Semiconductor device and method using tape attachment
A semiconductor device has a first semiconductor package including a substrate and an encapsulant deposited over the substrate. An adhesive tape is disposed on the encapsulant. A conductive via is formed by trench cutting through the adhesive tape and encapsulant to expose the substrate. A second semiconductor package is disposed over the adhesive tape opposite the first semiconductor package. The first semiconductor package and second semiconductor package are bonded together by the adhesive tape.
1. A method of making a semiconductor device, comprising:
providing a first semiconductor package including a substrate and an encapsulant deposited over the substrate;
disposing an adhesive tape on the encapsulant;
forming a conductive via by trench cutting through the adhesive tape and encapsulant to expose the substrate;
disposing a solder paste on the conductive via; and
disposing a second semiconductor package over the adhesive tape opposite the first semiconductor package, wherein the first semiconductor package and second semiconductor package are bonded together by the adhesive tape.
2. The method of claim 1 , further including disposing the adhesive tape on the encapsulant with a cover tape attached to the adhesive tape.
3. The method of claim 1 , wherein forming the conductive via includes depositing a conductive epoxy or adhesive into an opening formed by the trench cutting.
4. The method of claim 1 , wherein each of the first semiconductor package and second semiconductor package physically contacts the adhesive tape.
5. The method of claim 1 , further including forming a shielding layer over the second semiconductor package prior to disposing the second semiconductor package over the adhesive tape opposite the first semiconductor package.
6. A method of making a semiconductor device, comprising:
providing a first semiconductor package;
disposing an adhesive tape over the first semiconductor package;
forming a conductive via through the adhesive tape;
removing a cover tape of the adhesive tape after forming the conductive via; and
disposing a second semiconductor package over the first semiconductor package with the second semiconductor package electrically coupled to the first semiconductor package through the conductive via.
7. The method of claim 6 , further including forming the conductive via using a conductive epoxy or adhesive.
8. The method of claim 7 , further including curing the conductive epoxy or adhesive after disposing the second semiconductor package over the first semiconductor package.
9. The method of claim 6 , further including disposing the adhesive tape on a substrate of the first semiconductor package.
10. The method of claim 9 , further including disposing the second semiconductor package with a substrate of the second semiconductor package in physical contact with the adhesive tape.
11. The method of claim 6 , further including forming the conductive via through an encapsulant of the first semiconductor package.
12. A method of making a semiconductor device, comprising:
providing a first semiconductor package including a substrate and an encapsulant deposited over the substrate;
disposing an adhesive tape over the first semiconductor package;
forming a via opening through the adhesive tape and encapsulant to expose the substrate;
forming a conductive via by completely filling the via opening with a conductive material;
disposing a second semiconductor package over the first semiconductor package with the adhesive tape between the first semiconductor package and second semiconductor package after forming the conductive via; and
pressing the second semiconductor package onto the adhesive tape, wherein the adhesive tape mechanically bonds the second semiconductor package to the first semiconductor package.
13. The method of claim 12 , further including forming a shielding layer over the first semiconductor package.
14. The method of claim 12 , wherein the first semiconductor package and second semiconductor package are bonded together by the adhesive tape.
15. The method of claim 12 , further including forming the via opening using a trench cut.
16. A semiconductor device, comprising:
a first semiconductor package;
a second semiconductor package;
an adhesive tape disposed between the first semiconductor package and second semiconductor package, wherein a substrate of the second semiconductor package physically contacts the adhesive tape;
a conductive via formed through the adhesive tape and an encapsulant of the first semiconductor package; and
a solder paste disposed on the conductive via between the first semiconductor package and second semiconductor package.
17. The semiconductor device of claim 16 , wherein the conductive via includes a conductive epoxy or adhesive.
18. The semiconductor device of claim 16 , wherein the adhesive tape extends from a substrate of the first semiconductor package to a substrate of the second semiconductor package.
19. The semiconductor device of claim 16 , further including a shielding layer formed over the first semiconductor package.