Semiconductor package
Disclosed is a semiconductor package comprising a first redistribution substrate; a solder ball on a bottom surface of the first redistribution substrate; a second redistribution substrate; a semiconductor chip between a top surface of the first redistribution substrate and a bottom surface of the second redistribution substrate; a conductive structure electrically connecting the first redistribution substrate and the second redistribution substrate, the conductive structure laterally spaced apart from the semiconductor chip and including a first conductive structure and a second conductive structure in direct contact with a top surface of the first conductive structure; and a conductive seed pattern between the first redistribution substrate and the first conductive structure. A material of first conductive structure and a material of the second conductive structure may be different from a material of the solder ball.
1. A semiconductor package, comprising:
a first redistribution substrate including a stack of dielectric layers, a first redistribution pattern in the stack of dielectric layers, and at least one first redistribution pad electrically connected to the first redistribution pattern, wherein at least a portion of the at least one first redistribution pad is in a hole defined by an uppermost dielectric layer of the stack of dielectric layers;
a solder ball on a bottom surface of the first redistribution substrate;
a second redistribution substrate;
a semiconductor chip between a top surface of the first redistribution substrate and a bottom surface of the second redistribution substrate;
a conductive structure electrically connecting the first redistribution substrate and the second redistribution substrate, the conductive structure laterally spaced apart from the semiconductor chip and including a first conductive structure and a second conductive structure in direct contact with a top surface of the first conductive structure;
a conductive seed pattern between a corresponding one of the least one first redistribution pad and the first conductive structure; and
a molding layer between the first redistribution substrate and the second redistribution substrate,
wherein a material of the first conductive structure and a material of the second conductive structure is different from a material of the solder ball, the solder ball comprises at least one of tin, bismuth, lead, and silver, and the first conductive structure and the second conductive structure comprise copper,
wherein the first conductive structure includes a pillar and the second conductive structure includes a pillar,
wherein a connection of the first conductive structure and the second conductive structure comprises copper, and
wherein the molding layer directly contacts the at least one first redistribution pad and the conductive seed pattern.
2. The semiconductor package of claim 1 , wherein the top surface of the first conductive structure has a dome-shaped cross-section.
3. The semiconductor package of claim 1 , wherein
the top surface of the first conductive structure includes a central region and an edge region, and
the central region is at a higher level than the edge region.
4. The semiconductor package of claim 1 , wherein
the material of the second conductive structure is a same material as the material of the first conductive structure, and
the second conductive structure has a different grain structure than the first conductive structure.
5. The semiconductor package of claim 1 , wherein
a bottom surface of the first conductive structure has a first width,
a bottom surface of the second conductive structure has a second width, and
the second width is less than the first width.
6. The semiconductor package of claim 1 , wherein
a bottom surface of the first conductive structure has a first width,
a bottom surface of the second conductive structure has a second width, and
a difference between the first width and the second width is less than or equal to 50% of the second width.
7. The semiconductor package of claim 1 , wherein
a first width, at a bottom surface of the first conductive structure, is greater than a width at the top surface of the first conductive structure, and
a second width, at a bottom surface of the second conductive structure, is greater than a width at a top surface of the second conductive structure.
8. The semiconductor package of claim 1 , wherein
a first width, at a bottom surface of the first conductive structure, is less than a width at the top surface of the first conductive structure, and
a second width, at a bottom surface of the second conductive structure, is less than a width at a top surface of the second conductive structure.
9. The semiconductor package of claim 1 , wherein
a first height of the first conductive structure is 50% to 300% of a first width at a bottom surface of the first conductive structure, and
a second height of the second conductive structure is 50% to 300% of a second width at a bottom surface of the second conductive structure.
10. The semiconductor package of claim 1 , wherein
the molding layer covers at least a sidewall of the semiconductor chip and a sidewall of the conductive structure, and
wherein the molding layer is in direct contact with a bottom surface of the second redistribution substrate.
