IP Library Granted Patent US 17,710,126
Granted Patent Utility
US 17,710,126 · Confirmation No. 9391

PHOTOACTIVE COMPOUNDS, PHOTORESIST COMPOSITIONS INCLUDING THE SAME, AND PATTERN FORMATION METHODS

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Quick Facts
App. No.
17/710,126
Filed
2022-03-31
Pub. No.
US20230314934A1
Art Unit
1737