Image sensor packages formed using temporary protection layers and related methods
An image sensor package may include a semiconductor wafer having a pixel array, a color filter array (CFA) formed over the pixel array, and one or more lenses formed over the CFA. A light block layer may couple over the semiconductor wafer around a perimeter of the lenses and an encapsulation layer may be coupled around the perimeter of the lenses and over the light block layer. The light block layer may form an opening providing access to the lenses. A mold compound layer may be coupled over the encapsulation layer and the light block layer. A temporary protection layer may be used to protect the one or more lenses from contamination during application of the mold compound and/or during processes occurring outside of a cleanroom environment.
1. A method of forming an image sensor package comprising:
forming an encapsulation layer around a perimeter of one or more lenses, the encapsulation layer comprising a largest planar surface substantially parallel with a largest planar surface of a lens layer comprising the one or more lenses;
forming a temporary protection layer over the one or more lenses, the temporary protection layer formed through an opening in the encapsulation layer;
depositing a mold compound over the encapsulation layer, the mold compound comprising a largest planar surface substantially parallel with the largest planar surface of the lens layer; and
removing the temporary protection layer over the one or more lenses;
wherein a dam structure separates the encapsulation layer from the temporary protection layer.
2. The method of claim 1 , wherein the encapsulation layer does not contact the temporary protection layer.
3. The method of claim 1 , further comprising coupling an optically transmissive cover over the one or more lenses.
4. The method of claim 1 , wherein the temporary protection layer is removed by a solvent.
5. The method of claim 1 , wherein a height of the temporary protection layer is less than a height of the dam structure.
6. A method of forming an image sensor package comprising:
forming one or more lenses over a semiconductor wafer;
forming a light block layer around a perimeter of the one or more lenses and over the semiconductor wafer;
forming an encapsulation layer over the light block layer;
forming a temporary protection layer over the one or more lenses;
forming a mold compound layer over the encapsulation layer while the temporary protection layer is present over the one or more lenses; and
removing the temporary protection layer after forming the mold compound layer.
7. The method of claim 6 , wherein a height of the temporary protection layer is less than a height of the encapsulation layer.
8. The method of claim 6 , wherein a dam structure separates the encapsulation layer from the temporary protection layer.
9. The method of claim 8 , wherein the dam structure is phobic to the liquid.
10. The method of claim 6 , further comprising coupling an optically transmissive cover over the one or more lenses.
11. A method of forming an image sensor package, comprising:
forming a color filter array (CFA) over a pixel array of a semiconductor wafer;
forming one or more lenses over the CFA;
forming a light block layer around a perimeter of the one or more lenses and over the semiconductor wafer;
forming an encapsulation layer over the light block layer;
forming a temporary protection layer over the one or more lenses;
forming a mold compound layer over the encapsulation layer while the temporary protection layer is present over the one or more lenses; and
removing the temporary protection layer after forming the mold compound layer.
12. The method of claim 11 , wherein the temporary protection layer is prevented from deposition over the encapsulation layer by one of a height of the encapsulation layer perpendicular to a largest planar surface of the semiconductor wafer or a height of a dam structure perpendicular to the largest planar surface of the semiconductor wafer.
13. The method of claim 11 , further comprising forming an antireflective coating (ARC) layer over the encapsulation layer and over the one or more lenses, wherein the mold compound layer contacts the ARC layer.
14. The method of claim 12 , further comprising forming the dam structure at an edge of the encapsulation layer.
15. The method of claim 12 , wherein the dam structure directly couples to the temporary protection layer.
16. The method of claim 12 , wherein the dam structure is phobic to a liquid used to form the temporary protection layer.
17. The method of claim 12 , wherein the mold compound layer contacts the dam structure.
18. The method of claim 11 , wherein the mold compound layer contacts the encapsulation layer.