11. A semiconductor package, comprising:
a first redistribution substrate including a stack of dielectric layers, a first redistribution pattern in the stack of dielectric layers, and at least one first redistribution pad electrically connected to the first redistribution pattern, wherein at least a portion of the at least one first redistribution pad is in a hole defined by an uppermost dielectric layer of the stack of dielectric layers;
a solder ball on a bottom surface of the first redistribution substrate;
a second redistribution substrate;
a semiconductor chip between a top surface of the first redistribution substrate and a bottom surface the second redistribution substrate;
a conductive structure electrically connecting the first redistribution substrate and the second redistribution substrate, and the conductive structure laterally spaced apart from the semiconductor chip and including a first conductive structure and a second conductive structure in direct contact with a top surface of the first conductive structure;
a conductive seed pattern between a corresponding one of the least one first redistribution pad and the conductive structure; and
a molding layer between the first redistribution substrate and the second redistribution substrate,
wherein the top surface of the first conductive structure includes a central region and an edge region, and the central region is at a higher level higher than the edge region,
wherein a material of the first conductive structure and a material of the second conductive structure is different from a material of the solder ball, the solder ball comprises at least one of tin, bismuth, lead, and silver, and the first conductive structure and the second conductive structure comprise copper,
wherein the first conductive structure includes a pillar and the second conductive structure includes a pillar,
wherein a connection of the first conductive structure and the second conductive structure comprises copper, and
wherein the molding layer directly contacts the at least one first redistribution pad and the conductive seed pattern.
12. The semiconductor package of claim 11 , wherein
the second conductive structure includes a same material as the first conductive structure, and
the second conductive structure has a different grain structure than that of the first conductive structure.
13. The semiconductor package of claim 11 , wherein
a first width, at a lower portion of the first conductive structure, is different from a width at an upper portion of the first conductive structure, and
a second width, at a lower portion of the second conductive structure, is different from a width at an upper portion of the second conductive structure.
14. The semiconductor package of claim 11 , further comprising:
a third conductive structure directly on a top surface of the second conductive structure,
wherein the top surface of the second conductive structure includes a second central region and a second edge region, and the second central region is at a higher level than the second edge region.
15. The semiconductor package of claim 11 , further comprising:
an upper semiconductor chip on a top surface of the second redistribution substrate.
16. A semiconductor package, comprising:
a first redistribution substrate, the first redistribution substrate including a first dielectric layer and a first redistribution pad at least partially in a first hole defined by a top surface of the first redistribution substrate, the redistribution pad including a first seed pattern, and a first conductive pattern on the first seed pattern, the first dielectric layer including a first photoimageable polymer;
a solder ball on a bottom surface of the first redistribution substrate;
a second redistribution substrate, the second redistribution substrate including a second dielectric layer, a second seed pattern, and a second conductive pattern on the second seed pattern, the second dielectric layer including a second photoimageable polymer;
a semiconductor chip between the top surface of the first redistribution substrate and a bottom surface the second redistribution substrate;
a conductive structure electrically connecting the first redistribution substrate and the second redistribution substrate, the conductive structure laterally spaced apart from the semiconductor chip and including a first conductive structure and a second conductive structure in direct contact with a top surface of the first conductive structure;
a conductive seed pattern between the first redistribution pad and the conductive structure; and
a molding layer between the first redistribution substrate and the second redistribution substrate, the molding layer covering at least a sidewall of the semiconductor chip, a sidewall of the conductive seed pattern, and a sidewall of the conductive structure, and exposing a top surface of the conductive structure,
wherein the bottom surface of the second redistribution substrate is in physical contact with the molding layer,
wherein a material of the first conductive structure and a material of the second conductive structure is different from a material of the solder ball, the solder ball comprises at least one of tin, bismuth, lead, and silver, and the first conductive structure and the second conductive structure comprise copper,
wherein the first conductive structure includes a pillar and the second conductive structure includes a pillar,
wherein a connection of the first conductive structure and the second conductive structure comprises copper, and
wherein the molding layer directly contacts the first redistribution pad and the conductive seed pattern.
17. The semiconductor package of claim 16 , wherein
the material of the second conductive structure is a same as the material of the first conductive structure, and
the second conductive structure has a different grain structure than the first conductive structure.
18. The semiconductor package of claim 16 , wherein
a bottom surface of the first conductive structure has a first width,
a bottom surface of the second conductive structure has a second width, the first width is greater than a width at the top surface of the first conductive structure, the second width is greater than a width at a top surface of the second conductive structure, and
the second width is less than the first width.
19. The semiconductor package of claim 16 , wherein
a bottom surface of the first conductive structure has a first width,
a bottom surface of the second conductive structure has a second width,
a difference between the first width and the second width is equal to or greater than 1 μm,
the difference between the first width and the second width is equal to or less than 50% of the second width,
a first height of the first conductive structure is 50% to 300% of the first width, and
a second height of the second conductive structure is 50% to 300% of the second width.
20. The semiconductor package of claim 16 , wherein the top surface of the first conductive structure is upwardly convex.