Multi-zone pedestal heater without vias
A support pedestal includes a substrate, a plurality of resistive heating elements disposed on the substrate and defining a plurality of heating zones, and electric terminals disposed at a central region of the substrate. At least one of the electric terminals is connected to at least two of the plurality of resistive heating elements.
1. A support pedestal comprising:
a substrate;
a plurality of resistive heating elements disposed on the substrate and defining a plurality of heating zones; and
electric terminals disposed at a central region of the substrate,
wherein at least one of the electric terminals is connected to at least two of the plurality of resistive heating elements, and
the plurality of resistive heating elements are disposed outside the central region.
2. The support pedestal according to claim 1 , wherein the at least two of the plurality of resistive heating elements are connected to another two of the electric terminals.
3. The support pedestal according to claim 2 , wherein the at least two of the plurality of resistive heating elements are independently controllable.
4. The support pedestal according to claim 1 , wherein a total number of the electric terminals is less than or equal to a total number of the plurality of heating zones.
5. The support pedestal according to claim 1 , further comprising a plurality of wires that connect the plurality of resistive heating elements to the electric terminals.
6. The support pedestal according to claim 5 , wherein a total number of the wires is equal to a total number of the electric terminals.
7. The support pedestal according to claim 5 , wherein each of the plurality of wires is connected to at least two of the plurality of resistive heating elements.
8. The support pedestal according to claim 1 , wherein each of the electric terminals is connected to at least two of the resistive heating elements.
9. The support pedestal according to claim 1 , wherein the plurality of resistive heating elements are disposed on different planes of the substrate.
10. The support pedestal according to claim 1 , wherein the electric terminals are termination pads.
11. The support pedestal according to claim 10 , wherein the terminal pads and the plurality of resistive heating elements are disposed on the same plane of the substrate.
12. A support pedestal comprising:
a substrate;
a plurality of resistive heating elements disposed on the substrate and defining a plurality of heating zones that are independently controllable; and
electric terminals disposed at a central region of the substrate,
wherein at least one of the electric terminals is connected to at least two of the plurality of resistive heating elements such that a total number of the electric terminals is less than or equal to a total number of the plurality of resistive heating elements, and
the plurality of resistive heating elements are disposed outside the central region.
13. The support pedestal according to claim 12 , wherein the at least two of the plurality of resistive heating elements are connected to another two of the electric terminals.
14. The support pedestal according to claim 13 , further comprising a plurality of wires that connect the plurality of resistive heating elements to the electric terminals.
15. The support pedestal according to claim 14 , wherein a total number of the wires is equal to the total number of the electric terminals.
16. The support pedestal according to claim 15 , wherein each of the plurality of wires is connected to at least two of the plurality of resistive heating elements.
17. The support pedestal according to claim 12 , wherein each of the electric terminals are connected to at least two of the plurality of resistive heating elements.
18. A support pedestal comprising:
a substrate;
a plurality of resistive heating elements disposed on the substrate; and
electric terminals disposed at a central region of the substrate and connected to the plurality of resistive heating elements,
wherein a total number of the electric terminals is less than or equal to a total number of the plurality of resistive heating elements, and
the plurality of resistive heating elements are disposed outside the central region.
19. The support pedestal according to claim 18 , wherein at least one of the electric terminals is connected to at least two of the plurality of resistive heating elements.
20. The support pedestal according to claim 18 , wherein each of the electric terminals is connected to at least two of the plurality of resistive heating elements.