IP Library Granted Patent US 12,031,213
Granted Patent B2
US 12,031,213 · App. 17/595,570 · Granted Jul 9, 2024

Laminate

Inventors: Akira Furuya (Tokyo, JP); Tadaaki Kojima (Tokyo, JP); Hiroshi Suzuki (Tokyo, JP); Fumiaki Naka (Tokyo, JP)
Assignee: Resonac Corporation
C23C28/322B32B3/10B32B3/266B32B3/30B32B15/01B32B15/015B32B15/017B32B15/018B32B15/04B32B15/043B32B15/18B32B15/20C23C8/12C23C8/14C23C18/1637C23C18/1651C23C18/1653C23C18/1689C23C18/1696C23C18/1848C23C18/32C23C18/34C23C18/36C23C18/42C23C18/44C23C18/52C23C18/54C23C28/02C23C28/021C23C28/023C23C28/028C23C28/321C23C28/345C23C30/00C23C30/005C25D3/12H01J37/32477C22C38/44C23C16/4404C23C18/1824Y10T428/1259Y10T428/12597Y10T428/12604Y10T428/12611Y10T428/12618Y10T428/1266Y10T428/12667Y10T428/12743Y10T428/1275Y10T428/12882Y10T428/12889Y10T428/12931Y10T428/12937Y10T428/12944Y10T428/12951Y10T428/12972Y10T428/12979Y10T428/12993Y10T428/24942Y10T428/2495Y10T428/24967Y10T428/24975Y10T428/249953Y10T428/26Y10T428/265
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Quick Facts
Patent No.
US 12,031,213
App. No.
17/595,570
Granted
Jul 9, 2024
Kind
B2
Abstract

A laminate including a metallic base material, a nickel-containing plating film layer formed on the metallic base material, and a gold plating film layer formed on the nickel-containing plating film layer, in which pinholes in the gold plating film layer are sealed with a passive film having a thickness of 15 nm or greater. Also disclosed is a constituent member of a semiconductor production device including the laminate and a method for producing the laminate.

Claims (8)

1. A laminate comprising a metallic base material, a nickel-containing plating film layer formed on the metallic base material, and a gold plating film layer formed on the nickel-containing plating film layer,

wherein pinholes in the gold plating film layer are sealed with a passive film having a thickness of 15 nm or greater,

wherein the passive film is formed on a surface of the nickel-containing plating layer by forcible oxidation of the nickel-containing plating layer.

2. The laminate according to claim 1 , wherein the metallic base material comprises at least a metal selected from the group consisting of stainless steel, iron, aluminum, aluminum alloys, copper, and copper alloys.

3. The laminate according to claim 1 , having a nickel strike layer between the metallic base material and the nickel-containing plating film layer.

4. The laminate according to claim 1 , wherein the nickel-containing plating film layer comprises a nickel-phosphorus alloy plating layer (1) having a phosphorus concentration of 8% by mass or higher and lower than 10% by mass, and a nickel-phosphorus alloy plating layer (2) having a phosphorus concentration of 10% by mass or higher and 12% by mass or lower in this order from the metallic base material.

5. The laminate according to claim 1 , wherein the gold plating film layer comprises a displacement gold plating film layer and a reduction gold plating film layer in this order from the nickel-containing plating film layer.

6. A constituent member of a semiconductor production device, made up of the laminate according to claim 1 .

Assignments (3)
CHANGE OF ADDRESS Recorded Feb 9, 2024
From: RESONAC CORPORATION
To: RESONAC CORPORATION
Reel/Frame 066547/0677 →
CHANGE OF NAME Recorded Jun 23, 2023
From: SHOWA DENKO K.K.
To: RESONAC CORPORATION
Reel/Frame 064082/0513 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 19, 2021
From: FURUYA, AKIRA; KOJIMA, TADAAKI; SUZUKI, HIROSHI; NAKA, FUMIAKI
To: SHOWA DENKO K.K.
Reel/Frame 058215/0536 →