Semiconductor apparatus and semiconductor apparatus manufacturing method
Provided is a semiconductor apparatus that can realize further enhancement of capabilities regarding a stacked structure of plural substrates. The semiconductor apparatus includes a first substrate that includes a first element layer including a first active element, and a first wiring layer arranged on the first element layer; and a second substrate that includes a second element layer including a second active element arranged on the first wiring layer, and a second wiring layer arranged on the second element layer, in which the first substrate and the second substrate are stacked one on another, and the second active element is provided in a compound semiconductor substrate.
1. A semiconductor apparatus, comprising:
a first substrate that includes:
a first element layer including a first active element; and
a first wiring layer on the first element layer; and
a second substrate that includes:
a second element layer including a second active element on the first wiring layer, wherein the second element layer includes a first compound semiconductor substrate; and
a second wiring layer on the second element layer, wherein
the second element layer is between the first wiring layer and the second wiring layer,
the first substrate is on the second substrate,
the second active element includes a transistor, and
a source region and a drain region of the second active element are in the first compound semiconductor substrate.
2. The semiconductor apparatus according to claim 1 , wherein the first active element is in a silicon substrate.
3. The semiconductor apparatus according to claim 1 , wherein
the first active element is in a first silicon substrate, and
the first compound semiconductor substrate is on a second silicon substrate.
4. The semiconductor apparatus according to claim 1 , further comprising a third substrate on the second substrate.
5. The semiconductor apparatus according to claim 1 , wherein the first substrate further includes a photoelectric converting section under the first element layer.
6. The semiconductor apparatus according to claim 5 , wherein the first active element and the photoelectric converting section are in a second compound semiconductor substrate.
7. The semiconductor apparatus according to claim 1 , wherein the semiconductor apparatus is in a solid-state image pickup apparatus.
8. A semiconductor apparatus, comprising:
a first substrate that includes:
a photoelectric converting section, wherein the photoelectric converting section is in a first compound semiconductor substrate; and
a first wiring layer on the photoelectric converting section; and
a second substrate that includes:
an element layer including an active element on the first wiring layer; and
a second wiring layer on the element layer, wherein
the element layer is between the first wiring layer and the second wiring layer, and
the first substrate is on the second substrate.
9. The semiconductor apparatus according to claim 8 , wherein the first compound semiconductor substrate includes a semiconductor having a bandgap wider than a bandgap of silicon.
10. The semiconductor apparatus according to claim 8 , wherein the first compound semiconductor substrate includes a semiconductor having a bandgap narrower than a bandgap of silicon.
11. The semiconductor apparatus according to claim 8 , wherein
the active element includes a transistor, and
a source region and a drain region of the active element is in a second compound semiconductor substrate.
12. The semiconductor apparatus according to claim 8 , further comprising a third compound semiconductor substrate, wherein the first compound semiconductor substrate is on the third compound semiconductor substrate.
13. A semiconductor apparatus manufacturing method, comprising:
forming a first substrate including a first element layer and a first wiring layer by forming the first wiring layer on the first element layer, wherein the first element layer includes a first active element;
preparing a second substrate in which a second element layer including a second active element is formed, wherein the second element layer includes a compound semiconductor substrate;
forming the second element layer on the first wiring layer by pasting, on a first wiring layer side of the first substrate, a second element layer side of the second substrate; and
forming a second wiring layer on the second element layer, wherein
the second element layer is between the first wiring layer and the second wiring layer,
the second active element includes a transistor, and
a source region and a drain region of the second active element are in the compound semiconductor substrate.
14. A semiconductor apparatus manufacturing method, comprising:
forming a first substrate including a photoelectric converting section and a first wiring layer by forming the first wiring layer on the photoelectric converting section, wherein the photoelectric converting section is in a compound semiconductor substrate;
preparing a second substrate in which an element layer including an active element is formed, wherein the active element includes a transistor;
forming the element layer on the first wiring layer by pasting, on a first wiring layer side of the first substrate, an element layer side of the second substrate; and
forming a second wiring layer on the element layer, wherein
the element layer is between the first wiring layer and the second wiring layer.