Granted Patent B2

US 12,315,694 · App. 17/757,133 · Granted May 27, 2025

Inventor: Shuai Li (Beijing, CN)

Assignee: FOCUS-EBEAM TECHNOLOGY (BEIJING) CO., LTD.

H01J37/1474H01J37/10H01J37/244H01J37/28

Abstract

Claims (22)

1. An electron beam system, comprising:

an electron source, configured to generate an electron beam;

a first beam guide, configured to accelerate the electron beam;

a second beam guide, configured to accelerate the electron beam;

a first control electrode arranged between the first beam guide and the second beam guide, configured to change movement directions of backscattered electrons and secondary electrons generated by the electron beam acting on a specimen to be tested;

a first detector arranged between the first beam guide and the first control electrode, configured to receive the backscattered electrons generated by the electron beam acting on the specimen to be tested;

a first lens device arranged on an outer periphery of the first beam guide, configured to converge the electron beam;

a second lens device arranged on an outer periphery of the second beam guide, configured to converge the electron beam;

a third detector arranged between an upper pole piece of the second lens device and a lower pole piece of the second lens device, configured to receive backscattered electrons generated by the electron beam acting on the specimen to be tested; and

a third control electrode arranged between the upper pole piece of the second lens device and the third detector.

2. The electron beam system of claim 1 , wherein the first control electrode is of an annular shape, and a thickness of a radial cross-section of the first control electrode is gradually increased in a direction outwardly from a center of a circle.

3. The electron beam system of claim 1 , wherein the first control electrode is of an annular shape, and a radial cross-section of the first control electrode is of a rectangular, triangular, or trapezoidal shape.

4. The electron beam system of claim 1 , further comprising:

a shielding device, wherein the shielding device is of an annular shape, and a radial cross-section of the shielding device in a direction outwardly from a center of a circle is a groove opening outward; and

a second detector arranged in the groove of the shielding device, configured to receive secondary electrons generated by the electron beam acting on the specimen to be tested,

wherein a second control electrode is arranged between the second detector and the groove of the shielding device.

5. The electron beam system of claim 4 , wherein the shielding device has a porous structure, and the shielding device is arranged on an upper end of the second beam guide.

6. The electron beam system of claim 1 , wherein the third control electrode is of an annular shape, and a radial cross-section of the third control electrode is L-shaped; and

the third detector is connected to the third control electrode in insulation.

7. The electron beam system of claim 1 , further comprising:

a fourth control electrode, arranged between a lower pole piece of the second lens device and the specimen to be tested;

wherein the first detector is arranged on a lower end of the first beam guide.

Assignments (2)

Priority Claims (1)

Continuity (1)

References Cited (131)