Substrate treatment apparatus having bowl assembly
The present invention relates to a substrate treatment apparatus including: a substrate support assembly having a spin head onto which a substrate is seated; a fluid supply unit for supplying a fluid to the substrate; a bowl assembly having a plurality of bowls overlaid one another outwardly in a radial direction thereof to surround the substrate support assembly; and an ascending and descending unit for moving up and down the bowl assembly, wherein the bowls constituting the bowl assembly move up and down independently of one another.
1. A substrate treatment apparatus comprising:
a substrate support assembly having a spin head onto which a substrate is seated;
a fluid supply unit for supplying a fluid to the substrate;
a bowl assembly having a plurality of bowls overlaid one another outwardly in a radial direction thereof to surround the substrate support assembly; and
an ascending and descending unit for moving up and down the bowl assembly,
wherein the bowls constituting the bowl assembly move up and down independently of one another,
wherein the bowls comprise:
lower bowls;
upper bowls slant inwardly in a radial direction of the substrate support assembly; and
connection bowls connecting top end peripheries of the lower bowls and underside end peripheries of the upper bowls via adapters and having curved inner peripheral surfaces with rounded longitudinal sectional shapes,
wherein between the lower bowls and the connection bowls are disposed adapters made of a resin, the adapters being made of a fluorine resin-based material containing any one of carbon nanotubes, graphene, and carbon black as carbon-based components, so as to prevent the bowls from being charged by an electrostatic force,
wherein the connection bowls and the lower bowls comprise first coupling grooves and first coupling protrusions formed on underside and top end peripheries thereof respectively, and the adapters comprise second coupling protrusions and second coupling grooves formed on top and underside end peripheries thereof and thus coupled to the first coupling grooves and the first coupling protrusions respectively,
wherein the innermost bowl of the bowls comprises a first passage portion to which the fluid flows from the substrate and a second passage portion separated from the first passage portion through a partition wall, and the partition wall has an exhaust hole formed above the bottom of the first passage portion and slanting upward from an inlet toward an outlet thereof.
2. The substrate treatment apparatus according to claim 1 , wherein in a longitudinal sectional view, the upper bowls comprise waveform-shaped protrusions protruding from the inner peripheral surfaces thereof and guide grooves formed concavely on both sides of the waveform-shaped protrusions.
3. The substrate treatment apparatus according to claim 1 , wherein the adapters and the top ends of the lower bowls are fixed to one another by means of fixing pins made of a resin.