Nonvolatile memory device and method for fabricating the same
A three-dimensional nonvolatile memory device and a method for fabricating the same include a semiconductor substrate, a plurality of active pillars, a plurality of gate electrodes, and a plurality of supporters. The semiconductor substrate includes a memory cell region and a contact region. The active pillars extend in the memory cell region perpendicularly to the semiconductor substrate. The gate electrodes intersect the active pillars, extend from the memory cell region to the contact region and are stacked on the semiconductor substrate. The supporters extend in the contact region perpendicularly to the semiconductor substrate to penetrate at least one or more of the gate electrodes.
1. A method of fabricating a three-dimensional semiconductor device, comprising:
preparing a substrate including a first region and a second region;
forming a mold structure comprising first layers and second layers alternately stacked on the substrate,
patterning a portion of the mold structure to form a staircase structure on the second region;
forming a planarized dielectric layer covering the staircase structure of the mold structure;
forming a plurality of vertical patterns on the first region;
forming a plurality of supporters on the second region; and
removing the second layers to form gate regions between the first layers, the gate regions exposing portions of each of the vertical patterns and portions of each of the supporters; and
forming gate electrodes in the gate regions.
2. The method of claim 1 , wherein the plurality of supporters penetrates the planarized dielectric layer and the staircase structure.
3. The method of claim 1 , wherein the plurality of supporters have different respective vertical lengths in the second region.
4. The method of claim 1 , wherein the vertical lengths decrease with increasing distance from the first region.
5. The method of claim 1 , wherein the vertical patterns and the supporters comprise semiconductor material.
6. The method of claim 1 , wherein the vertical patterns and the supporters are formed at the same time.
7. The method of claim 1 , wherein the vertical patterns comprise semiconductor material, and the supporters comprise dielectric material.
8. The method of claim 1 , further comprising:
forming a data storage layer between the vertical patterns and the gate electrodes and between the supporters and the gate electrodes,
wherein the forming the data storage layer comprises sequentially depositing a charge tunneling layer, a charge trapping layer, and a charge blocking layer.
9. The method of claim 1 , further comprising:
forming a plurality of contact plugs on the second region and connected to respective ones of the gate electrodes; and
forming a plurality of conductive lines connected to the plurality of contact plugs.
10. The method of claim 9 , wherein each of the contact plugs is between adjacent ones of the supporters.