Transistor gate structures and methods of forming the same
In an embodiment, a device includes: a first gate dielectric on a first channel region of a first semiconductor feature; a first gate electrode on the first gate dielectric; a second gate dielectric on a second channel region of a second semiconductor feature, the second gate dielectric having a greater crystallinity than the first gate dielectric; and a second gate electrode on the second gate dielectric.
1. A method comprising:
depositing an amorphous high-k dielectric layer on a semiconductor feature;
annealing the amorphous high-k dielectric layer to form a crystalline high-k dielectric layer;
depositing a first work function tuning layer on the crystalline high-k dielectric layer;
patterning the first work function tuning layer by etching the first work function tuning layer using the crystalline high-k dielectric layer as an etch stop layer;
depositing a second work function tuning layer on the first work function tuning layer and the crystalline high-k dielectric layer; and
patterning the second work function tuning layer by etching the second work function tuning layer using the first work function tuning layer and the crystalline high-k dielectric layer as etch stop layers.
2. The method of claim 1 , wherein etching the first work function tuning layer reduces a thickness of the crystalline high-k dielectric layer.
3. The method of claim 1 , wherein the crystalline high-k dielectric layer is thicker than the amorphous high-k dielectric layer.
4. The method of claim 1 , wherein annealing the amorphous high-k dielectric layer comprises performing a microsecond anneal process.
5. The method of claim 4 , wherein the microsecond anneal process is performed at a temperature in a range of 1000° C. to 1150° C. and for a duration in a range of 1.2 milliseconds to 12 milliseconds.
6. The method of claim 1 , wherein the amorphous high-k dielectric layer has a crystallinity in a range of 5% to 30% and the crystalline high-k dielectric layer has a crystallinity in a range of 60% to 100%.
7. A method comprising:
depositing a gate dielectric layer on a first channel region and a second channel region;
performing a treatment process on the gate dielectric layer;
depositing a first metal layer on the gate dielectric layer;
removing a first portion of the first metal layer overlying the first channel region by etching the first metal layer with an etching process, a second portion of the first metal layer remaining over the second channel region, wherein the treatment process decreases an etch rate of the gate dielectric layer during the etching process; and
depositing a second metal layer on the second portion of the first metal layer and the gate dielectric layer.
8. The method of claim 7 , wherein performing the treatment process on the gate dielectric layer comprises crystallizing the gate dielectric layer.
9. The method of claim 8 , wherein the gate dielectric layer is crystallized to have a tetragonal or orthorhombic crystalline phase, and a crystalline grain size in a range of 3 nm to 25 nm.
10. The method of claim 7 , wherein the gate dielectric layer comprises hafnium oxide, the first metal layer comprises titanium aluminide, and the etching process comprises a wet etch using SC-1, SC-2, or hydrogen peroxide as etchants.
11. A method comprising:
depositing a gate dielectric layer having a first portion over a first channel region and having a second portion over a second channel region, the first channel region being longer than the second channel region;
performing a crystallization process to increase a crystallinity of the second portion of the gate dielectric layer to be greater than a crystallinity of the first portion of the gate dielectric layer; and
forming a first gate electrode and a second gate electrode, the first gate electrode formed over the first portion of the gate dielectric layer, the second gate electrode formed over the second portion of the gate dielectric layer, the first gate electrode comprising more work function tuning layers than the second gate electrode.
12. The method of claim 11 , wherein performing the crystallization process changes a crystalline phase of the second portion of the gate dielectric layer to be different than a crystalline phase of the first portion of the gate dielectric layer.
13. The method of claim 11 , wherein performing the crystallization process changes a crystalline orientation of the second portion of the gate dielectric layer to be different than a crystalline orientation of the first portion of the gate dielectric layer.
14. The method of claim 11 , wherein performing the crystallization process changes a crystalline grain size of the second portion of the gate dielectric layer to be different than a crystalline grain size of the first portion of the gate dielectric layer.
15. The method of claim 11 , wherein the crystallization process comprises a microsecond anneal process.
16. The method of claim 11 , further comprising:
forming a fin comprising the first channel region; and
forming a nanostructure comprising the second channel region.
17. The method of claim 11 , wherein after forming the first gate electrode and the second gate electrode, the second portion of the gate dielectric layer is thinner than the first portion of the gate dielectric layer.
18. The method of claim 11 , wherein forming the first gate electrode and the second gate electrode comprises:
forming a first work function tuning layer over the gate dielectric layer;
removing the first work function tuning layer from the second portion of the gate dielectric layer, the first work function tuning layer remaining over the first portion of the gate dielectric layer; and
forming a second work function tuning layer over the first work function tuning layer and the gate dielectric layer.
19. The method of claim 11 , wherein the first gate electrode and the second gate electrode are formed as part of a same metal gate line.
20. The method of claim 11 , wherein the first gate electrode and the second gate electrode are formed as parts of different metal gate lines.