IP Library › Granted Patent US 12,515,945
Granted Patent B2
US 12,515,945 · App. 17/700,780 · Granted Jan 6, 2026

Thin films and methods of fabrication thereof

Inventors: Michael J. Elowson (Hillsborough, CA); Rohan Dhall (El Cerrito, CA); Adam Schwartzberg (Richmond, CA); Shaul Aloni (El Cerrito, CA); Stefano Cabrini (Albany, CA)
Assignee: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
B81C1/00158B81B3/0021B81B2203/0127B81C2201/0132B81C2201/0133B81C2201/0176
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Quick Facts
Patent No.
US 12,515,945
App. No.
17/700,780
Granted
Jan 6, 2026
Kind
B2
Abstract

This disclosure provides methods and apparatus related to thin films. In one aspect, a silicon wafer with a first silicon nitride layer disposed on a first side of the silicon wafer and a second silicon nitride layer disposed on a second side of the silicon wafer is provided. A first side of the first silicon nitride layer is disposed on the first side of the silicon wafer. The second silicon nitride layer is patterned. The silicon wafer is etched to expose the first side of the first silicon nitride layer. A polymer is deposited on a second side of the first silicon nitride layer. A first ceramic layer is deposited on the polymer disposed on the second side of the first silicon nitride layer using an atomic layer deposition process. The first silicon nitride layer and the polymer are etched to expose a first side of the first ceramic layer.

Claims (38)

1 . A method comprising:

(a) providing a silicon wafer with a first silicon nitride layer disposed on a first side of the silicon wafer and a second silicon nitride layer disposed on a second side of the silicon wafer, a first side of the first silicon nitride layer being disposed on the first side of the silicon wafer;

(b) patterning the second silicon nitride layer;

(c) etching the silicon wafer to expose the first side of the first silicon nitride layer;

(d) depositing a polymer on a second side of the first silicon nitride layer;

(e) depositing a first ceramic layer on the polymer disposed on the second side of the first silicon nitride layer using an atomic layer deposition process, a first side of the first ceramic layer being disposed on the polymer; and

(f) after operation (e), etching the first silicon nitride layer and the polymer to expose the first side of the first ceramic layer.

2 . The method of claim 1 , wherein operation (d) includes depositing the polymer on the first side of the first silicon nitride layer, and wherein operation (f) includes etching the polymer disposed on the first side of the first silicon nitride layer.

3 . The method of claim 2 , wherein etching the polymer disposed on the first side of the first silicon nitride layer is performed using an oxygen plasma.

4 . The method of claim 2 , wherein the polymer comprises a poly-para-xylylene.

5 . The method of claim 1 , wherein in operation (f) the first silicon nitride layer is etched using a fluorine-containing plasma, and wherein the polymer is etched using an oxygen plasma.

6 . The method of claim 1 , wherein in operation (c) the silicon wafer is etched using a potassium hydroxide solution.

7 . The method of claim 1 , further comprising:

before operation (d), depositing an adhesion layer on the second side of the first silicon nitride layer, wherein the adhesion layer is an adhesion layer from a group of 3-(trimethoxysilyl) propyl methacrylate, hexamethyldisilazane, 2-(methylthio)ethyl methacrylate, 4-chlorothiophenol, and (3-aminopropyl)triethoxysilane.

8 . The method of claim 1 , wherein the polymer is a polymer from a group of polymethyl methacrylate, a polyimide, and polystyrene.

9 . The method of claim 1 , wherein the first ceramic layer is a ceramic from a group of titanium nitride, niobium nitride, zirconium nitride, molybdenum nitride, tungsten nitride, tantalum nitride, hafnium nitride, vanadium nitride, scandium nitride, a ternary nitride compound including nitrogen and two elements from a group of titanium, niobium, zirconium, molybdenum, tungsten, aluminum, tantalum, hafnium, vanadium, scandium, yttrium, indium, gallium, calcium, and magnesium, aluminum oxide, cobalt oxide, hafnium oxide, molybdenum oxide, niobium oxide, silicon oxide, titanium oxide, tungsten oxide, magnesium oxide, zirconium oxide, tantalum oxide, vanadium oxide, scandium oxide, yttrium oxide, indium oxide, boron oxide, and gallium oxide.

10 . The method of claim 1 , wherein operation (c) creates a free-standing portion of the first silicon nitride layer.

11 . The method of claim 1 , wherein the first ceramic layer is about 1 nanometer to 100 nanometers thick.

12 . The method of claim 1 , wherein the polymer is about 100 nanometers to 400 nanometers thick.

13 . The method of claim 1 , wherein the silicon wafer is about 100 microns to 800 microns thick.

14 . The method of claim 1 , wherein the first silicon nitride layer and the second silicon nitride layer are each about 10 nanometers to 200 nanometers thick.

15 . The method of claim 1 , further comprising:

before operation (f), depositing a second ceramic layer on the first ceramic layer using an atomic layer deposition process, wherein the second ceramic layer comprises a different ceramic than the first ceramic layer.

16 . The method of claim 15 , further comprising:

before operation (f), depositing a third ceramic layer on the second ceramic layer, the third ceramic layer comprising a different ceramic than the first ceramic layer and the second ceramic layer.

17 . The method of claim 15 , further comprising:

before operation (f), depositing a third ceramic layer on the second ceramic layer, the third ceramic layer comprising a same ceramic as the first ceramic layer.

18 . The method of claim 1 , further comprising:

before operation (f), depositing a second polymer on the first ceramic layer; and

after operation (f), removing the second polymer disposed on the first ceramic layer.

19 . The method of claim 18 , wherein the second polymer is removed using a solvent.

20 . A method comprising:

(a) providing a silicon wafer with a first silicon nitride layer disposed on a first side of the silicon wafer and a second silicon nitride layer disposed on a second side of the silicon wafer, a first side of the first silicon nitride layer being disposed on the first side of the silicon wafer;

(b) patterning the second silicon nitride layer;

(c) etching the silicon wafer to expose the first side of the first silicon nitride layer to create a free-standing portion of the first silicon nitride layer;

(d) depositing a polymer on a second side of the first silicon nitride layer;

(e) depositing a first ceramic layer on the polymer disposed on the second side of the first silicon nitride layer using an atomic layer deposition process, a first side of the first ceramic layer being disposed on the polymer; and

(f) etching the first silicon nitride layer and the polymer to expose the first side of the first ceramic layer.

Assignments (2)
CONFIRMATORY LICENSE Recorded May 11, 2022
From: UNIVERSITY OF CALIF-LAWRENC BERKELEY LAB
To: UNITED STATES DEPARTMENT OF ENERGY
Reel/Frame 059890/0068 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 30, 2022
From: ELOWSON, MICHAEL J.; DHALL, ROHAN; SCHWARTZBERG, ADAM; ALONI, SHAUL; CABRINI, STEFANO
To: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
Reel/Frame 059444/0059 →
Continuity (2)
Provisional Application 63167443 · Mar 29, 2021
Related Publication 20220306460A1 · Sep 29, 2022
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