Granted Patent B2

US 12,235,094 · App. 17/784,047 · Granted Feb 25, 2025

Inventors: Korbinian Prause (Buchenberg, DE); Michael Layh (Altusried, DE)

Assignee: Hochschule für angewandte Wissenschaften Kempten Körperschaft des öffentlichen Rechts

G01B11/24

Abstract

Claims (33)

1. A confocal measuring apparatus ( 1 ; 31 ) for 3D measurement of an object surface ( 2 ),

having a light source ( 4 ) for generating measuring light ( 5 ),

having a lens array ( 12 ) having a plurality of array lenses ( 13 ),

having a hyperchromatic telescope ( 14 ) imaging an object plane ( 16 ) into an arrangement plane ( 15 ) of the lens array ( 12 ),

having a multiplexer optics ( 11 ) arranged at a distance of a total of a focal length (f AL ) of the array lenses ( 13 ) and a focal length (f MO ) of the multiplexer optics ( 11 ), downstream of the lens array ( 12 ) in a beam path of the measuring light ( 5 ) which emanates from the object plane ( 16 ), and

having a single pinhole aperture ( 10 ), which is arranged at a distance of the focal length (f MO ) of the multiplexer optics ( 11 ), downstream of the multiplexer optics ( 11 ) in the beam path of the measuring light ( 5 ), which emanates from the object plane ( 16 );

having a collimation optics ( 8 ) which is arranged downstream of the single pinhole aperture ( 10 ) in the beam path of the measuring light ( 5 ) emanating from the object plane ( 16 );

having a spatially resolved detection device ( 24 ) which is arranged downstream of the collimation optics ( 8 ) in the beam path of the measuring light ( 5 ) emanating from the object plane ( 16 ),

having a beam splitter ( 7 ) arranged between the light source ( 4 ) and the single pinhole aperture ( 10 ); and

having a further beam splitter ( 22 ) for dividing the measuring light ( 5 ) into two measuring light partial beams ( 5 A, 5 B),

a first of the two measuring light partial beams ( 5 A) being directed onto a first detector array ( 23 ), and

a second of the two measuring light partial beams ( 5 B) being directed onto a further detector array ( 26 ),

wherein the multiplexer optics ( 11 ) is arranged between the lens array ( 12 ) and the single pinhole aperture ( 10 ), and

wherein the single pinhole aperture ( 10 ) serves as a multiplexer for spatial filtering of the beam paths of all individual channels of the measuring light beam path assigned to the respective array lenses ( 13 ).

2. The confocal measuring apparatus according to claim 1 ,

wherein a beam path of the measuring light ( 5 ) in the hyperchromatic telescope ( 14 ) is telecentric.

3. The confocal measuring apparatus according to claim 1 , comprising at least one color gradient filter ( 25 ) in one of the two measuring light partial beams ( 5 A, 5 B).

4. The confocal measuring apparatus according to claim 1 , wherein a raster spacing of the array lenses ( 13 ) of the lens array ( 12 ) is adapted to a raster spacing of detector pixels of the at least one the first detector array ( 23 ) or the further detector array ( 26 ).

5. The confocal measuring apparatus according to claim 1 , comprising a spectral bandpass filter ( 35 ) for limiting a spectral range of the measuring light.

6. The confocal measuring apparatus according to claim 1 ,

wherein the collimation optics ( 8 ), the single pinhole aperture ( 10 ), the multiplexer optics ( 11 ), the lens array ( 12 ), and the hyperchromatic telescope ( 14 ) are arranged one behind another along an axis perpendicular to the object plane ( 16 ).

7. The confocal measuring apparatus according to claim 1 , further comprising

a folding mirror ( 21 ) arranged between the beam splitter ( 7 ) and the further beam splitter ( 22 ).

8. The confocal measuring apparatus according to claim 1 ,

wherein a raster spacing of the array lenses ( 13 ) of the lens array ( 12 ) is adapted to a raster spacing of detector pixels of the detector array ( 23 ) and the further detector array ( 26 ).

9. The confocal measuring apparatus according to claim 1 ,

wherein a number of the array lenses ( 13 ) is at least 10,000.

10. The confocal measuring apparatus according to claim 1 ,

wherein a number of the array lenses ( 13 ) is 10,000 to 100,000.

11. The confocal measuring apparatus according to claim 1 ,

wherein a number of the array lenses ( 13 ) is 10,000 to 1,000,000.

12. The confocal measuring apparatus according to claim 1 ,

wherein a number of the array lenses ( 13 ) is 100,000 to 1,000,000.

Assignments (1)

Priority Claims (1)

Continuity (1)

References Cited (37)