Display device and method of manufacturing the same
A display device includes: a first inorganic insulating layer; a wiring disposed on the first inorganic insulating layer; a second inorganic insulating layer covering the wiring; and a display element disposed on the second inorganic insulating layer, wherein the wiring includes a lower layer including at least one of aluminum and an aluminum alloy, an upper layer disposed on the lower layer and including at least one of titanium and titanium oxide, and an intermediate layer disposed between the lower layer and the upper layer and including titanium aluminide.
1. A display device comprising:
a first inorganic insulating layer;
a wiring disposed on the first inorganic insulating layer;
a second inorganic insulating layer covering the wiring; and
a display element disposed on the second inorganic insulating layer,
wherein the wiring comprises:
a lower layer comprising at least one of aluminum and an aluminum alloy;
an uppermost layer disposed on the lower layer, the uppermost layer comprising titanium oxide; and
an intermediate layer disposed between the lower layer and the uppermost layer, the intermediate layer comprising titanium aluminide.
2. The display device of claim 1 , wherein a width of the wiring in a horizontal direction decreases with increasing distance in a vertical direction in which the second inorganic insulating layer is stacked from the first inorganic insulating layer.
3. The display device of claim 1 , wherein the wiring further comprises:
a first upper layer disposed between the uppermost layer and the intermediate layer, the first upper layer comprising titanium,
wherein material compositions of the uppermost layer and the first upper layer are different from each other.
4. The display device of claim 3 , wherein a combined thickness of the uppermost layer and the first upper layer is in a range of about 30 Å to about 400 Å.
5. The display device of claim 1 , wherein an angle between an upper surface of the first inorganic insulating layer facing the wiring and a side surface of the wiring is about 70 degrees or less.
6. The display device of claim 1 , wherein:
the first inorganic insulating layer comprises a first region overlapping the wiring and a second region adjacent to the first region, and
an upper surface of the first inorganic insulating layer in the first region and an upper surface of the first inorganic insulating layer in the second region have a step difference therebetween.
7. The display device of claim 1 , wherein;
the lower layer comprises the aluminum alloy; and
the aluminum alloy comprises at least one of nickel, lanthanum, neodymium, and germanium.
8. The display device of claim 1 , wherein the wiring is heat-treated.
9. A display device comprising:
a first inorganic insulating laver;
a wiring disposed on the first inorganic insulating layer;
a second inorganic insulating layer covering the wiring; and
a display element disposed on the second inorganic insulating layer,
wherein the wiring comprises:
a lower layer comprising at least one of aluminum and an aluminum alloy;
an upper layer disposed on the lower layer, the upper layer comprising at least one of titanium and titanium oxide;
an intermediate layer disposed between the lower layer and the uppermost layer, the intermediate layer comprising titanium aluminide:
a lower oxide layer disposed on a side surface of the lower layer;
an intermediate oxide layer disposed on a side of the intermediate layer; and
an upper oxide layer disposed on a side surface of the upper layer.
10. The display device of claim 9 , wherein a thickness of the lower oxide layer is in a range of about 10 nm to about 40 nm.