being orthogonal to the first direction and the vertical direction,
wherein the first slit structure and the channel structures are physically spaced apart from each other.
10. The method of claim 9 , wherein forming the cutting structure comprises etching the channel structures so that each of the channel structures is separated into a first channel structure and a second channel structure.
11. The method of claim 10 , further comprising:
forming at least one first bit line extending in the first direction and coupled to first channel structures; and
forming at least one second bit line extending in the first direction and coupled to second channel structures.
12. The method of claim 9 , wherein forming the cutting structure comprises:
forming a trench crossing at least two channel structures; and
forming the cutting structure to include an insulating material in the trench.
13. The method of claim 9 , wherein forming of the first slit structure comprises:
forming a first slit passing through the stacked structure including alternately stacked first material layers and second material layers, the first slit extending in the second direction;
replacing the first material layers with third material layers through the first slit; and
forming the first slit structure in the first slit.
14. The method of claim 9 , further comprising forming a second slit structure penetrating into the stacked structure at a shallower depth than the first slit structure and extending in the second direction.
15. The method of claim 14 , wherein forming the second slit structure comprises:
forming a second slit by etching the stacked structure and the cutting structure; and
forming the second slit structure in the second slit.