Manufacturing method of an electronic apparatus
A manufacturing method of an electronic apparatus is provided, and the manufacturing method includes following steps. A substrate is provided. A plurality of first bonding pads are formed on the substrate. A plurality of electronic devices are provided, and each of the electronic devices includes at least one second bonding pad. The second bonding pads of the electronic devices corresponding to the first bonding pads are laminated onto the corresponding first bonding pads on the substrate, so as to bond the electronic devices to the substrate. The corresponding first and second bonding pads respectively have bonding surfaces with different surface topographies. The manufacturing method of the electronic apparatus is capable of reducing short circuit during a bonding process or improving a bonding yield.
1. A manufacturing method of an electronic apparatus, comprising:
providing a substrate;
forming a first bonding pad on the substrate;
providing a electronic device, wherein the electronic device comprising a second bonding pad; and
laminating the second bonding pad of the electronic device corresponding to the first bonding pad onto the corresponding first bonding pad on the substrate, so as to bond the electronic device to the substrate,
wherein the corresponding first bonding pad and second bonding pad respectively have a bonding surface with different surface topographies,
wherein a method of laminating the second bonding pad of the electronic device corresponding to the first bonding pad onto the corresponding first bonding pad on the substrate comprises:
allowing a portion of the second bonding pad to contact the corresponding first bonding pad, so as to form a groove between the second bonding pad and the corresponding first bonding pad after the contact;
performing a diffusion reaction, so as to diffuse second metal atoms of the second bonding pad and first metal atoms of the first bonding pad at the portion; and
allowing the diffused second metal atoms and the diffused corresponding first metal atoms fill the groove.
2. The manufacturing method according to claim 1 , further comprising:
forming a passivation layer on the corresponding first bonding pad.
3. The manufacturing method according to claim 2 , wherein a material of the passivation layer comprises silver, gold, chromium, hafnium, iridium, molybdenum, niobium, osmium, palladium, platinum, rhenium, rhodium, ruthenium, tantalum, titanium, vanadium, tungsten, or zirconium.
4. The manufacturing method according to claim 2 , wherein a thickness of the passivation layer is less than 10 nanometers.
5. The manufacturing method according to claim 1 , further comprising:
forming an oxidation layer on the corresponding first bonding pad.
6. The manufacturing method according to claim 5 , wherein a thickness of the oxidation layer is less than 10 nanometers.
7. The manufacturing method according to claim 1 , wherein the bonding surface of one of the corresponding first and second bonding pads has a convex shape, and the bonding surface of the other has a concave shape.
8. The manufacturing method according to claim 7 , wherein a dimension of the concave-shaped bonding surface is greater than a dimension of the convex-shaped bonding surface.
9. The manufacturing method according to claim 1 , wherein materials of the corresponding first and second bonding pads are copper or gold.
10. The manufacturing method according to claim 1 , wherein the electronic device is a light emitting diode.
11. The manufacturing method according to claim 1 , wherein a dimension of the electronic device is less than 100 μm.
12. The manufacturing method according to claim 1 , further comprising:
forming the electronic device on a growth substrate.
13. The manufacturing method according to claim 12 , further comprising:
picking up the electronic device on the growth substrate by a transfer substrate.
14. The manufacturing method according to claim 1 , wherein the bonding surface of one of the corresponding first and second bonding pads is shaped as a protruding rectangle, and the bonding surface of the other is shaped as a recessed inverted trapezoid.
15. The manufacturing method according to claim 14 , wherein a width of a base of the inverted trapezoid is less than a width of a short side of the rectangle.
16. The manufacturing method according to claim 1 , wherein the bonding surface of one of the corresponding first and second bonding pads has a planar shape, and the bonding surface of the other has a jagged shape.
17. The manufacturing method according to claim 1 , wherein the bonding surface of one of the corresponding first and second bonding pads has a planar shape, and the bonding surface of the other has a pyramidal shape.
18. The manufacturing method according to claim 1 , wherein the corresponding first and second bonding pads are partially overlapped in a normal direction of the substrate.