IP Library › Patent Application 17611754
Patent Application Utility PCT National Stage
App. No. 17/611,754 · Confirmation No. 5865

PLASMA ETCHING METHOD

Applicant: SHOWA DENKO K.K.
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2026-02-17 CTFR Final Rejection 8 View
2026-02-17 SRFW Search information including classification, databases and other search related notes 2 View
2026-02-17 FWCLM Index of Claims 1 View
2026-02-17 SRNT Examiner's search strategy and results 52 View
2025-12-12 N417.PYMT Electronic Fee Payment 2 View
2025-12-12 N417 Electronic Filing System Acknowledgment Receipt 2 View
2025-12-12 A... Amendment/Request for Reconsideration-After Non-Final Rejection — View
2025-12-12 N417 Electronic Filing System Acknowledgment Receipt 2 View
2025-12-12 CLM Claims 3 View
2025-12-12 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2025-12-12 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2025-12-12 XT/ Extension of Time 1 View
2025-12-12 WFEE Fee Worksheet (SB06) 1 View
2025-08-14 CTNF Non-Final Rejection 8 View
2025-08-14 FWCLM Index of Claims 1 View
2025-08-14 SRFW Search information including classification, databases and other search related notes 1 View
2025-08-14 SRNT Examiner's search strategy and results 26 View
2025-08-05 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) — View
2025-08-05 RCEX Request for Continued Examination (RCE) 1 View
2025-08-05 XT/ Extension of Time 1 View
2025-08-05 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2025-08-05 CLM Claims 3 View
2025-08-05 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2025-08-05 N417 Electronic Filing System Acknowledgment Receipt 2 View
2025-08-05 N417.PYMT Electronic Fee Payment 2 View
2025-08-05 WFEE Fee Worksheet (SB06) 1 View
2025-02-06 CTFR Final Rejection 7 View
2025-02-06 FWCLM Index of Claims 1 View
2025-02-06 SRFW Search information including classification, databases and other search related notes 1 View
2025-02-06 SRNT Examiner's search strategy and results 12 View
2025-01-10 A... Amendment/Request for Reconsideration-After Non-Final Rejection — View
2025-01-10 N417 Electronic Filing System Acknowledgment Receipt 2 View
2025-01-10 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2025-01-10 CLM Claims 3 View
2025-01-10 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2025-01-10 XT/ Extension of Time 1 View
2025-01-10 N417.PYMT Electronic Fee Payment 2 View
2025-01-10 WFEE Fee Worksheet (SB06) 1 View
2024-09-10 CTNF Non-Final Rejection 7 View
2024-09-10 SRFW Search information including classification, databases and other search related notes 1 View
2024-09-10 FWCLM Index of Claims 1 View
2024-09-10 SRNT Examiner's search strategy and results 6 View
2024-08-29 N417 Electronic Filing System Acknowledgment Receipt 2 View
2024-08-29 XT/ Extension of Time 1 View
2024-08-29 RCEX Request for Continued Examination (RCE) 1 View
2024-08-29 N417.PYMT Electronic Fee Payment 2 View
2024-08-29 WFEE Fee Worksheet (SB06) 1 View
2024-08-05 CTAV Advisory Action (PTOL-303) 3 View
2024-08-05 A.NE.AFCP.D After Final Consideration Program Decision 1 View
2024-08-05 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2024-07-26 A.NE Response After Final Action — View
2024-07-26 A.NE.AFCP After Final Consideration Program Request 1 View
2024-07-26 N417 Electronic Filing System Acknowledgment Receipt 2 View
2024-07-26 A.NE Response After Final Action 1 View
2024-07-26 CLM Claims 3 View
2024-07-26 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2024-07-26 WFEE Fee Worksheet (SB06) 1 View
2024-07-26 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2024-04-30 CTFR Final Rejection 7 View
2024-04-30 FWCLM Index of Claims 1 View
2024-04-30 SRFW Search information including classification, databases and other search related notes 1 View
