Process-invariant resistor and capacitor pair
A process-invariant RC circuit is formed by patterning a metal layer using the same mask pattern to form a metal layer resistor and a metal layer capacitor. The same mask pattern results in the metal layer resistor and the metal layer capacitor each having a plurality of longitudinally-extending fingers having the same width and separation.
1. A resistor-capacitor (RC) circuit comprising:
a plurality of leads in a first metal layer adjacent a semiconductor die, wherein the plurality of leads are configured into a metal layer resistor and configured into a metal layer capacitor that is coupled to the metal layer resistor, and wherein the plurality of leads have the same width; and wherein the plurality of leads includes a plurality of longitudinally-extending leads, a first set of longitudinally-extending fingers, and a second set of longitudinally-extending fingers;
the metal layer resistor including the plurality of longitudinally-extending leads, the plurality of longitudinally-extending leads being arranged in parallel according to a first gap between neighboring ones of the longitudinally-extending leads and coupled to each other; and
the metal layer capacitor including the first set of longitudinally-extending fingers and the second set of longitudinally-extending fingers, wherein the first set of longitudinally-extending fingers are interdigitated with the second set of longitudinally-extending fingers according to an interdigitation gap, and wherein the interdigitation gap equals the first gap.
2. The RC circuit of claim 1 , wherein the metal layer resistor includes a plurality of laterally-extending connectors configured to couple together the longitudinally-extending leads.
3. The RC circuit of claim 1 , wherein the metal layer resistor is connected in series with the metal layer capacitor.
4. The RC circuit of claim 1 , wherein the metal layer resistor is connected in parallel with the metal layer capacitor.
5. The RC circuit of claim 1 , wherein the metal layer resistor further includes a plurality of longitudinally-extending leads arranged in parallel in a second metal layer adjacent the semiconductor die according to the first gap between neighboring ones of the longitudinally-extending leads in the second metal layer.
6. The RC circuit of claim 1 , wherein the metal layer capacitor further includes a first set of longitudinally-extending fingers in a second metal layer adjacent the semiconductor die, wherein the first set of longitudinally-extending fingers in the second metal layer are interdigitated according to the interdigitation gap with a second set of longitudinally-extending fingers in the second metal layer.
7. The RC circuit of claim 1 wherein each longitudinally-extending lead extends across a first length, and wherein each longitudinally-extending finger extends across the first length.
8. The RC circuit of claim 1 , wherein the first metal layer is an aluminum metal layer.
9. The RC circuit of claim 1 , wherein the first metal layer is a copper metal layer.
10. The RC circuit of claim 1 , wherein the semiconductor die includes active circuitry configured to drive an input signal through a first via into a first end of the metal layer resistor and to receive an output signal at a circuit node through a second via at a second end of the metal layer resistor.
11. The RC circuit of claim 10 , wherein the circuit node is connected to the first set of longitudinally-extending fingers through a third via, and wherein the active circuitry includes a ground node connected to the second set of longitudinally-extending fingers through a fourth via.
12. A resistor-capacitor (RC) circuit, comprising:
a metal layer resistor in a first metal layer adjacent a semiconductor die, the metal layer resistor including a plurality of longitudinally-extending leads each having a first width and separated by a first gap equaling the first width; and
a metal layer capacitor in the first metal layer including at least a pair of longitudinally-extending fingers interdigitated according to the first gap with at least at least one opposing longitudinally-extending finger, wherein each longitudinally-extending finger has the first width.
13. The RC circuit of claim 12 , wherein the metal layer resistor is coupled in series with the metal layer capacitor.
14. The RC circuit of claim 12 , wherein the metal layer resistor is coupled in parallel with the metal layer capacitor.