Semiconductor device and method of manufacturing the same
A semiconductor device includes a stacked film including a plurality of electrode layers and a plurality of insulating layers alternately stacked in a first direction and a columnar portion including a charge storage layer and a first semiconductor layer and extending in the first direction in the stacked film. The device further includes a second semiconductor layer provided on the stacked film and the columnar portion, and at least a part of regions in the second semiconductor layer contains phosphorus having an atomic concentration of 1.0×10 21 /cm 3 or more and hydrogen having an atomic concentration of 1.0×10 19 /cm 3 or less.
1. A semiconductor device comprising:
a stacked film including a plurality of electrode layers and a plurality of insulating layers alternately stacked in a first direction;
a columnar portion including a charge storage layer and a first semiconductor layer, the columnar portion extending in the first direction in the stacked film; and
a second semiconductor layer disposed on the stacked film and the columnar portion,
wherein at least a part of regions in the second semiconductor layer contains phosphorus having an atomic concentration of 1.0×10 21 /cm 3 or more and hydrogen having an atomic concentration of 1.0×10 19 /cm 3 or less.
2. The semiconductor device according to claim 1 , wherein the at least a part of regions in the second semiconductor layer is a polycrystalline semiconductor layer.
3. The semiconductor device according to claim 1 , wherein the second semiconductor layer includes a first region that is a polycrystalline semiconductor layer and a second region that is an amorphous semiconductor layer.
4. The semiconductor device according to claim 3 , wherein an atomic concentration of phosphorus in the first region is 1.0×10 21 /cm 3 or more, and an atomic concentration of hydrogen in the first region is 1.0×10 19 /cm 3 or less.
5. The semiconductor device according to claim 3 , wherein an atomic concentration of hydrogen in the second region is higher than 1.0×10 19 /cm 3 .
6. The semiconductor device according to claim 1 , wherein
the plurality of electrode layers and the plurality of insulating layers are alternately disposed on a first substrate, and
an atomic concentration of hydrogen in the second semiconductor layer is 1.0×10 19 /cm 3 or less in at least a portion of a side surface of the second semiconductor layer positioned above an end surface of the first substrate.
7. The semiconductor device according to claim 6 , wherein the at least a portion of the side surface of the second semiconductor layer is a polycrystalline semiconductor layer.
8. The semiconductor device according to claim 1 , wherein
the plurality of electrode layers and the plurality of insulating layers are alternately disposed on a first substrate, and
an atomic concentration of hydrogen in the second semiconductor layer is higher than 1.0×10 19 /cm 3 in at least a portion of a side surface of the second semiconductor layer positioned above an end surface of the first substrate.
9. The semiconductor device according to claim 8 , wherein the at least a portion of the side surface of the second semiconductor layer is an amorphous semiconductor layer.
10. The semiconductor device according to claim 1 , further comprising:
a first substrate;
a first pad disposed above the first substrate; and
a second pad disposed on the first pad,
wherein the first semiconductor layer is disposed at a position higher than the second pad and is electrically connected to the second pad.
11. The semiconductor device according to claim 1 , wherein the plurality of electrode layers is a plurality of word lines, and the second semiconductor layer is a source line.