Transducer
A transducer includes a piezoelectric element that includes a piezoelectric membrane which is interposed between a pair of electrodes, a membrane body that includes a vibration membrane displaceable in a membrane thickness direction, the piezoelectric element being laminated on the vibration membrane, a package that includes an internal space which houses the piezoelectric element and the membrane body, and an abutment pad that is disposed in the internal space and limits displacement of the vibration membrane by abutting the piezoelectric element or the vibration membrane when the vibration membrane is displaced in the membrane thickness direction.
1. A transducer comprising:
a membrane support portion that includes a cylindrical inner peripheral surface which forms a hollow portion;
a vibration membrane that has a whole periphery connected to the inner peripheral surface and is displaceable in a membrane thickness direction;
a piezoelectric element that includes a pair of electrodes and a piezoelectric membrane interposed between the pair of electrodes, and is laminated on the vibration membrane; and
a dividing slit that penetrates a vibrator in which the vibration membrane and the piezoelectric element are laminated in a thickness direction, and divides the vibrator into a plurality of vibration regions, wherein
the inner peripheral surface has:
a polygonal shape in which a plurality of flat portions are connected via a chamfered corner portion, and
the dividing slit includes:
a main slit portion that extends from a center of the vibration membrane toward the corner portion; and
a sub-slit portion that extends from a connecting portion which connects the corner portion and the flat portions, to an end portion of the main slit portion on a side of the corner portion.
2. The transducer according to claim 1 , wherein
the piezoelectric element includes:
a piezoelectric slit that penetrates the piezoelectric element in a thickness direction and extends from the flat portions to the dividing slit along a vertical direction of the flat portions.
3. The transducer according to claim 1 , wherein
each of the pair of electrodes is connected to a circuit pattern for applying a driving voltage to the electrodes in each of the plurality of vibration regions.
4. The transducer according to claim 1 , wherein
the piezoelectric element includes an opening portion in a region corresponding to a-t center of the vibration membrane, the opening portion allowing the piezoelectric element to penetrate in a thickness direction.
5. The transducer according to claim 1 , wherein
the plurality of vibration regions include:
a first vibration region, and
a second vibration region that is divided into a shape different from a shape of the first vibration region.
6. The transducer according to claim 1 , further comprising:
a membrane body protective layer that is disposed on the piezoelectric element along the inner peripheral surface and protects a connecting portion between the vibration membrane and the inner peripheral surface.
7. The transducer according to claim 1 , further comprising:
a cover layer that is disposed on the piezoelectric element so as to cover the dividing slit and expands and contracts in accordance with displacement of the vibration membrane.
8. The transducer according to claim 1 , wherein
each of the plurality of vibration regions is chamfered such that a thickness of a distal end positioned near the center of the vibration membrane decreases from a non-center position toward the center of the vibration membrane.
9. The transducer according to claim 1 , wherein
a circular projection that extends to the center of the vibration membrane is disposed at a distal end of any one of the plurality of vibration regions, and
a notch that is cut in an arc shape so as to surround the projection is disposed at a distal end of a remaining vibration region of the plurality of vibration regions other than the vibration region in which the projection is disposed.
10. A transducer comprising:
a membrane support portion that includes a cylindrical inner peripheral surface which forms a hollow portion;
a vibration membrane that has a whole periphery connected to the inner peripheral surface and is displaceable in a membrane thickness direction;
a piezoelectric element that includes a pair of electrodes and a piezoelectric membrane interposed between the pair of electrodes, and is laminated on the vibration membrane; and
a dividing slit that penetrates a vibrator in which the vibration membrane and the piezoelectric element are laminated in a thickness direction, and divides the vibrator into a plurality of vibration regions, wherein
the inner peripheral surface has a polygonal shape in which a plurality of flat portions are connected via a corner portion,
the dividing slit extends from a center of the vibration membrane toward the corner portion, and
the piezoelectric element includes a piezoelectric slit that penetrates the piezoelectric element in a thickness direction and extends from the flat portions to the dividing slit along a vertical direction of the flat portions.