Bonding apparatus
This bonding apparatus is provided with: a tape feeder module which takes out an electronic component from a carrier tape and transfers the electronic component thus taken out; a die supply module which has a die pick-up mechanism for picking up a semiconductor die from a semiconductor wafer bonded to a dicing sheet by pushing up the semiconductor die and which transfers the semiconductor die thus picked up; and a bonding module which arranges, on a circuit substrate, the semiconductor die supplied by the die supply module and/or the electronic component supplied by the tape feeder module.
1. A bonding apparatus comprising:
an electronic component supply module comprising a carrier tape and a first transfer part adjacent to the carrier tape, the first transfer part taking out an electronic component from the carrier tape and transferring the taken-out electronic component from the electronic component supply module;
a die supply module comprising a pickup part and a second transfer part adjacent to the pickup part, the picking part picking up a semiconductor die from a wafer bonded to a dicing sheet of the picking part by pushing up the semiconductor die, and the second transfer part transferring out the picked-up semiconductor die from the die supply module; and
a bonding module bonding at least one of the semiconductor die supplied by the die supply module and the electronic component supplied by the electronic component supply module to a substrate,
wherein the second transfer part is a common transfer path and receives the electronic component transferred from the first transfer part, both the electronic component and the semiconductor die are transferred to the bonding module through the second transfer part, the first transfer part is an independent transfer path, one of the electronic component and the semiconductor die is transferred out to the common transfer path through the first transfer part, and a region where the first transfer part and the second transfer part overlap is set in the die supply module.
2. The bonding apparatus according to claim 1 , wherein the first transfer part is a chip transfer mechanism transferring the electronic component in a predetermined transfer direction, and the second transfer part is a die transfer mechanism transferring the semiconductor die and the electronic component in the predetermined transfer direction.
3. The bonding apparatus according to claim 2 , wherein the electronic component supply module, the die supply module, and the bonding module are arranged in sequential order adjacent to each other along the predetermined transfer direction.
4. The bonding apparatus according to claim 3 , wherein the bonding module further comprises an arrangement part receiving the electronic component from the first transfer part and arranging the received electronic component on the substrate, and the arrangement part receives the semiconductor die from the second transfer part and arranges the received semiconductor die on the substrate.
5. The bonding apparatus according to claim 2 , wherein the bonding module further comprises an arrangement part receiving the electronic component from the first transfer part and arranging the received electronic component on the substrate, and the arrangement part receives the semiconductor die from the second transfer part and arranges the received semiconductor die on the substrate.
6. The bonding apparatus according to claim 1 , wherein the bonding module further comprises an arrangement part receiving the electronic component from the first transfer part and arranging the received electronic component on the substrate, and the arrangement part receives the semiconductor die from the second transfer part and arranges the received semiconductor die on the substrate.
7. A bonding apparatus comprising:
an electronic component supply module comprising a carrier tape and a first transfer part adjacent to the carrier tape, the first transfer part taking out an electronic component from the carrier tape and transferring the taken-out electronic component from the electronic component supply module;
a die supply module comprising a pickup part and a second transfer part adjacent to the pickup part, the picking part picking up a semiconductor die from a wafer bonded to a dicing sheet of the picking part by pushing up the semiconductor die, and the second transfer part transferring out the picked-up semiconductor die from the die supply module; and
a bonding module bonding at least one of the semiconductor die supplied by the die supply module and the electronic component supplied by the electronic component supply module to a substrate,
wherein the first transfer part is a common transfer path and receives the semiconductor die transferred from the second transfer part, both the electronic component and the semiconductor die are transferred to the bonding module through the first transfer part, the second transfer part is an independent transfer path, one of the electronic component and the semiconductor die is transferred out through the second transfer part, and a region where the first transfer part and the second transfer part overlap is set in the electronic component supply module.