Semiconductor device and electronic system including the same
A semiconductor device may include a first cell block including a first electrode structure including first electrodes stacked on a substrate, and first channels penetrating the first electrode structure, and a second cell block including a second electrode structure including second electrodes stacked on the substrate, and second channels penetrating the second electrode structure. The first and second electrode structures may extend in a first direction. The first electrode structure may have a first width in a second direction, and the second electrode structure may have a second width greater than the first width. A side surface of the first electrode structure and the first channel adjacent thereto may be apart from each other by a first distance, and a side surface of the second electrode structure and the second channel adjacent thereto may be apart from each other by a second distance different from the first distance.
1. A semiconductor device, comprising:
a substrate;
a first cell block including a first electrode structure and first channels penetrating the first electrode structure, the first electrode structure including first electrodes stacked on the substrate; and
a second cell block including a second electrode structure and second channels penetrating the second electrode structure, the second cell block including second electrodes stacked on the substrate,
wherein the first and second electrode structures extend in a first direction,
the first electrode structure has a first width in a second direction crossing the first direction,
the second electrode structure has a second width greater than the first width,
a side surface of the first electrode structure and the first channel adjacent to the first electrode structure are apart from each other by a first distance, and
a side surface of the second electrode structure and the second channel adjacent to the second electrode structure are apart from each other by a second distance that is different from the first distance.
2. The semiconductor device of claim 1 , wherein the first channels adjacent to the side surface of the first electrode structure have a first channel width, and
the second channels adjacent to the side surface of the second electrode structure have a second channel width greater than the first channel width.
3. The semiconductor device of claim 1 , wherein the first channels correspond to a plurality of first columns spaced apart from each other in the second direction,
the first columns comprise a first edge column closest to the side surface of the first electrode structure, and a first intermediate column next closest to the side surface of the first electrode structure,
the second channels correspond to a plurality of second columns spaced apart from each other in the second direction,
the second columns comprise a second edge column closest to the side surface of the second electrode structure, and a second intermediate column next closest to the side surface of the second electrode structure, and
a distance between the second edge column and the second intermediate column is greater than a distance between the first edge column and the first intermediate column.
4. The semiconductor device of claim 3 , wherein, in each of the first columns the first channels are spaced apart from each other in the first direction by a first distance,
in each of the second columns the second channels are apart from each other in the first direction by a second distance, and
the first distance is substantially equal to the second distance.
5. The semiconductor device of claim 3 , wherein a number of the first columns is equal to a number of the second columns.
6. The semiconductor device of claim 1 , wherein the first channels correspond to a plurality of first columns spaced apart from each other in the second direction,
the first columns comprise a first edge column adjacent to the side surface of the first electrode structure, and a first center column farthest from the side surface of the first electrode structure,
the second channels correspond to a plurality of second columns apart from each other in the second direction,
the second columns comprise a second edge column adjacent to the side surface of the second electrode structure, and a second center column farthest from the side surface of the second electrode structure,
distances between adjacent ones of the first columns decrease in a direction from the first edge column toward the first center column, and
distances between adjacent ones of the second columns decrease in a direction from the second edge column toward the second center column.
7. The semiconductor device of claim 1 , wherein the first channels correspond to a plurality of first columns apart from each other in the second direction,
the first columns comprise a first edge column adjacent to the side surface of the first electrode structure, and a first center column farthest from the side surface of the first electrode structure,
the second channels correspond to a plurality of second columns apart from each other in the second direction,
the second columns comprise a second edge column adjacent to the side surface of the second electrode structure, and a second center column farthest from the side surface of the second electrode structure,
widths of the first channels in the second direction decrease in a direction from the first edge column toward the first center column, and
widths of the second channels in the second direction decrease in a direction from the second edge column toward the second center column.
8. The semiconductor device of claim 7 , wherein the first channels have substantially the same width in the first direction, and
the second channels have substantially the same width in the first direction.
9. The semiconductor device of claim 1 , wherein the first channels correspond to a plurality of first columns apart from each other in the second direction,
the second channels correspond to a plurality of second columns apart from each other in the second direction, and
a number of the first columns is greater than a number of the second columns.