2024-04-30 1449 List of References cited by applicant and considered by examiner 2 View
2024-04-30 SRNT Examiner's search strategy and results 4 View
2024-03-08 A... Amendment/Request for Reconsideration-After Non-Final Rejection — View
2024-03-08 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2024-03-08 CLM Claims 3 View
2024-03-08 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2024-03-08 N417 Electronic Filing System Acknowledgment Receipt 2 View
2024-03-08 WFEE Fee Worksheet (SB06) 1 View
2024-01-11 TRAN.LET Transmittal Letter — View
2024-01-11 N417 Electronic Filing System Acknowledgment Receipt 2 View
2024-01-11 TRAN.LET Transmittal Letter 2 View
2024-01-11 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2024-01-11 FOR Foreign Reference 6 View
2023-12-11 CTNF Non-Final Rejection 7 View
2023-12-11 892 List of references cited by examiner 1 View
2023-12-11 FWCLM Index of Claims 1 View
2023-12-11 SRFW Search information including classification, databases and other search related notes 1 View
2023-12-11 1449 List of References cited by applicant and considered by examiner 2 View
2023-12-11 SRNT Examiner's search strategy and results 1 View
2023-12-11 1449 List of References cited by applicant and considered by examiner 1 View
2023-12-11 BIB Bibliographic Data Sheet 1 View
2023-12-11 FOR Foreign Reference 19 View
2023-12-11 1449 List of References cited by applicant and considered by examiner 2 View
2022-09-29 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2022-09-29 FOR Foreign Reference 8 View
2022-09-29 FOR Foreign Reference 19 View
2022-09-29 N417 Electronic Filing System Acknowledgment Receipt 2 View
2022-09-29 TRAN.LET Transmittal Letter 2 View
2022-08-11 NTC.PUB Notice of Publication 1 View
2022-04-26 APP.FILE.REC Filing Receipt 3 View
2022-04-26 WFEE Fee Worksheet (SB06) 1 View
2022-04-26 WCLM Claims Worksheet (PTO-2022) 1 View
2022-04-26 M903 Notice of Designated Office (DO) / Elected Office (EO) Acceptance Mailed 2 View
2022-02-02 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2022-02-02 N417 Electronic Filing System Acknowledgment Receipt 2 View
2022-02-02 REF.OTHER Other reference-Patent/Application/Search Documents 6 View
2022-02-02 TRAN.LET Transmittal Letter 2 View
2021-11-19 PA.. Power of Attorney 2 View
2021-11-19 N417 Electronic Filing System Acknowledgment Receipt 2 View
2021-11-19 OATH Oath or Declaration filed 5 View
2021-11-16 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2021-11-16 371P Documents submitted with 371 (National Stage) Applications 5 View
2021-11-16 FOR Foreign Reference 15 View
2021-11-16 FOR Foreign Reference 26 View
2021-11-16 FOR Foreign Reference 39 View
2021-11-16 FOR Foreign Reference 26 View
2021-11-16 371P Documents submitted with 371 (National Stage) Applications 4 View
2021-11-16 WFEE Fee Worksheet (SB06) 2 View
2021-11-16 N417 Electronic Filing System Acknowledgment Receipt 4 View
2021-11-16 TRNA Transmittal of New Application 3 View
2021-11-16 ADS Application Data Sheet 6 View
2021-11-16 SPEC Specification 20 View
2021-11-16 CLM Claims 2 View
2021-11-16 ABST Abstract 1 View
2021-11-16 DRW Drawings-only black and white line drawings 3 View
2021-11-16 OATH Oath or Declaration filed 3 View
2021-11-16 TRAN.LET Transmittal Letter 2 View
2021-11-16 A.PE Preliminary Amendment 1 View
2021-11-16 SPEC Specification 1 View
2021-11-16 CLM Claims 4 View
2021-11-16 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2021-11-16 P.PAMPHLET WIPO Publication - Non-English version 28 View
2021-11-16 P.N.101.CONV PCT/RO/101 - Request form for new International Application - Conventional 5 View
2021-11-16 FRPR Certified Copy of Foreign Priority Application 23 View
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Quick Facts
App. No.
17/611,754
Filed
2021-11-16
Pub. No.
US20220254607A1
Art Unit
1718