Semiconductor memory device
A semiconductor memory device including a memory cell array and a peripheral circuit element configured to control an operation of the memory cell array, and a wiring structure including first and second wiring structures spaced apart from each other on the peripheral circuit element, a first voltage and a second voltage different from the first voltage applied to two opposite ends of the first wiring structure, respectively, and a third voltage different from the first and second voltages applied to the second wiring structure, may be provided. The first wiring structure includes first lines extended in a first direction and spaced apart from each other in a second direction crossing the first direction, the second wiring structure includes second lines extended in the first direction and spaced apart from each other in the second direction, and one of the first lines is between the second lines.
1. A semiconductor memory device comprising:
a memory cell array on a substrate, the memory cell array including a memory cell configured to store data;
a peripheral circuit element on an upper surface of the substrate, the peripheral circuit element configured to control an operation of the memory cell array; and
a wiring structure on the peripheral circuit element, the wiring structure including a first wiring structure and a second wiring structure, the first wiring structure and the second wiring structure spaced apart from each other with an insulating layer interposed therebetween, the first wiring structure configured to receive a first voltage at one end thereof, the first wiring structure configured to receive a second voltage different from the first voltage at the other end thereof due to resistance of the first wiring structure, the second wiring structure configured to receive a third voltage different from the first and second voltages,
wherein the first wiring structure includes (1_1)th and (1_2)th lines extended in a first direction and spaced apart from each other in a second direction crossing the first direction,
the second wiring structure includes (2_1)th and (2_2)th lines extended in the first direction and spaced apart from each other in the second direction, and
the (1_1)th line is between the (2_1)th line and the (2_2)th line.
2. The semiconductor memory device of claim 1 , wherein the (1_1)th line, the (1_2)th line, the (2_1)th line and the (2_2) line are at a same level, based on the substrate.
3. The semiconductor memory device of claim 2 , wherein the (1_1)th line, the (1_2)th line, the (2_1)th line and the (2_2) line include a same conductive material.
4. The semiconductor memory device of claim 1 , wherein
the second wiring structure further includes a wiring connection portion extended in the second direction, at least a portion of which is disposed on the (1_1)th line, the (2_1)th line and the (2_2)th line, and
the (2_1)th line and the wiring connection portion are connected with each other through a connection contact.
5. The semiconductor memory device of claim 1 , wherein the first wiring structure further includes a first wiring connection portion extended in the second direction and electrically connecting the (1_1)th line with the (1_2)th line.
6. The semiconductor memory device of claim 5 , wherein the first wiring connection portion is at a same level as the (1_1)th line, based on the substrate.
7. The semiconductor memory device of claim 5 , wherein
the first wiring connection portion is at a higher level than the (1_1)th line, based on the substrate, and
the (1_1)th line and the first wiring connection portion are connected with each other through a connection contact.
8. The semiconductor memory device of claim 1 , wherein the (1_1)th line has a first thickness in the second direction, and the (2_1)th line has a second thickness greater than the first thickness in the second direction.
9. The semiconductor memory device of claim 1 , wherein
the first wiring structure further includes a (1_3)th line at a higher level than the (1_1)th line, based on the substrate, and
the (1_3)th line is electrically connected with any one of the (1_1)th line and the (1_2)th line through a connection contact.
10. The semiconductor memory device of claim 9 , wherein
the (1_3)th line is extended in the second direction, and
at least a portion of the (1_3)th line crosses the (1_1)th line, the (1_2)th line, the (2_1)th line and the (2_2)th line in a plan view.
11. The semiconductor memory device of claim 9 , wherein
the (1_3)th line is extended in the first direction, and
at least a portion of the (1_3)th line is on any one of the (2_1)th line and the (1_2)th line.
12. A semiconductor memory device comprising:
a memory cell array on a substrate, the memory cell array including a memory cell configured to store data;
a peripheral circuit element on an upper surface of the substrate, the peripheral circuit element configured to control an operation of the memory cell array; and
a wiring structure including first and second wiring structures, the first and second wiring structures connected with the peripheral circuit element through a contact vertically extended onto the substrate, the first and second wiring structures spaced apart from each other with an insulating layer interposed therebetween, a first voltage being applied to one end of the first wiring structure, a second voltage different from the first voltage being applied to the other end of the first wiring structure by resistance of the first wiring structure, and a third voltage different from the first and second voltages being applied to the second wiring structure,
wherein at least a portion of the first wiring structure and at least a portion of the second wiring structure are at a same level based on the substrate.
13. The semiconductor memory device of claim 12 , wherein
the first wiring structure includes (1_1)th and (1_2)th lines extended in a first direction and spaced apart from each other in a second direction crossing the first direction,
the second wiring structure includes (2_1)th and (2_2)th lines extended in the first direction and spaced apart from each other in the second direction, and
the (1_1)th line is between the (2_1)th line and the (2_2)th line.
14. The semiconductor memory device of claim 13 , wherein
the second wiring structure further includes a wiring connection portion extended in the second direction, at least a portion of the wiring connection portion being on the (1_1)th line, the (2_1)th line and the (2_2)th line, and
the (2_1)th line and the wiring connection portion are connected with each other through a connection contact.
15. The semiconductor memory device of claim 13 , wherein the (1_1)th line has a first thickness in the second direction, and the (2_1)th line has a second thickness greater than the first thickness in the second direction.
16. The semiconductor memory device of claim 12 , wherein the peripheral circuit element is electrically connected with one end of the first wiring structure through the contact, and the first voltage is provided through the contact.