10. The semiconductor device of claim 1 , further comprising:
first contact plugs coupled to the first channels;
second contact plugs coupled to the second channels; and
a bit line extending in the second direction to cross the first and second electrode structures,
wherein the bit line connects to at least one of the first contact plugs and at least one of the second contact plugs.
11. The semiconductor device of claim 1 , further comprising:
a dummy block including a dummy electrode structure and dummy channels penetrating the dummy electrode structure, the dummy electrode structure including dummy electrodes stacked on the substrate extending in the first direction,
wherein the dummy electrode structure has a third width in the second direction, the third width substantially equal to the first width, and
the second cell block is between the dummy block and the first cell block.
12. The semiconductor device of claim 11 , wherein a side surface of the dummy electrode structure and the dummy channels adjacent to the dummy electrode structure are apart from each other by a third distance that is substantially equal to the first distance.
13. A semiconductor device, comprising:
a first cell block including a first electrode structure and first channels penetrating the first electrode structure, the first electrode structure including first electrodes stacked on a substrate; and
a second cell block including a second electrode structure and second channels penetrating the second electrode structure, the second electrode structure including second electrodes stacked on the substrate,
wherein the first and second electrode structures extend in a first direction,
the first channels correspond to a plurality of first columns apart from each other in a second direction crossing the first direction,
the first columns comprise a first edge column closest to a side surface of the first electrode structure, and a first intermediate column next closest to the side surface of the first electrode structure,
the second channels correspond to a plurality of second columns apart from each other in the second direction,
the second columns comprise a second edge column closest to a side surface of the second electrode structure, and a second intermediate column next closest to the side surface of the second electrode structure,
a distance between the second edge column and the second intermediate column is different from a distance between the first edge column and the first intermediate column, and
a width of the first channels in the first edge column is different from a width of the second channels in the second edge column.
14. The semiconductor device of claim 13 , wherein the first electrode structure has a first width in the second direction, and
the second electrode structure has a second width greater than the first width in the second direction.
15. The semiconductor device of claim 13 , wherein a distance between the side surface of the first electrode structure and the first edge column is different from a distance between the side surface of the second electrode structure and the second edge column.
16. The semiconductor device of claim 13 , wherein the first columns further comprise a first center column farthest from the side surface of the first electrode structure,
distances between the first columns decrease in a direction from the first edge column toward the first center column,
the second columns further comprise a second center column farthest from the side surface of the second electrode structure, and
distances between the second columns decrease in a direction from the second edge column to the second center column.
17. The semiconductor device of claim 13 , wherein the first columns further comprise a first center column farthest from the side surface of the first electrode structure,
widths of the first channels in the second direction decrease in a direction from the first edge column toward the first center column,
the second columns further comprise a second center column, which is farthest from the side surface of the second electrode structure, and
widths of the second channels in the second direction decrease in a direction from the second edge column toward the second center column.
18. The semiconductor device of claim 17 , wherein, in each of the plurality of first columns, the first channels are apart from each other in the first direction by a constant distance.
19. The semiconductor device of claim 13 , wherein the first channels have substantially the same width in the first direction, and
the second channels have substantially the same width in the first direction.
20. An electronic system, comprising:
a semiconductor device including a first cell block, a second cell block, a peripheral circuit connected to the first and second cell blocks, and an input/output pad electrically connected to the peripheral circuit, the first cell block comprising a first electrode structure and first channels penetrating the first electrode structure, the first cell block including first electrodes stacked on a substrate, the second cell block comprising a second electrode structure and second channels penetrating the second electrode structure, the second block including second electrodes stacked on the substrate; and
a controller electrically connected to the semiconductor device through the input/output pad and configured to control the semiconductor device,
wherein the first and second electrode structures extend in a first direction,
in a second direction crossing the first direction, the first electrode structure has a first width and the second electrode structure has a second width greater than the first width, and
the second channels of the second cell block differs from the first channels in at least one of a channel width or a distance to another adjacent channel.