Magnetic sensor and method for manufacturing magnetic sensor
A magnetic sensor includes: plural sensitive elements 31 each including a soft magnetic material layer 105 having a longitudinal direction and a transverse direction and a conductor layer having higher conductivity than the soft magnetic material layer 105 and extending through the soft magnetic material layer 105 in a longitudinal direction, the sensitive element 31 having uniaxial magnetic anisotropy in a direction intersecting the longitudinal direction and being configured to sense a magnetic field by a magnetic impedance effect; and a connecting portion 32 continuous with the conductor layer of the sensitive element and configured to connect transversely adjacent sensitive elements 31 in series.
1. A magnetic sensor comprising:
a plurality of sensitive elements, each of the plurality of sensitive elements comprising a soft magnetic material layer having a longitudinal direction and a transverse direction and a conductor layer having higher conductivity than the soft magnetic material layer and extending through the soft magnetic material layer in the longitudinal direction, each of the plurality of sensitive elements having uniaxial magnetic anisotropy in a direction intersecting the longitudinal direction, each of the plurality of sensitive elements being configured to sense a magnetic field by a magnetic impedance effect; and
a connecting portion continuous with the conductor layer of one of the plurality of sensitive elements and configured to connect transversely adjacent ones of the plurality of sensitive elements in series,
wherein each of the plurality of sensitive elements further comprises a diffusion inhibiting layer between the conductor layer and the soft magnetic material layer, the diffusion inhibiting layer being configured to inhibit diffusion of elements between the conductor layer and the soft magnetic material layer, and
wherein the connecting portion comprises a connecting conductor layer and a connecting diffusion inhibiting layer, the connecting conductor layer being continuous with the conductor layer of the one of the plurality of sensitive elements, the connecting diffusion inhibiting layer being continuous with the diffusion inhibiting layer of the one of the plurality of sensitive elements.
2. The magnetic sensor according to claim 1 , wherein the soft magnetic material layer of each of the plurality of sensitive elements is formed with a magnetic domain having magnetization oriented in a circumferential direction centered about the conductor layer.
3. The magnetic sensor according to claim 1 , wherein the diffusion inhibiting layer of each of the plurality of sensitive elements is disposed around a perimeter of the conductor layer centered about an axis of the longitudinal direction.
4. The magnetic sensor according to claim 2 , wherein the diffusion inhibiting layer of each of the plurality of sensitive elements is disposed around a perimeter of the conductor layer centered about an axis of the longitudinal direction.
5. A method for manufacturing a magnetic sensor, the method comprising:
forming a plurality of first soft magnetic material portions using a soft magnetic material, each of the plurality of first soft magnetic material portions being strip-shaped and having a longitudinal direction and a transverse direction;
concurrently forming a plurality of conductor portions and a connecting portion using a material with higher conductivity than the soft magnetic material, the plurality of conductor portions being formed on respective ones of the plurality of first soft magnetic material portions so as to extend in the longitudinal direction, the connecting portion being configured to connect adjacent ones of the plurality of conductor portions; and
forming a plurality of second soft magnetic material portions using the soft magnetic material, the plurality of second soft magnetic material portions being formed above respective ones of the plurality of first soft magnetic material portions so as to cover respective ones of the plurality of conductor portions,
wherein each of the plurality of conductor portions and the connecting portion are formed by sequential deposition of a conductor layer and a diffusion inhibiting layer, the conductor layer having higher conductivity than the soft magnetic material, the diffusion inhibiting layer being configured to inhibit diffusion of elements between the conductor layer and the soft magnetic material, and
wherein the connecting portion comprises a connecting conductor layer and a connecting diffusion inhibiting layer, the connecting conductor layer being continuous with the conductor layer of the one of the plurality of sensitive elements, the connecting diffusion inhibiting layer being continuous with the diffusion inhibiting layer of the one of the plurality of sensitive elements.